Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic - Revision history

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:20:55Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:20, 1 April 2025
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	If permission is granted the standard cleaning process for the approved substrates are		If permission is granted the standard cleaning process for the approved substrates are
	# ~~Soap sonic~~ cleaning as described below		# Triton-X soap cleaning as described below
	# 10 min cleaning in a piranha solution (sulphuric acid and hydrogen peroxide)		# 10 min cleaning in a piranha solution (sulphuric acid and hydrogen peroxide)

Thope: /* Cleaning of samples that have been out of the cleanroom */

2025-04-01T07:20:37Z

Cleaning of samples that have been out of the cleanroom

← Older revision		Revision as of 09:20, 1 April 2025
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	==~~Cleaning of samples that have been out of the cleanroom~~==		==Triton-X soap cleaning==
	[[Image:Sonic-clean.jpg\|300x300px\|thumb\|Soap sonic clean placed in the wash bench in the changing room (gowning). ]]		[[Image:Sonic-clean.jpg\|300x300px\|thumb\|Soap sonic clean placed in the wash bench in the changing room (gowning). ]]
	The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is metal ion free. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.		The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is metal ion free. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.

Thope: /* Cleaning of samples that have been out of the cleanroom */

2025-04-01T07:19:43Z

Cleaning of samples that have been out of the cleanroom

← Older revision		Revision as of 09:19, 1 April 2025
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	[[Image:Sonic-clean.jpg\|300x300px\|thumb\|Soap sonic clean placed in the wash bench in the changing room (gowning). ]]		[[Image:Sonic-clean.jpg\|300x300px\|thumb\|Soap sonic clean placed in the wash bench in the changing room (gowning). ]]
	The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is metal ion free. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.		The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is metal ion free. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.

	It is used for samples (typical wafers or chips) that have been out of the cleanroom e.g. if they have been diced, and you want to bring them in again for measurement or further processing. In most cases the Triton X-100 sonic clean is not enough. The samples will also have to be cleaned in a [http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha piranha] solution. You must always ask DTU Nanolab for permission to bring your samples back into the cleanroom once they have been out of the cleanroom.

	===Procedure===		===Procedure===

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:19:12Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:19, 1 April 2025
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	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].

			If permission is granted the standard cleaning process for the approved substrates are
			# Soap sonic cleaning as described below
			# 10 min cleaning in a piranha solution (sulphuric acid and hydrogen peroxide)

			If the samples can not handle such a cleaning process it must be specified in the form and an alternative cleaning process must be suggested by the user.


	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:13:58Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:13, 1 April 2025
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	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [[mailto:training@nanolab.dtu.dk\|training@nanolab.dtu.dk]].		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].

	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:13:09Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:13, 1 April 2025
Line 7:		Line 7:

	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [mailto:training@nanolab.dtu.dk].		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [[mailto:training@nanolab.dtu.dk\|training@nanolab.dtu.dk]].

	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:12:34Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:12, 1 April 2025
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	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to training@nanolab.dtu.dk.		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to [mailto:training@nanolab.dtu.dk].

	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:11:31Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:11, 1 April 2025
Line 7:		Line 7:

	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the ~~and submitting it to~~		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the [[:File:Request to bring Samples into CR v1.51.docx\|Request to bring samples into cleanroom form]] and submitting it to training@nanolab.dtu.dk.
	[[:File:Request to bring Samples into CR v1.51.docx]\|Request to bring samples into cleanroom form]

	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope: /* Bringing samples into the DTU Nanolab cleanroom */

2025-04-01T07:09:08Z

Bringing samples into the DTU Nanolab cleanroom

← Older revision		Revision as of 09:09, 1 April 2025
Line 7:		Line 7:

	=Bringing samples into the DTU Nanolab cleanroom=		=Bringing samples into the DTU Nanolab cleanroom=
	To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the Request to bring samples into cleanroom form ~~and submitting it to~~		To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the and submitting it to
			[[:File:Request to bring Samples into CR v1.51.docx]\|Request to bring samples into cleanroom form]

	==Cleaning of samples that have been out of the cleanroom==		==Cleaning of samples that have been out of the cleanroom==

Thope at 07:07, 1 April 2025

2025-04-01T07:07:41Z

← Older revision		Revision as of 09:07, 1 April 2025
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	'''All links to Labmanager requires login.'''		'''All links to Labmanager requires login.'''


			=Bringing samples into the DTU Nanolab cleanroom=
			To avoid cross contamination of fabrication tools and in order to keep particle levels at a minimum it is in general not allowed to bring substrates processed outside the cleanroom into the cleanroom. Users who need to bring this type of substrates into the cleanroom for processing or characterization must obtain permission to do so. This can be obtained by filling out the Request to bring samples into cleanroom form and submitting it to