Specific Process Knowledge/Thermal Process/BCB Curing Oven - Revision history

Pevo at 08:58, 30 July 2024

2024-07-30T08:58:26Z

← Older revision		Revision as of 10:58, 30 July 2024
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	*Quartz		*Quartz
	*Resist (prebaked)		*Resist (prebaked)
	*Metals ~~(only Al~~, ~~Ni, Ge~~ and Au)		*Metals on Material list 1, 2 and 3 (see the cross contamination information in LabManager)
	\|-		\|-
	\|}		\|}

Jehan: /* BCB Curing Oven */

2024-06-26T07:53:45Z

BCB Curing Oven

← Older revision		Revision as of 09:53, 26 June 2024
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	[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]]		[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]]

	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene, cyclotene®) and for alloying of some metals in a nitrogen atmosphere.

	During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C.		During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C.

Paphol: /* BCB Curing Oven */

2023-01-31T13:19:12Z

BCB Curing Oven

← Older revision		Revision as of 15:19, 31 January 2023
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	== BCB Curing Oven ==		== BCB Curing Oven ==
	[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in room Cx1]]		[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in room Cx1/ Photo: DTU Nanolab internal]]

	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.

Paphol at 13:18, 31 January 2023

2023-01-31T13:18:11Z

← Older revision		Revision as of 15:18, 31 January 2023
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	'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/BCB_Curing_Oven click here]'''		'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process/BCB_Curing_Oven click here]'''

			''This page is written by DTU Nanolab internal''
	[[Category: Equipment \|Thermal BCB]]		[[Category: Equipment \|Thermal BCB]]
	[[Category: Thermal process\|BCB]]		[[Category: Thermal process\|BCB]]

Bghe: /* BCB Curing Oven */

2021-11-16T11:09:27Z

BCB Curing Oven

← Older revision		Revision as of 13:09, 16 November 2021
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	== BCB Curing Oven ==		== BCB Curing Oven ==
	[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in ~~cleanroom A-4~~]]		[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in room Cx1]]

	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.

Pevo: /* BCB Curing Oven */

2020-02-04T08:50:25Z

BCB Curing Oven

← Older revision		Revision as of 10:50, 4 February 2020
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	== BCB Curing Oven ==		== BCB Curing Oven ==
	[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in ~~the~~ A-4 ~~room~~]]		[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in cleanroom A-4]]

	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.

Pevo at 12:46, 3 February 2020

2020-02-03T12:46:45Z

← Older revision		Revision as of 14:46, 3 February 2020
Line 7:		Line 7:
	[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in the A-4 room]]		[[image:BCB oven.jpeg\|350x350px\|right\|thumb\|The BCB Curing Oven. Positioned in the A-4 room]]

	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of some metals in a nitrogen atmosphere.

	During processing the ~~furnace~~ is rapidly heated by use of eight halogen lamps situated below the sample.		During processing the oven is rapidly heated by use of eight halogen lamps situated below the sample. The maximum allowed temperature is 450 <sup>o</sup>C.
	The ~~furnace~~ is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.
			The oven is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.


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	Here are some of the standard processes used in the BCB Curing Oven.		Here are some of the standard processes used in the BCB Curing Oven.

	=== BCB curing:===		=== BCB curing===

	* Long curing ~~at 210°C: BCB210AL.PDF/[[Media:BCB210BL~~.PDF~~\|BCB210BL.PDF]]~~		An example of a curing recipe (BCB250BL.PDF) for a long curing process at 250°C is shown below.
	* Long curing at 250°C~~: BCB250AL~~.~~PDF/[[Media:BCB250BL.PDF\|BCB250BL.PDF]]~~

	Content of BCB250BL.PDF: ~~(the file BCB210BL.PDF is identical except that the max temperature is 210 instead of 250°C)~~		Content of BCB250BL.PDF:
	<pre>		<pre>
	;		;
Line 48:		Line 48:
	</pre>		</pre>

	~~The AL/BL processes are (should be) identical except for a (2x) pump/purge cycle in the beginning of the BL processes.~~

	===General processes===		===General processes===

	There are a number of general processes named DxxxCyyy.PDF.		There are a number of general processes on the oven named DxxxCyyy.PDF.

	The Dxxx is the set temperature (in °C) and the Cyyy is the time (in minutes) at the set temperature.		The "Dxxx" in the recipe is the set temperature (in °C) and the "Cyyy" is the time (in minutes) at the set temperature.

	The oven heats to the set temperature (xxx) in 5 mins and then stays at the temperature (xxx) for a time (yyy) after which it cools to room temperature as fast as possible.		The oven heats to the set temperature (xxx) in 5 mins and then stays at the temperature (xxx) for a time (yyy), after which it cools to room temperature as fast as possible.

	The program sequence looks like this for the file D200C060.PDF:		The program sequence looks like this for the file D200C060.PDF:
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	\|style="background:LightGrey; color:black"\|Temperature		\|style="background:LightGrey; color:black"\|Temperature
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*22 - 450<sup>o</sup>C		*Room temperature - 450<sup>o</sup>C
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Nitrogen flows		\|style="background:LightGrey; color:black"\|Nitrogen flows
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	*Quartz		*Quartz
	*Resist (prebaked)		*Resist (prebaked)
	*~~Metal~~ (only Al, Ni, Ge and Au)		*Metals (only Al, Ni, Ge and Au)
	\|-		\|-
	\|}		\|}

Pevo: /* BCB Curing Oven */

2020-02-03T11:54:05Z

BCB Curing Oven

← Older revision		Revision as of 13:54, 3 February 2020
Line 9:		Line 9:
	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.

	During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample. The furnace is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.		During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample.
			The furnace is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.

Pevo: /* BCB Curing Oven */

2020-02-03T11:53:51Z

BCB Curing Oven

← Older revision		Revision as of 13:53, 3 February 2020
Line 9:		Line 9:
	The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.		The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.

	During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample. The furnace is purged with a high or a low ~~nitrogen~~ flow. Samples are processed at atmospheric pressure or at vacuum.		During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample. The furnace is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.

Jehan: /* BCB curing: */

2017-09-07T11:16:22Z

BCB curing:

← Older revision		Revision as of 13:16, 7 September 2017
Line 22:		Line 22:
	=== BCB curing:===		=== BCB curing:===

	* Long curing at 210°C: BCB210AL.PDF/[[~~file~~:BCB210BL.PDF\|BCB210BL.PDF]]		* Long curing at 210°C: BCB210AL.PDF/[[Media:BCB210BL.PDF\|BCB210BL.PDF]]
	* Long curing at 250°C: BCB250AL.PDF/[[~~file~~:BCB250BL.PDF\|BCB250BL.PDF]]		* Long curing at 250°C: BCB250AL.PDF/[[Media:BCB250BL.PDF\|BCB250BL.PDF]]

	Content of BCB250BL.PDF: (the file BCB210BL.PDF is identical except that the max temperature is 210 instead of 250°C)		Content of BCB250BL.PDF: (the file BCB210BL.PDF is identical except that the max temperature is 210 instead of 250°C)