Specific Process Knowledge/Wafer cleaning - Revision history

Mmat at 13:51, 25 September 2026

2026-09-25T13:51:01Z

← Older revision		Revision as of 15:51, 25 September 2026
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''

	== Cleaning of wafers ==		== Cleaning of wafers ==
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Mmat: /* Items that have been outside the cleanroom */

2026-09-25T13:45:35Z

Items that have been outside the cleanroom

← Older revision		Revision as of 15:45, 25 September 2026
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	===Items that have been outside the cleanroom===		===Items that have been outside the cleanroom===
	Before bringing samples into the cleanroom you have to get approval from Nanolab ("Bring samples into cleanroom"-procedure). The approval process and cleaning procedure is described on <b>[[Specific_Process_Knowledge/Wafer_cleaning/~~Bring_samples_into_cleanroom~~ \| here]]</b>. Please note that the approval for bringing samples into the cleanroom is personal (and fellow group members need to send in seperate request).		Before bringing samples into the cleanroom you have to get approval from Nanolab ("Bring samples into cleanroom"-procedure). The approval process and cleaning procedure is described on <b>[[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_Cleanroom_or_PolyFabLab\| here]]</b>. Please note that the approval for bringing samples into the cleanroom is personal (and fellow group members need to send in seperate request).
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Mmat at 14:36, 5 May 2025

2025-05-05T14:36:44Z

← Older revision		Revision as of 16:36, 5 May 2025
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''



	~~'''All links to Labmanager requires login.'''~~

	~~'''All measurements on this page has been made by Nanolab staff.'''~~

	== Cleaning of wafers ==		== Cleaning of wafers ==

Mmat: /* Items that have been outside the cleanroom */

2025-04-23T15:47:36Z

Items that have been outside the cleanroom

← Older revision		Revision as of 17:47, 23 April 2025
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	===Items that have been outside the cleanroom===		===Items that have been outside the cleanroom===
	Before bringing samples into the cleanroom you have to get approval from Nanolab. The approval process and cleaning procedure is described on [[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom\|~~Bring~~ samples into cleanroom]]		Before bringing samples into the cleanroom you have to get approval from Nanolab ("Bring samples into cleanroom"-procedure). The approval process and cleaning procedure is described on <b>[[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom \| here]]</b>. Please note that the approval for bringing samples into the cleanroom is personal (and fellow group members need to send in seperate request).
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Mmat: /* Masks */

2025-04-23T15:42:50Z

Masks

← Older revision		Revision as of 17:42, 23 April 2025
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	===Masks===		===Masks===
	Masks that have become dirty by dust particles or resist residues have to be cleaned in the 7-up (mask) bath before use.		Masks that have become dirty by dust particles or resist residues have to be cleaned in the 7-up (mask) bath before use. You can find more information [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Wafer_cleaning/7-up_%26_Piranha here].
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Mmat: /* Wafers that go into the high temperature furnaces */

2025-04-23T15:41:21Z

Wafers that go into the high temperature furnaces

← Older revision		Revision as of 17:41, 23 April 2025
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	===Wafers that go into the high temperature furnaces===		===Wafers that go into the high temperature furnaces===
	As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.		As a general rule all wafers that go into the high temperature furnaces need a full RCA clean directly before the furnace step.
			There are, however, some exception to this rule. Please find more information on wafer cleaning before furnace processes [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/Storage_and_cleaning_of_wafer_to_the_A,_B,_C_and_E_stack_furnaces here].
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Thope: /* Items that have been outside the cleanroom */

2025-04-11T08:24:24Z

Items that have been outside the cleanroom

← Older revision		Revision as of 10:24, 11 April 2025
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	===Items that have been outside the cleanroom===		===Items that have been outside the cleanroom===
	Before bringing samples into the cleanroom you have to get approval from Nanolab~~, this~~ procedure is described on [[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom\|Bring samples into cleanroom]]		Before bringing samples into the cleanroom you have to get approval from Nanolab. The approval process and cleaning procedure is described on [[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom\|Bring samples into cleanroom]]
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Thope: /* Items that have been outside the cleanroom */

2025-04-11T08:23:38Z

Items that have been outside the cleanroom

← Older revision		Revision as of 10:23, 11 April 2025
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	===Items that have been outside the cleanroom===		===Items that have been outside the cleanroom===
	Before bringing samples into the cleanroom you have to get approval from Nanolab~~. Send an e-mail to '''~~[mailto:nanolabsupport@nanolab.dtu.dk?Subject=Request%20to%20bring%20samples%20into%20the%20cleanroom&body=Describe%20your%20samples:%0AWhy%20you%20need%20to%20bring%20them%20in%20the%20cleanroom:%0Aand%20which%20processes%20your%20are%20going%20to%20use: nanolabsupport@nanolab.dtu.dk]~~'''.~~		Before bringing samples into the cleanroom you have to get approval from Nanolab, this procedure is described on [[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_cleanroom\|Bring samples into cleanroom]]

	~~When you have an approval the items that have been outside the cleanroom should always be cleaned in soap and ultra sound followed by a 7-up or Piranha clean before entering the cleanroom.~~
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Mmat at 13:49, 12 February 2025

2025-02-12T13:49:07Z

← Older revision		Revision as of 15:49, 12 February 2025
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			{{cc-nanolab}}

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''

	~~'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''~~

	'''All links to Labmanager requires login.'''		'''All links to Labmanager requires login.'''

Mbec at 07:40, 2 February 2023

2023-02-02T07:40:23Z

← Older revision		Revision as of 09:40, 2 February 2023
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning click here]'''

			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Labmanager requires login.'''

			'''All measurements on this page has been made by Nanolab staff.'''

	== Cleaning of wafers ==		== Cleaning of wafers ==