Specific Process Knowledge/Lithography/Resist/UserBottles - Revision history

Jehem: /* User resist bottles in the cleanroom */

2026-01-13T11:44:56Z

User resist bottles in the cleanroom

← Older revision		Revision as of 13:44, 13 January 2026
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	== User resist bottles in the cleanroom ==		=User resist bottles in the cleanroom=

	[[File:bottle.jpg\|320px\|thumb\|Example of glass bottle used for storing small amounts of resist. The glass bottles can be found in the glassware cabinet outside the cleanroom, opposite the cleanroom suit cabinets.]]		[[File:bottle.jpg\|320px\|thumb\|Example of glass bottle used for storing small amounts of resist. The glass bottles can be found in the glassware cabinet outside the cleanroom, opposite the cleanroom suit cabinets.]]

Jehem: /* User resist bottles in the cleanroom */

2026-01-13T11:39:40Z

User resist bottles in the cleanroom

← Older revision		Revision as of 13:39, 13 January 2026
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	== User resist bottles in the cleanroom ==		== User resist bottles in the cleanroom ==

	[[File:bottle.jpg\|320px\|thumb\|~~right~~]]		[[File:bottle.jpg\|320px\|thumb\|Example of glass bottle used for storing small amounts of resist. The glass bottles can be found in the glassware cabinet outside the cleanroom, opposite the cleanroom suit cabinets.]]

	We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.		We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.

Taran: /* User resist bottles in the cleanroom */

2025-08-25T13:05:51Z

User resist bottles in the cleanroom

← Older revision		Revision as of 15:05, 25 August 2025
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	'''Procedure for bringing new user resist bottles into the cleanroom:'''		'''Procedure for bringing new user resist bottles into the cleanroom:'''
	#''Outside the cleanroom'': Find a blue-cap glass bottle in the storage cabinet, next to office 055~~, in building 346~~		#''Outside the cleanroom'': Find a blue-cap glass bottle in the storage cabinet, in building 346 next to office 055
	#''Gowning'': Clean the bottle in gowning		#''Gowning'': Clean the bottle in gowning
	#*Clean it thoroughly on the outside with water or alcohol		#*Clean it thoroughly on the outside with water or alcohol
	#''Fumehood'': Bring the bottle to a ~~fumehood~~ inside the cleanroom		#''Fumehood'': Bring the bottle to a fume hood inside the cleanroom
	#* Clean the bottle and the lid thoroughly on the inside with a relevant solvent, i.e for CSAR use anisole and for 5214 use ~~acteone~~<br>If you are in doubt about which solvent your resist contains, consult the MSDS of the resist on [http://kemibrug.dk/searchpage/ Kemibrug] - '''requires login'''		#* Clean the bottle and the lid thoroughly on the inside with a relevant solvent, i.e. for CSAR use anisole and for 5214 use acetone<br>If you are in doubt about which solvent your resist contains, consult the MSDS of the resist on [http://kemibrug.dk/searchpage/ Kemibrug] - '''requires login'''
	#*If you need to dilute the resist, find a measurement beaker and clean it thoroughly with the same solvent as you used for cleaning your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the ~~fumehood~~ in E-4		#*If you need to dilute the resist, find a measurement beaker and clean it thoroughly with the same solvent as you used for cleaning your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fume hood in E-4
	#Let the bottle dry in the ~~fumehood~~		#Let the bottle dry in the fume hood
	#Take the supply resist bottle from the chemical cabinet, and place it in the ~~fumehood~~ next to your own cleaned bottle		#Take the supply resist bottle from the chemical cabinet, and place it in the fume hood next to your own cleaned bottle
	#Carefully unscrew the lid of the resist bottle		#Carefully unscrew the lid of the resist bottle
	#''Only if necessary'': Wipe the thread of the resist bottle before you pour resist into your own bottle. You must wipe in such a way, that you do not create particles, which fall into the resist bottle		#''Only if necessary'': Wipe the thread of the resist bottle before you pour resist into your own bottle. You must wipe in such a way, that you do not create particles, which fall into the resist bottle

Jehem: /* User resist bottles in the cleanroom */

2023-03-29T10:54:26Z

User resist bottles in the cleanroom

← Older revision		Revision as of 12:54, 29 March 2023
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	== User resist bottles in the cleanroom ==		== User resist bottles in the cleanroom ==

	[[File:bottle.jpg\|~~160px~~\|thumb\|right]]		[[File:bottle.jpg\|320px\|thumb\|right]]

	We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.		We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.

Thope: /* User resist bottles in the cleanroom */

2023-02-17T09:26:34Z

User resist bottles in the cleanroom

← Older revision		Revision as of 11:26, 17 February 2023
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	'''Use pipettes for resist transfer:'''		'''Use pipettes for resist transfer:'''

	When spin coating thin resist, you should always use a pipette, to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the bottle threading, which will dry and create particles in the resist. The disposable pipettes need to be thoroughly cleaned with a N2 gun before use, for ~20 seconds. After some practice, you can obtain particle-free 4" wafers, if the bottle and pipette (and spin coater) are properly cleaned.		When spin coating thin resist, you should always use a pipette, to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the bottle threading, which will dry and create particles in the resist. The disposable pipettes need to be thoroughly cleaned with a N2 gun before use, for ~20 seconds. After some practice, you can obtain particle-free 4" wafers, if the bottle and pipette (and spin coater) are properly cleaned.

	It can be difficult to use the pipettes for thick resists, and you may need to simply pour it from the bottle. Remember to wipe the bottle thread after pouring. It is essential that you wipe in such a way, that you do not create particles, which fall into the resist bottle.

Thope: /* User resist bottles in the cleanroom */

2023-02-17T09:26:03Z

User resist bottles in the cleanroom

← Older revision		Revision as of 11:26, 17 February 2023
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	When spin coating thin resist, you should always use a pipette, to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the bottle threading, which will dry and create particles in the resist. The disposable pipettes need to be thoroughly cleaned with a N2 gun before use, for ~20 seconds. After some practice, you can obtain particle-free 4" wafers, if the bottle and pipette (and spin coater) are properly cleaned.		When spin coating thin resist, you should always use a pipette, to transfer resist from your bottle to the substrate. If you pour the resist directly from your bottle, you will leave resist in the bottle threading, which will dry and create particles in the resist. The disposable pipettes need to be thoroughly cleaned with a N2 gun before use, for ~20 seconds. After some practice, you can obtain particle-free 4" wafers, if the bottle and pipette (and spin coater) are properly cleaned.

	It can be difficult to use the pipettes for thick resists, and ~~youmay~~ need to simply pour it from the bottle. Remember to wipe the bottle thread after pouring. It is essential that you wipe in such a way, that you do not create particles, which fall into the resist bottle.		It can be difficult to use the pipettes for thick resists, and you may need to simply pour it from the bottle. Remember to wipe the bottle thread after pouring. It is essential that you wipe in such a way, that you do not create particles, which fall into the resist bottle.

Thope: /* User resist bottles in the cleanroom */

2023-02-17T09:25:27Z

User resist bottles in the cleanroom

← Older revision		Revision as of 11:25, 17 February 2023
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	== User resist bottles in the cleanroom ==		== User resist bottles in the cleanroom ==

	[[File:bottle.jpg\|~~320px~~\|thumb\|right]]		[[File:bottle.jpg\|160px\|thumb\|right]]

	We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.		We recommend all e-beam users, and certain UV users, to have their own small bottle of resist inside the cleanroom.

Jehem: /* User resist bottles in the cleanroom */

2023-02-07T11:04:12Z

User resist bottles in the cleanroom

← Older revision		Revision as of 13:04, 7 February 2023
Line 7:		Line 7:

	'''Procedure for bringing new user resist bottles into the cleanroom:'''		'''Procedure for bringing new user resist bottles into the cleanroom:'''
	#''Outside the cleanroom'': Find a blue-cap glass bottle in the ~~cupboard~~ next to office 055 in building 346		#''Outside the cleanroom'': Find a blue-cap glass bottle in the storage cabinet, next to office 055, in building 346
	#''Gowning'': Clean the bottle in gowning		#''Gowning'': Clean the bottle in gowning
	#*Clean it thoroughly on the outside with water or alcohol		#*Clean it thoroughly on the outside with water or alcohol

Jehem: /* User resist bottles in the cleanroom */

2023-02-07T11:03:34Z

User resist bottles in the cleanroom

← Older revision		Revision as of 13:03, 7 February 2023
Line 7:		Line 7:

	'''Procedure for bringing new user resist bottles into the cleanroom:'''		'''Procedure for bringing new user resist bottles into the cleanroom:'''
	#''Outside the cleanroom'': Find a blue-~~capped~~ glass bottle in the cupboard next to office 055 in 346		#''Outside the cleanroom'': Find a blue-cap glass bottle in the cupboard next to office 055 in building 346
	#''Gowning'': Clean the bottle in gowning		#''Gowning'': Clean the bottle in gowning
	#*Clean it thoroughly on the outside with water or alcohol		#*Clean it thoroughly on the outside with water or alcohol

Jehem: /* User resist bottles in the cleanroom */

2023-02-07T08:49:29Z

User resist bottles in the cleanroom

← Older revision		Revision as of 10:49, 7 February 2023
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	'''Remember to label your resist bottle correctly - bottles without correct labels will be removed from the cleanroom:'''<br>		'''<span style="color:red">Remember to label your resist bottle correctly - bottles without correct labels will be removed from the cleanroom:</span>'''<br>
	#Find the label which matches your resist and write the following on it:		#Find the label which matches your resist and write the following on it:
	#*Your name (initials)		#*Your name (initials)