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	== The Travka mask set ==		== The Travka mask set ==

Pevo at 08:33, 28 June 2023

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Jmli at 13:13, 2 October 2020

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	== The Travka mask set ==		== The Travka mask set ==

Jmli at 13:26, 3 July 2018

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	== The Travka mask set ==		== The Travka mask set ==

Jmli: /* The Travka mask set */

2016-04-04T09:18:36Z

The Travka mask set

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Jmli: Created page with "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Travka 10..."

2016-04-04T09:07:36Z

Created page with "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Travka 10..."

New page

== The Travka mask set ==

The travka mask set consists of 7 masks:
* Travka 05 with L-Edit design file: [[file:Travka 05.tdb]] and cif file [[file:Travka 05.cif]]
* Travka 10 with L-Edit design file: [[file:Travka 10.tdb]] and cif file [[file:Travka 10.cif]]
* Travka 20 with L-Edit design file: [[file:Travka 20.tdb]] and cif file [[file:Travka 20.cif]]
* Travka 35 with L-Edit design file: [[file:Travka 35.tdb]] and cif file [[file:Travka 35.cif]]
* Travka 50 with L-Edit design file: [[file:Travka 50.tdb]] and cif file [[file:Travka 50.cif]]
* Travka 65 with L-Edit design file: [[file:Travka 65.tdb]] and cif file [[file:Travka 65.cif]]
* Travka 80 with L-Edit design file: [[file:Travka 80.tdb]] and cif file [[file:Travka 80.cif]]

The numbers in the end of the mask names refer to the average exposed area of a positive photolithography process. The masks are designed for characterisation of dry etches and holds a number of 1x1 or 1x2 cm fields. The positions of these fields are the same on all masks.

Each field has a number of features (for instance trenches of variable widths) distributed in such a way that the exposed area within the field corresponds to value for each mask.

Below is shown the field distribution on a 4 inch wafer. Click on the links in the figure to find more information on the individual fields.

[[Image:travka_overview.jpg |500x500px|thumb|Overview of the travka mask set: The position of the fields in relation to the 4" wafer periphery.]]

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Field distribution'''
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
|-
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
|-
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
|-
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
|-
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
|-
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:teal; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Aline| A-line]]
| style="background:white; color:black" width="100" height="50" color align="center" valign="center" colspan="2"| [[/fields/Tridge| T-ridge]]
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:green; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/deskew| Deskew]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:aqua; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/ase| ASE]]
| style="background:yellow; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/filmtek| Filmtek]]
| style="background:olive; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Asquare| A-square]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
|-
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:lime; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dektak| Dektak]]
| style="background:fuchsia; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/pilcav| Pilcav]]
| style="background:red; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/Acircle| A-circle]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
| style="background:silver; color:black" width="50" height="50" color align="center" valign="center"| [[/fields/dummy| Dummy]]
|-
|}

Specific Process Knowledge/Pattern Design/Travka - Revision history

Mmat at 17:24, 13 February 2025

Pevo at 08:33, 28 June 2023

Jmli at 13:13, 2 October 2020

Jmli at 13:26, 3 July 2018

Jmli: /* The Travka mask set */

Jmli: Created page with "== The Travka mask set == The travka mask set consists of 7 masks: * Travka 05 with L-Edit design file: file:Travka 05.tdb and cif file file:Travka 05.cif * Travka 10..."