Specific Process Knowledge/Thin film deposition/Deposition of Magnesium - Revision history

Mmat at 17:25, 10 June 2025

2025-06-10T17:25:31Z

← Older revision		Revision as of 19:25, 10 June 2025
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	=Deposition of Magnesium=		=Deposition of Magnesium=

Reet at 10:01, 9 June 2023

2023-06-09T10:01:14Z

← Older revision		Revision as of 12:01, 9 June 2023
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	*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.		*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.

	~~===Barbara Shaw, Penn State University ===~~		*More detailed info may be found in [https://labintra.nanolab.dtu.dk/index.php?title=Main_Page/Application_Notes/Thin_film_deposition/Magnesium_deposition LabIntra] (requires login).
	~~E-beam evaporation of Mg~~
	*~~Best w dedicated system for Mg.~~
	*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
	*They had no issues w Mg and their cryo pump as far as she knows.

	~~===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung ===~~
	~~Sputter deposition and also cathode arc and ion beam sputtering of Mg~~
	*Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.
	*On cross-contamination: ~~You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect~~. ~~But - don’t underestimate cleanliness~~.
	*It is possible to contact them and visit their lab. ~~They have a lot of expertise on Mg~~.

	=~~==Diederik Depla, Ghent University===~~
	~~Sputtering including HiPIMS of Mg~~
	*Mainly used their setup for Mg, haven’t checked cross-contamination.
	*Believes that Mg on vent will turn into MgO (stable/~~low-sputter-yield) which should not be a big problem in terms of contamination~~
	*They used a turbo/~~rotary vane pump, no specific reason.~~
	*Mg sputters easily, easy to handle targets compared to Ca and Li (~~sic!~~)~~. During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue~~.

Eves at 16:03, 1 February 2023

2023-02-01T16:03:14Z

← Older revision		Revision as of 18:03, 1 February 2023
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			<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i>

	=Deposition of Magnesium=		=Deposition of Magnesium=

Reet: /* Mg advice spring 2020 */

2022-09-21T09:26:00Z

Mg advice spring 2020

← Older revision		Revision as of 11:26, 21 September 2022
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	===Barbara Shaw, Penn State University ===		===Barbara Shaw, Penn State University ===
	E-beam evaporation of Mg		E-beam evaporation of Mg
	*Best w dedicated system for ~~Mg, the Nanofab lab at Penn State doesn’t allow~~ Mg.		*Best w dedicated system for Mg.
	*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.		*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
	*They had no issues w Mg and their cryo pump as far as she knows.		*They had no issues w Mg and their cryo pump as far as she knows.

Reet: /* Mg advice spring 2020 */

2020-08-04T10:38:13Z

Mg advice spring 2020

← Older revision		Revision as of 12:38, 4 August 2020
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	*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.		*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.

	===~~Input from~~ Barbara Shaw, Penn State University ===		===Barbara Shaw, Penn State University ===
	E-beam evaporation of Mg		E-beam evaporation of Mg
	*Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.		*Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.

Reet: /* Summary Mg advice spring 2020 */

2020-08-04T10:37:54Z

Summary Mg advice spring 2020

Reet: /* Summary Mg advice spring 2020 */

2020-08-04T09:38:07Z

Summary Mg advice spring 2020

Reet: new page on Magnesium

2020-08-04T09:36:35Z

new page on Magnesium

New page

=Deposition of Magnesium=

Magnesium is a relatively volatile metal and we have never deposited it here at Nanolab. Because of its high vapor pressure it is not well suited for deposition in multi-user systems as it will easily re-evaporate from the chamber surfaces and contaminate the films of subsequent users. We are also concerned about deposition of Mg in a chamber with a cryo pump as a very volatile metal may clog the pump.

If you wish to deposit magnesium, please explore options with collaborators at other institutions.

Below is a summary of information compiled Spring 2020 when we considered depositing Mg at Nanolab.

==Summary Mg advice spring 2020==
Information compiled by Rebecca (reet)

*None of the groups we wrote to have mentioned that they have experience with using the chamber for something else after using it for Mg.
*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.

===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg) ===
Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.
Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
They had no issues w Mg and their cryo pump as far as she knows.

===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung (sputter deposition and also cathode arc and ion beam sputtering of Mg in the past)===
Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.
On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.
It is possible to contact them and visit their lab. They have a lot of expertise on Mg.

===Diederik Depla, Ghent University (sputtering including HiPIMS of Mg)===
Mainly used their setup for Mg, haven’t checked cross-contamination.
Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination
They used a turbo/rotary vane pump, no specific reason.
Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.

← Older revision		Revision as of 12:37, 4 August 2020
Line 7:		Line 7:
	Below is a summary of information compiled Spring 2020 when we considered depositing Mg at Nanolab.		Below is a summary of information compiled Spring 2020 when we considered depositing Mg at Nanolab.

	==~~Summary~~ Mg advice spring 2020==		==Mg advice spring 2020==
	Input collected by Rebecca (reet)		Input collected by Rebecca (reet)

Line 13:		Line 13:
	*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.		*At Penn State they used a cryo pump with Mg e-beam evaporation for many experiments (at least 2 students and several papers) apparently without issues with the pump.

	===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg~~) ===~~		===Input from Barbara Shaw, Penn State University ===
			E-beam evaporation of Mg
	*Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.		*Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.
	*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.		*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
	*They had no issues w Mg and their cryo pump as far as she knows.		*They had no issues w Mg and their cryo pump as far as she knows.

	===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung ~~(sputter~~ deposition and also cathode arc and ion beam sputtering of Mg ~~in the past)===~~		===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung ===
			Sputter deposition and also cathode arc and ion beam sputtering of Mg
	*Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.		*Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.
	*On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.		*On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.
	*It is possible to contact them and visit their lab. They have a lot of expertise on Mg.		*It is possible to contact them and visit their lab. They have a lot of expertise on Mg.

	===Diederik Depla, Ghent University ~~(sputtering~~ including HiPIMS of Mg~~)===~~		===Diederik Depla, Ghent University===
			Sputtering including HiPIMS of Mg
	*Mainly used their setup for Mg, haven’t checked cross-contamination.		*Mainly used their setup for Mg, haven’t checked cross-contamination.
	*Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination		*Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination
	*They used a turbo/rotary vane pump, no specific reason.		*They used a turbo/rotary vane pump, no specific reason.
	*Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.		*Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.

← Older revision		Revision as of 11:38, 4 August 2020
Line 8:		Line 8:

	==Summary Mg advice spring 2020==		==Summary Mg advice spring 2020==
	~~Information compiled~~ by Rebecca (reet)		Input collected by Rebecca (reet)

	*None of the groups we wrote to have mentioned that they have experience with using the chamber for something else after using it for Mg.		*None of the groups we wrote to have mentioned that they have experience with using the chamber for something else after using it for Mg.
Line 14:		Line 14:

	===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg) ===		===Input from Barbara Shaw, Penn State University (e-beam evaporation of Mg) ===
	Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.		*Best w dedicated system for Mg, the Nanofab lab at Penn State doesn’t allow Mg.
	Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.		*Recommend major cleaning prior to Mg, predeposit a bunch of Mg. Major clean afterwards and predeposit next material too. Sounds like their system hasn’t been used for other stuff after Mg, so no experience with that.
	They had no issues w Mg and their cryo pump as far as she knows.		*They had no issues w Mg and their cryo pump as far as she knows.

	===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung (sputter deposition and also cathode arc and ion beam sputtering of Mg in the past)===		===Michael Störmer, Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung (sputter deposition and also cathode arc and ion beam sputtering of Mg in the past)===
	Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.		*Mg challenging, different to other metals. Oxidizes easily - think about the environment for the prepared films.
	On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.		*On cross-contamination: You see the effect of Mg on the base pressure, as you do for Ti coatings, Michael doesn’t think it’s a long-lasting effect. But - don’t underestimate cleanliness.
	It is possible to contact them and visit their lab. They have a lot of expertise on Mg.		*It is possible to contact them and visit their lab. They have a lot of expertise on Mg.

	===Diederik Depla, Ghent University (sputtering including HiPIMS of Mg)===		===Diederik Depla, Ghent University (sputtering including HiPIMS of Mg)===
	Mainly used their setup for Mg, haven’t checked cross-contamination.		*Mainly used their setup for Mg, haven’t checked cross-contamination.
	Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination		*Believes that Mg on vent will turn into MgO (stable/low-sputter-yield) which should not be a big problem in terms of contamination
	They used a turbo/rotary vane pump, no specific reason.		*They used a turbo/rotary vane pump, no specific reason.
	Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.		*Mg sputters easily, easy to handle targets compared to Ca and Li (sic!). During non-reactive sputtering, MgO will form on target but Mg sputters so fast it’s not a big issue.