Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace - Revision history

Pevo: /* The Resist Pyrolysis furnace */

2024-03-21T12:57:49Z

The Resist Pyrolysis furnace

← Older revision		Revision as of 14:57, 21 March 2024
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	[[Category: Furnaces\|A2]]		[[Category: Furnaces\|A2]]

	==The Resist Pyrolysis furnace==		==The Resist Pyrolysis furnace (research tool)==

	[[Image:ATV_ovn.jpg\|thumb\|365x365px\|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]]		[[Image:ATV_ovn.jpg\|thumb\|365x365px\|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]]

Pevo: /* The Resist Pyrolysis furnace */

2024-02-26T13:18:02Z

The Resist Pyrolysis furnace

← Older revision		Revision as of 15:18, 26 February 2024
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	All process gases (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.		All process gases (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.

	The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. The maximum allowed processing time and temperature is 3 hours at 1050 <sup>o</sup>C.		The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. However, the front heater is unfortunately broken at the moment. The heating can be done very fast, up to 30 <sup>o</sup>C/min. The maximum allowed processing time and temperature is 3 hours at 1050 <sup>o</sup>C.

	The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down~~. However, for safety reasons, the cooling fans will not the activated when there is hydrogen in the furnace, and cooling will then be very slow~~.		The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down.

	It is not possible to open the furnace when the temperature is above 300 <sup>o</sup>C.		It is not possible to open the furnace, when the temperature is above 300 <sup>o</sup>C.

	For resist pyrolysis, samples with different resist layers are heated up to maximum ~~1100~~ <sup>o</sup>C in a nitrogen atmosphere. At high temperatures carbon is formed by pyrolysis of the resist. In this way conductive structures can be made from a resist patterned sample. If oxygen from the air or from outgassing of the resist is present in the furnace, the resist layer will be removed, thus it is important to evacuate the furnace and flush it with nitrogen, before a high temperature for resist pyrolysis is obtained. Pyrolysis of a large amount of resist may also be a problem due to resist outgassing.		For resist pyrolysis, samples with different resist layers are heated up to maximum 1050 <sup>o</sup>C in a nitrogen atmosphere. At high temperatures carbon is formed by pyrolysis of the resist. In this way conductive structures can be made from a resist patterned sample. If oxygen from the air or from outgassing of the resist is present in the furnace, the resist layer will be removed, thus it is important to evacuate the furnace and flush it with nitrogen, before a high temperature for resist pyrolysis is obtained. Pyrolysis of a large amount of resist may also be a problem due to resist outgassing.

Pevo: /* Overview of the performance of the Resist Pyrolysis furnace and process related parameters */

2024-02-26T13:14:56Z

Overview of the performance of the Resist Pyrolysis furnace and process related parameters

← Older revision		Revision as of 15:14, 26 February 2024
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	\|-		\|-
	!style="background:silver; color:black;" align="center"\|Purpose		!style="background:silver; color:black;" align="center"\|Purpose
	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|Processes
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
			*Pyrolysis of different resists
			*Annealing in N<sub>2</sub>
	*Dry oxidation of silicon		*Dry oxidation of silicon
	*Annealing in N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses
	*Pyrolysis of different resists
	\|-		\|-
	!style="background:silver; color:black" align="center"\|Performance		!style="background:silver; color:black" align="center"\|Performance
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	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Process parameter range		!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Process parameter range
	\|style="background:LightGrey; color:black"\|Process ~~Temperature~~		\|style="background:LightGrey; color:black"\|Process temperature
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*No vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C		*No vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*1 atm		*1 atm
	*Vacuum down to ~0.1 mbar (depends on gas flow)		*Vacuum down to ~0.1 mbar (depends on the gas flow)
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Gasses on the system		\|style="background:LightGrey; color:black"\|Gasses on the system
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	*N<sub>2</sub>: 20 slm		*N<sub>2</sub>: 20 slm
	*O<sub>2</sub>: 10 slm		*O<sub>2</sub>: 10 slm
	*H<sub>2</sub>: 5 slm (max 2 slm for vacuum processes)		*H<sub>2</sub>: 5 slm (max 2 slm for vacuum processes) - Not available
	*N<sub>2</sub> mix : 10 slm (for H<sub>2</sub>-N<sub>2</sub> gas mixture)		*N<sub>2</sub> mix : 10 slm (for H<sub>2</sub>-N<sub>2</sub> gas mixture) - Do not use
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates		!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*1-30 50 mm, 100 mm or 150 mm wafers per run		*1-30 50 mm, 100 mm or 150 mm wafers per run
	*1-50 200 mm wafers per run (not possible with all quartz sets)		*Smaller samples (placed on a Si carrier wafer)
	*Smaller samples (placed on Si carrier ~~wafers~~)
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Substrate materials allowed		\|style="background:LightGrey; color:black"\|Substrate materials allowed
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*~~Depends on the quartz set~~		*Only samples for resist pyrolysis, and all sample materials have to be approved by DTU Nanolab. Samples with metals and III-V materials are NOT allowed
	\|-		\|-
	\|}		\|}

Pevo: /* Overview of the performance of the Resist Pyrolysis furnace and process related parameters */

2024-02-26T13:10:20Z

Overview of the performance of the Resist Pyrolysis furnace and process related parameters

← Older revision		Revision as of 15:10, 26 February 2024
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	\|style="background:LightGrey; color:black"\|Process Temperature		\|style="background:LightGrey; color:black"\|Process Temperature
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*No vacuum: 25 <sup>o</sup>C - ~~1100~~ <sup>o</sup>C		*No vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C
	*Vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C		*Vacuum: 25 <sup>o</sup>C - 1050 <sup>o</sup>C, max 3 hours at 1050 <sup>o</sup>C
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Process pressure		\|style="background:LightGrey; color:black"\|Process pressure

Pevo: /* The Resist Pyrolysis furnace */

2024-02-26T13:09:44Z

The Resist Pyrolysis furnace

← Older revision		Revision as of 15:09, 26 February 2024
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	==The Resist Pyrolysis furnace==		==The Resist Pyrolysis furnace==

	[[Image:ATV_ovn.jpg\|thumb\|365x365px\|~~Multipurpose Annealing Furnace~~. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]]		[[Image:ATV_ovn.jpg\|thumb\|365x365px\|Resist Pyrolysis furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]]
	[[Image:ATV_ovn_boat.jpg\|thumb\|335x335px\|Boat with wafers for the ~~Multipurpose Annealing Furnace~~. Photo: DTU Nanolab internal]]		[[Image:ATV_ovn_boat.jpg\|thumb\|335x335px\|Boat with wafers for the Resist Pyrolysis furnace (from an oxidation test). Photo: DTU Nanolab internal]]

	From February 2024: The name of the furnace has changed from Multipurpose Anneal ~~Furnace~~ to Resist Pyrolysis ~~Furnace~~ (or “Furnace: Resist Pyrolysis” in LabManager). At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis		From February 2024: The name of the furnace has changed from "Multipurpose Anneal furnace" to "Resist Pyrolysis furnace" (or “Furnace: Resist Pyrolysis” in LabManager). At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis

	The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015.		The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015.

	The furnace is mainly being used for resist pyrolysis ~~(see the next section)~~. It can also be used for annealing in nitrogen (N2) and oxidation with oxygen (O2), but O2 is mostly used for cleaning of the furnace after resist pyrolysis.		The furnace is mainly being used for resist pyrolysis. It can also be used for annealing in nitrogen (N<sub>2</sub>) and oxidation with oxygen (O<sub>2</sub>), but O<sub>2</sub> is mostly used for cleaning of the furnace after resist pyrolysis.

	Process steps can run either in vacuum or at atmospheric pressure. A small N2 or O2 flow (up to 2 slm) can be applied in vacuum steps.		Process steps can run either in vacuum or at atmospheric pressure. A small N<sub>2</sub> or O<sub>2</sub> flow (up to 2 slm) can be applied in vacuum steps.

	The quartz parts in the furnace can be changed, depending on what processes and samples the furnace is used for, but it been decided that a quartz set for resist resist pyrolysis will be mounted in the furnace all the time. This limits the number of materials that are allowed in the furnace ~~(see section 7.2)~~.		The quartz parts in the furnace can be changed, depending on what processes and samples the furnace is used for, but it has been decided that a quartz set for resist resist pyrolysis will be mounted in the furnace all the time. This limits the number of materials that are allowed in the furnace.

	All process ~~gasses~~ (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.		All process gases (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.

	The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. ~~For atmospheric pressure processes the~~ maximum ~~temperature is 1100 <sup>o</sup>C,~~ and ~~for vacuum processes the maximum~~ temperature is 1050 <sup>o</sup>C.		The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. The maximum allowed processing time and temperature is 3 hours at 1050 <sup>o</sup>C.

	The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down. However, for safety reasons, the cooling fans will not the activated when there is hydrogen in the furnace, and cooling will then be very slow.		The furnace body surrounding the furnace tube consists of a top and bottom half-shell. To cool down the furnace (when the temperature is below 800 <sup>o</sup>C), the top half shelf can be lifted up, and cooling fans will then flow air from the surroundings around the furnace tube to cool it down. However, for safety reasons, the cooling fans will not the activated when there is hydrogen in the furnace, and cooling will then be very slow.

Pevo: /* Process information */

2024-02-26T12:57:39Z

Process information

← Older revision		Revision as of 14:57, 26 February 2024
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	==Process information==		==Process information==
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page

Pevo: /* Process information */

2024-02-26T12:53:55Z

Process information

← Older revision		Revision as of 14:53, 26 February 2024
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	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
			*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page
	*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page		*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page

Pevo: /* Process information */

2024-02-26T12:52:06Z

Process information

← Older revision		Revision as of 14:52, 26 February 2024
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	==Process information==		==Process information==
	*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]

Pevo: /* Process information */

2024-02-26T12:49:12Z

Process information

← Older revision		Revision as of 14:49, 26 February 2024
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	==Process information==		==Process information==
	*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
			*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page

Pevo: /* Process information */

2024-02-26T12:38:53Z

Process information

← Older revision		Revision as of 14:38, 26 February 2024
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	==Process information==		==Process information==
	*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page
	*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
			*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page
			*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page

	==Overview of the performance of the Resist Pyrolysis furnace and process related parameters==		==Overview of the performance of the Resist Pyrolysis furnace and process related parameters==

← Older revision		Revision as of 14:57, 26 February 2024
Line 41:		Line 41:
	==Process information==		==Process information==
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page

← Older revision		Revision as of 14:53, 26 February 2024
Line 42:		Line 42:
	*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
			*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace\|Resist pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page
	*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page		*Oxidation: look at the [[Specific Process Knowledge/Thermal Process/Oxidation\|Oxidation]] page

← Older revision		Revision as of 14:49, 26 February 2024
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	==Process information==		==Process information==
	*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]		*[[Specific_Process_Knowledge/Thermal_Process/Furnace:_Multipurpose_annealing/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
			*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test\|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]]
	*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]		*[[Specific_Process_Knowledge/Thermal_Process/Pyrolysis/Pyrolysis_with_Multipurpose_Anneal_Furnace\|Pyrolysis]]
	*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page		*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing\|Annealing]] page