Specific Process Knowledge/Process Flow - Revision history

Mmat: /* Substrate */

2026-09-25T13:48:35Z

Substrate

← Older revision		Revision as of 15:48, 25 September 2026
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	'''Bringing samples into the cleanroom''' <br>		'''Bringing samples into the cleanroom''' <br>
	Please be aware that you must obtain permission from our Fabrication Support team to bring substrates from outside into our cleanroom. You need to fill out the form [https://labmanager.dtu.dk/view_binary.php?fileId=5457 "'''Request to bring Samples into CR v1.51"'''] and submit it to [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]. Please find more information ~~under~~ [[Specific Process Knowledge/Wafer cleaning/Bring samples into ~~cleanroom~~\|~~Bring samples into cleanroom~~]].		Please be aware that you must obtain permission from our Fabrication Support team to bring substrates from outside into our cleanroom. You can find more information [[Specific Process Knowledge/Wafer cleaning/Bring samples into Cleanroom or PolyFabLab\|here]].
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Bghe at 08:23, 8 September 2026

2026-09-08T08:23:06Z

← Older revision		Revision as of 10:23, 8 September 2026
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	[[~~index.php?title=~~Category:346]]		[[Category:346]]
	=The Process Flow=		=The Process Flow=
	A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.		A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.

Bghe at 08:22, 8 September 2026

2026-09-08T08:22:10Z

← Older revision		Revision as of 10:22, 8 September 2026
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	You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br>		You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br>
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	Process flow template: [[~~index.php?title=~~Media:Process flow template v3.1.docx\|Process_flow_template_v3.1.docx]]		Process flow template: [[Media:Process flow template v3.1.docx\|Process_flow_template_v3.1.docx]]
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Bghe at 08:21, 8 September 2026

2026-09-08T08:21:47Z

← Older revision		Revision as of 10:21, 8 September 2026
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	[[index.php?title=Category:346]]		[[index.php?title=Category:346]]
	=~~AThe~~ Process Flow=		=The Process Flow=
	A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.		A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.

Bghe at 08:21, 8 September 2026

2026-09-08T08:21:22Z

← Older revision		Revision as of 10:21, 8 September 2026
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	[[Category:346]]		[[index.php?title=Category:346]]
	=~~The~~ Process Flow=		=AThe Process Flow=
	A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.		A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.

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	You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br>		You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br>
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	Process flow template: [[Media:Process flow template v3.1.docx\|Process_flow_template_v3.1.docx]]		Process flow template: [[index.php?title=Media:Process flow template v3.1.docx\|Process_flow_template_v3.1.docx]]
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Mmat at 21:05, 1 July 2025

2025-07-01T21:05:32Z

← Older revision		Revision as of 23:05, 1 July 2025
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			[[Category:346]]
	=The Process Flow=		=The Process Flow=
	A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.		A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.

Mmat at 20:16, 17 June 2025

2025-06-17T20:16:54Z

← Older revision		Revision as of 22:16, 17 June 2025
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	~~{{cc-nanolab}}~~

	~~'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Preparation click here]'''~~
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	=The Process Flow=		=The Process Flow=
	A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.		A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities.

Mmat: /* The Process Flow */

2025-06-16T21:54:26Z

The Process Flow

← Older revision		Revision as of 23:54, 16 June 2025
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	\| width="150" align="center" style="color:black"\| Characterize your Sample[[image:JehanCharacterize.png\|130px\|frameless\|link=Specific Process Knowledge/Characterization]]		\| width="150" align="center" style="color:black"\| Characterize your Sample[[image:JehanCharacterize.png\|130px\|frameless\|link=Specific Process Knowledge/Characterization]]
	\| width="150" align="center" style="color:black"\| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png\|130px\|frameless\|link=Specific Process Knowledge/Back-end processing\|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]]		\| width="150" align="center" style="color:black"\| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png\|130px\|frameless\|link=Specific Process Knowledge/Back-end processing\|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]]
	\| width="150" align="center" style="color:black"\| Process Flow Examples [[image:Processflow b.png\|130px\|frameless\|link=~~Specific~~ Process ~~Knowledge~~/Solar cell process flow\|We have made the process flow for a simple solar cell available. It shows you how to build up a process flow for a component that can be made at DTU Nanolab.]]		\| width="150" align="center" style="color:black"\| Process Flow Examples [[image:Processflow b.png\|130px\|frameless\|link=LabAdviser/Process Flow/Solar cell process flow\|We have made the process flow for a simple solar cell available. It shows you how to build up a process flow for a component that can be made at DTU Nanolab.]]
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	\|}		\|}

Mmat: /* Characterization */

2025-06-12T14:53:02Z

Characterization

← Older revision		Revision as of 16:53, 12 June 2025
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	== Characterization ==		== Characterization ==
	~~<span style="background:#FF2800">THIS PART IS UNDER CONSTRUCTION</span>~~

	A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties.		A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties.
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			Below we will try to sum up some of the more typical characterization methods, but for now, please have a look at the [[Specific Process Knowledge/Characterization \| '''Characterization''']] page.

			<span style="background:#FF2800">THIS PART IS UNDER CONSTRUCTION</span>

	=== Surface Toppography ===		=== Surface Toppography ===
	''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex''		''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex''
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	== Special Requirements ==		== Special Requirements ==

Mmat: /* The Process Flow */

2025-06-12T13:28:43Z

The Process Flow

← Older revision		Revision as of 15:28, 12 June 2025
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	Process flow example: [[LabAdviser/Process Flow/Solar cell process flow\|Solar Cell Process flow]]		Process flow example: [[LabAdviser/Process Flow/Solar cell process flow\|Solar Cell Process flow]]

	<br>In the following ~~section~~, you can find some guidelines and relevant information for creating your own process flow, such as relevant information about substrate, pattern design and mask fabrication, as well as process steps and characterization methods.		<br>In the following sections, you can find some guidelines and relevant information for creating your own process flow, such as relevant information about substrate, pattern design and mask fabrication, as well as process steps and characterization methods.
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