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Jmli at 10:33, 28 June 2023

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	== The A-line field ==		== The A-line field ==

Jmli at 07:00, 5 October 2020

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			'''Feedback to this page:
			[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Pattern/Travka/fields/Aline click here]'''
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	== The A-line field ==		== The A-line field ==
	~~<!--Checked for updates on 30/7-2018 - ok/jmli -->~~
	[[Image:travka-Aline-figure.jpg \|300x300px\|thumb\|Definition of the measures used in the table below]]		[[Image:travka-Aline-figure.jpg \|300x300px\|thumb\|Definition of the measures used in the table below]]

Jmli at 11:45, 30 July 2018

2018-07-30T11:45:52Z

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	== The A-line field ==		== The A-line field ==
	<!-- ~~revised 1~~/6-~~2015 by~~ jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
	[[Image:travka-Aline-figure.jpg \|300x300px\|thumb\|Definition of the measures used in the table below]]		[[Image:travka-Aline-figure.jpg \|300x300px\|thumb\|Definition of the measures used in the table below]]

Jmli: Created page with "== The A-line field == Definition of the measures used in the table below The A-line fiel..."

2016-04-04T09:08:09Z

Created page with "== The A-line field ==  300x300px|thumb|Definition of the measures used in the table below The A-line fiel..."

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== The A-line field ==

[[Image:travka-Aline-figure.jpg |300x300px|thumb|Definition of the measures used in the table below]]

The A-line fields have trenches of different widths across the entire 1 cm height of the field. The pitch of the trenches is matched to the exposed area of each mask. The list of trench widths in each field is the same on all masks (due to the high exposed area the widths 2 and 3 µm are missing on the travka 65 mask, on the 80 mask the lines 2, 3, 4 and 6 are missing).

The A-line fields are located along a cleavage line on the wafer with T-ridge fields. Cleaving across these two types of fields provide the possibility of inspecting trench depths and widths as a function of exposed area.

=== Travka 05 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 05: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||38||40||2||80
|-
|3||57||60||3||180
|-
|4||76||80||2||160
|-
|6||114||120||1||120
|-
|8||152||160||1||160
|-
|10||190||200||1||200
|-
|15||285||300||1||300
|-
|25||475||500||1||500
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 05: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||760||800||1||800
|-
|50||950||1000||1||1000
|-
|75||1425||1500||1||1500
|-
|100||1900||2000||1||2000
|-
|150||2850||3000||1||3000
|-
|200||3800||4000||1||4000
|-
|300||5700||6000||1||6000
|}
|}

=== Travka 10 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 10: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||18||20||25||500
|-
|3||27||30||30||900
|-
|4||36||40||30||1200
|-
|6||54||60||10||600
|-
|8||72||80||10||800
|-
|10||90||100||10||1000
|-
|15||135||150||5||750
|-
|25||225||250||5||1250
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 10: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||360||400||5||2000
|-
|50||450||500||2||1000
|-
|75||675||750||2||1500
|-
|100||900||1000||2||2000
|-
|150||1350||1500||1||1500
|-
|200||1800||2000||1||2000
|-
|300||2700||3000||1||3000
|}
|}

=== Travka 20 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 20: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||8||10||50||500
|-
|3||12||15||60||900
|-
|4||16||20||60||1200
|-
|6||24||30||20||600
|-
|8||32||40||20||800
|-
|10||40||50||20||1000
|-
|15||60||75||10||750
|-
|25||100||125||10||1250
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 20: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||160||200||10||2000
|-
|50||200||250||4||1000
|-
|75||300||375||4||1500
|-
|100||400||500||4||2000
|-
|150||600||750||2||1500
|-
|200||800||1000||2||2000
|-
|300||1200||1500||2||3000
|}
|}

=== Travka 35 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 35: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||3,7||5,7||80||457,1
|-
|3||5,6||8,6||80||685,7
|-
|4||7,4||11,4||61||697,1
|-
|6||11,1||17,1||51||874,3
|-
|8||14,9||22,9||50||1142,9
|-
|10||18,6||28,6||50||1428,6
|-
|15||27,9||42,9||20||857,1
|-
|25||46,4||71,4||20||1428,6
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 35: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||74,3||114,3||20||2285,7
|-
|50||92,9||142,9||10||1428,6
|-
|75||139,3||214,3||10||2142,9
|-
|100||185,7||285,7||10||2857,1
|-
|150||278,6||428,6||2||857,1
|-
|200||371,4||571,4||2||1142,9
|-
|300||557,1||857,1||2||1714,3
|}
|}

=== Travka 50 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 50: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||2||4||145||580
|-
|3||3||6||150||900
|-
|4||4||8||140||1120
|-
|6||6||12||50||600
|-
|8||8||16||50||800
|-
|10||10||20||50||1000
|-
|15||15||30||25||750
|-
|25||25||50||25||1250
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 50: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||40||80||25||2000
|-
|50||50||100||10||1000
|-
|75||75||150||10||1500
|-
|100||100||200||10||2000
|-
|150||150||300||5||1500
|-
|200||200||400||5||2000
|-
|300||300||600||5||3000
|}
|}

=== Travka 65 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 65: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||1,1||3,1||0||0
|-
|3||1,6||4,6||0||0
|-
|4||2,2||6,2||144||892,8
|-
|6||3,2||9,2||120||1104
|-
|8||4,3||12,3||100||1230
|-
|10||5,4||15,4||100||1540
|-
|15||8,1||23,1||25||577,5
|-
|25||13,5||38,5||25||962,5
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 65: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||21,5||61,5||25||1537,5
|-
|50||26,9||76,9||12||922,8
|-
|75||40,4||115,4||12||1384,8
|-
|100||53,8||153,8||12||1845,6
|-
|150||80,8||230,8||8||1846,4
|-
|200||107,7||307,7||8||2461,6
|-
|300||161,5||461,5||8||3692
|}
|}

=== Travka 80 A-line field ===

{|
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 80: A-line 2 µm to 25 µm fields'''
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|2||0,5||2,5||0||0
|-
|3||0,8||3,8||0||0
|-
|4||1,0||5||0||0
|-
|6||1,5||7,5||0||0
|-
|8||2,0||10||96||960
|-
|10||2,5||12,5||90||1125
|-
|15||3,8||18,8||80||1504
|-
|25||6,3||31,3||50||1565
|}
| STYLE="vertical-align: top"|
{| border = 1
|+ '''Travka 80: A-line 40 µm to 300 µm fields'''
|-
! width="50" |Trench width (µm)
! width="50" |Ridge width (µm)
! width="50" |Period width (µm)
! width="50" |Total periods
! width="50" |Width of array (µm)
|-
|40||10,0||50||50||2500
|-
|50||12,5||62,5||15||937,5
|-
|75||18,8||93,8||15||1407
|-
|100||25,0||125||15||1875
|-
|150||37,5||187,5||10||1875
|-
|200||50,0||250||10||2500
|-
|300||75,0||375||10||3750
|}
|}

Specific Process Knowledge/Pattern Design/Travka/fields/Aline - Revision history

Jmli at 10:00, 4 September 2025

Jmli at 10:33, 28 June 2023

Jmli at 07:00, 5 October 2020

Jmli at 11:45, 30 July 2018

Jmli: Created page with "== The A-line field == Definition of the measures used in the table below The A-line fiel..."