Specific Process Knowledge/Lithography/EBeamLithography/thopesplaystuff - Revision history

https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Specific_Process_Knowledge%2FLithography%2FEBeamLithography%2Fthopesplaystuff Specific Process Knowledge/Lithography/EBeamLithography/thopesplaystuff - Revision history 2026-05-03T03:30:48Z Revision history for this page on the wiki MediaWiki 1.43.3 https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54224&oldid=prev Thope: Blanked the page 2025-09-02T16:34:53Z

<p>Blanked the page</p> <a href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54224&oldid=54223">Show changes</a>

Thope https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54223&oldid=prev Thope at 16:34, 2 September 2025 2025-09-02T16:34:41Z

<p></p> <a href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54223&oldid=54222">Show changes</a>

Thope https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54222&oldid=prev Thope: Blanked the page 2025-09-02T15:33:29Z

<p>Blanked the page</p> <a href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54222&oldid=54221">Show changes</a>

Thope https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/thopesplaystuff&diff=54221&oldid=prev Thope: Created page with "<!doctype html> <html lang="en"> <head> <meta charset="utf-8" /> <meta name="viewport" content="width=device-width,initial-scale=1" /> <title>EBL Dose Simulator — Hello Kitty Theme</title> <script src="https://cdn.jsdelivr.net/npm/chart.js@4.4.0/dist/chart.umd.min.js"></script> <style> :root{ --pink:#ffb6d5; --hotpink:#ff69b4; --accent:#fff0f6; --text:#333; --card:#fff; } body{ margin:0; font-family:Inter,..." 2025-09-02T15:33:10Z

<p>Created page with "<!doctype html> <html lang="en"> <head> <meta charset="utf-8" /> <meta name="viewport" content="width=device-width,initial-scale=1" /> <title>EBL Dose Simulator — Hello Kitty Theme</title> <script src="https://cdn.jsdelivr.net/npm/chart.js@4.4.0/dist/chart.umd.min.js"></script> <style> :root{ --pink:#ffb6d5; --hotpink:#ff69b4; --accent:#fff0f6; --text:#333; --card:#fff; } body{ margin:0; font-family:Inter,..."</p> <p><b>New page</b></p><div><!doctype html><br /> <html lang="en"><br /> <head><br /> <meta charset="utf-8" /><br /> <meta name="viewport" content="width=device-width,initial-scale=1" /><br /> <title>EBL Dose Simulator — Hello Kitty Theme</title><br /> <script src="https://cdn.jsdelivr.net/npm/chart.js@4.4.0/dist/chart.umd.min.js"></script><br /> <style><br /> :root{<br /> --pink:#ffb6d5;<br /> --hotpink:#ff69b4;<br /> --accent:#fff0f6;<br /> --text:#333;<br /> --card:#fff;<br /> }<br /> body{<br /> margin:0;<br /> font-family:Inter,ui-sans-serif,system-ui,-apple-system,"Segoe UI",Roboto,"Helvetica Neue",Arial;<br /> background: linear-gradient(180deg,var(--accent),#fff);<br /> color:var(--text);<br /> }<br /> header{<br /> display:flex;align-items:center;gap:16px;padding:18px 24px;background:var(--pink);box-shadow:0 6px 18px rgba(255,105,180,0.12);<br /> }<br /> .logo{<br /> width:64px;height:64px;border-radius:12px;background:linear-gradient(180deg,var(--hotpink),#ffd1ea);display:flex;align-items:center;justify-content:center;box-shadow:0 6px 10px rgba(0,0,0,0.06);<br /> }<br /> .logo svg{width:46px;height:46px}<br /> h1{font-size:20px;margin:0}<br /> .container{max-width:1100px;margin:20px auto;padding:18px}<br /> .grid{display:grid;grid-template-columns:320px 1fr;gap:18px}<br /> .card{background:var(--card);border-radius:12px;padding:14px;box-shadow:0 8px 22px rgba(0,0,0,0.06)}<br /> label{font-size:13px;display:block;margin-bottom:6px}<br /> .small{font-size:12px;color:#666}<br /> input[type=range]{width:100%}<br /> .row{display:flex;gap:12px;align-items:center}<br /> button{background:var(--hotpink);border:none;color:white;padding:8px 12px;border-radius:10px;cursor:pointer}<br /> footer{margin-top:18px;text-align:center;color:#777;font-size:13px}<br /> .muted{color:#666;font-size:13px}<br /> canvas{background:transparent}<br /> </style><br /> </head><br /> <body><br /> <header><br /> <div class="logo" aria-hidden><br /> <br /> <svg viewBox="0 0 64 64" xmlns="http://www.w3.org/2000/svg"><br /> <g fill="none" stroke="#ffffff" stroke-width="1.6"><br /> <ellipse cx="32" cy="36" rx="18" ry="14" fill="#fff" stroke="none"/><br /> <path d="M18 18c-6 0-8-6-8-6s6 0 8 2c2 2 6 4 10 4s8-2 10-4c2-2 8-2 8-2s-2 6-8 6" fill="#fff" stroke="none"/><br /> </g><br /> <circle cx="24" cy="34" r="2.5" fill="#ff69b4"/><br /> <circle cx="40" cy="34" r="2.5" fill="#ff69b4"/><br /> <rect x="28" y="38" width="8" height="6" rx="3" fill="#ff69b4"/><br /> </svg><br /> </div><br /> <div><br /> <h1>EBL Dose Simulator — Hello Kitty Theme</h1><br /> <div class="small">Simulate exposure dose including forward- and backscattered electrons (proximity effect)</div><br /> </div><br /> </header><br /> <br /> <main class="container"><br /> <div class="grid"><br /> <div class="card"><br /> <div style="margin-bottom:10px"><br /> <label for="widthSlider">Line width: <strong id="widthLabel">100 nm</strong></label><br /> <input id="widthSlider" type="range" min="10" max="400" value="100" step="1"><br /> <div class="small muted">Change the width of the three parallel lines. Dose profile updates live.</div><br /> </div><br /> <br /> <div style="margin-top:12px"><br /> <label for="doseInput">Incident dose (a.u.):</label><br /> <input id="doseInput" type="number" value="1" step="0.1" style="width:100%" /><br /> <div class="small muted">This is a scale factor — relative units (a.u.).</div><br /> </div><br /> <br /> <hr style="margin:12px 0;border:none;border-top:1px solid #f1d7e3"><br /> <br /> <div><br /> <label>Proximity function parameters</label><br /> <div class="small">A two-Gaussian point-spread function is used: narrow forward-scatter (σ<sub>f</sub>) and broad backscatter (σ<sub>b</sub>) with weight η.</div><br /> <div style="margin-top:8px"><br /> <label>Forward sigma (σ<sub>f</sub>, nm): <strong id="sfLabel">5</strong></label><br /> <input id="sfSlider" type="range" min="1" max="30" value="5"><br /> </div><br /> <div style="margin-top:8px"><br /> <label>Backscatter sigma (σ<sub>b</sub>, nm): <strong id="sbLabel">200</strong></label><br /> <input id="sbSlider" type="range" min="50" max="2000" value="200"><br /> </div><br /> <div style="margin-top:8px"><br /> <label>Backscatter weight (η): <strong id="etaLabel">0.4</strong></label><br /> <input id="etaSlider" type="range" min="0" max="0.9" step="0.01" value="0.4"><br /> </div><br /> </div><br /> <br /> <hr style="margin:12px 0;border:none;border-top:1px solid #f1d7e3"><br /> <br /> <div style="display:flex;gap:8px;justify-content:space-between"><br /> <button id="resetBtn">Reset</button><br /> <div class="small muted">Tip: drag the line-width slider to see how proximity effects blur and add dose between lines.</div><br /> </div><br /> </div><br /> <br /> <div class="card"><br /> <canvas id="doseChart" height="220"></canvas><br /> <div style="display:flex;gap:14px;margin-top:10px;align-items:center"><br /> <label style="display:flex;gap:6px;align-items:center"><input id="showPattern" type="checkbox" checked> Show pattern</label><br /> <label style="display:flex;gap:6px;align-items:center"><input id="showForward" type="checkbox" checked> Forward component</label><br /> <label style="display:flex;gap:6px;align-items:center"><input id="showBack" type="checkbox" checked> Backscatter component</label><br /> </div><br /> </div><br /> </div><br /> <br /> <footer><br /> <div class="muted">Model: 1D cross-section of three parallel lines. Uses a two-Gaussian proximity function: PSF(r) = (1-η)*G(σf) + η*G(σb). Units are arbitrary — this is a relative-dose visualizer, useful for intuition and teaching.</div><br /> </footer><br /> </main><br /> <br /> <script><br /> // --- Configuration & utilities ---<br /> const LENGTH = 2000; // nm length of simulation window<br /> const DX = 1; // nm resolution<br /> const N = Math.floor(LENGTH/DX);<br /> const x = new Array(N).fill(0).map((_,i)=>i*DX);<br /> <br /> function gaussian1d(sigma){<br /> const twiceVar = 2*sigma*sigma;<br /> const radius = Math.ceil(6*sigma/DX);<br /> const kernel = new Float64Array(radius*2+1);<br /> let sum = 0;<br /> for(let i=-radius;i<=radius;i++){<br /> const v = Math.exp(-(i*DX)*(i*DX)/twiceVar);<br /> kernel[i+radius]=v; sum+=v;<br /> }<br /> for(let i=0;i<kernel.length;i++) kernel[i]/=sum;<br /> return {kernel, radius};<br /> }<br /> <br /> function convolve(signal, kernel, radius){<br /> const out = new Float64Array(signal.length);<br /> for(let i=0;i<signal.length;i++){<br /> let s=0;<br /> for(let k=-radius;k<=radius;k++){<br /> const j=i+k;<br /> if(j<0||j>=signal.length) continue;<br /> s += signal[j]*kernel[k+radius];<br /> }<br /> out[i]=s;<br /> }<br /> return out;<br /> }<br /> <br /> function makePattern(lineWidth){<br /> // three parallel lines centered at 600, 1000, 1400 nm<br /> const centers = [600,1000,1400];<br /> const pat = new Float64Array(N);<br /> const half = lineWidth/2;<br /> for(let i=0;i<N;i++){<br /> const xi = x[i];<br /> for(const c of centers){<br /> if(Math.abs(xi-c) <= half) { pat[i]=1; break; }<br /> }<br /> }<br /> return pat;<br /> }<br /> <br /> // --- UI elements ---<br /> const widthSlider = document.getElementById('widthSlider');<br /> const widthLabel = document.getElementById('widthLabel');<br /> const doseInput = document.getElementById('doseInput');<br /> const sfSlider = document.getElementById('sfSlider');<br /> const sbSlider = document.getElementById('sbSlider');<br /> const etaSlider = document.getElementById('etaSlider');<br /> const sfLabel = document.getElementById('sfLabel');<br /> const sbLabel = document.getElementById('sbLabel');<br /> const etaLabel = document.getElementById('etaLabel');<br /> const resetBtn = document.getElementById('resetBtn');<br /> const showPattern = document.getElementById('showPattern');<br /> const showForward = document.getElementById('showForward');<br /> const showBack = document.getElementById('showBack');<br /> <br /> // --- Chart ---<br /> const ctx = document.getElementById('doseChart').getContext('2d');<br /> const chart = new Chart(ctx, {<br /> type: 'line',<br /> data: {<br /> labels: x,<br /> datasets: [<br /> {label:'Total dose', data: new Array(N).fill(0), tension:0.2, borderWidth:2, pointRadius:0, spanGaps:true},<br /> {label:'Pattern (direct)', data: new Array(N).fill(0), tension:0.2, borderWidth:1, pointRadius:0, borderDash:[4,4], hidden:!showPattern.checked},<br /> {label:'Forward scatter', data: new Array(N).fill(0), tension:0.2, borderWidth:1, pointRadius:0, hidden:!showForward.checked},<br /> {label:'Backscatter', data: new Array(N).fill(0), tension:0.2, borderWidth:1, pointRadius:0, hidden:!showBack.checked},<br /> ]<br /> },<br /> options: {<br /> animation:false,<br /> plugins:{legend:{position:'top'}},<br /> scales: {<br /> x:{display:true,title:{display:true,text:'x (nm)'}},<br /> y:{display:true,title:{display:true,text:'Relative dose (a.u.)'}}<br /> }<br /> }<br /> });<br /> <br /> function updateChart(total, pattern, forwardComp, backComp){<br /> chart.data.datasets[0].data = Array.from(total);<br /> chart.data.datasets[1].data = Array.from(pattern);<br /> chart.data.datasets[2].data = Array.from(forwardComp);<br /> chart.data.datasets[3].data = Array.from(backComp);<br /> chart.data.datasets[1].hidden = !showPattern.checked;<br /> chart.data.datasets[2].hidden = !showForward.checked;<br /> chart.data.datasets[3].hidden = !showBack.checked;<br /> chart.update('none');<br /> }<br /> <br /> function computeAndRender(){<br /> const w = Number(widthSlider.value);<br /> widthLabel.textContent = `${w} nm`;<br /> const doseScale = Number(doseInput.value) || 1;<br /> const sf = Number(sfSlider.value); sfLabel.textContent = sf;<br /> const sb = Number(sbSlider.value); sbLabel.textContent = sb;<br /> const eta = Number(etaSlider.value); etaLabel.textContent = eta;<br /> <br /> const pattern = makePattern(w);<br /> // forward kernel<br /> const {kernel: kf, radius: rf} = gaussian1d(sf);<br /> const {kernel: kb, radius: rb} = gaussian1d(sb);<br /> <br /> const forwardComp = convolve(pattern, kf, rf).map(v=>v*(1-eta)*doseScale);<br /> const backComp = convolve(pattern, kb, rb).map(v=>v*eta*doseScale);<br /> <br /> const total = new Float64Array(N);<br /> for(let i=0;i<N;i++) total[i]=forwardComp[i]+backComp[i];<br /> <br /> updateChart(total, pattern.map(v=>v*doseScale), forwardComp, backComp);<br /> }<br /> <br /> // --- events ---<br /> [widthSlider, doseInput, sfSlider, sbSlider, etaSlider].forEach(el=>el.addEventListener('input',computeAndRender));<br /> [showPattern, showForward, showBack].forEach(el=>el.addEventListener('change',computeAndRender));<br /> resetBtn.addEventListener('click',()=>{<br /> widthSlider.value=100; doseInput.value=1; sfSlider.value=5; sbSlider.value=200; etaSlider.value=0.4;<br /> computeAndRender();<br /> });<br /> <br /> // initial render<br /> computeAndRender();<br /> </script><br /> </body><br /> </html></div>

Thope