Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer - Revision history

Thope: /* Limitations of the JEOL Compilation Computer */

2024-12-05T10:31:34Z

Limitations of the JEOL Compilation Computer

← Older revision		Revision as of 12:31, 5 December 2024
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	The JCC has two important differences from the JEOL 9500 exposure system:		The JCC has two important differences from the JEOL 9500 exposure system:

	#Not all condition files found on the control computer will be present on the JCC. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when ~~transfering~~ the files to the JEOL 9500 system.		#Not all condition files found on the control computer will be present on the JCC, in general we suggest you use "2na_ap4". To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transferring the files to the JEOL 9500 system.
	#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate.		#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate.
			#The JCC does not know the auto stocker, hence your SDF sequences must all ask for exposure on cassette #1, which is the default for a system without the auto stocker option.

	==Troubleshooting==		==Troubleshooting==
	#If the console returns a "Can't open display" error when attempting to launch the EBX Menu, please restart the computer.		#If the console returns a "Can't open display" error when attempting to launch the EBX Menu, please restart the computer.
	#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen].		#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen].

Thope: /* Using the remote interface */

2024-07-31T22:53:51Z

Using the remote interface

← Older revision		Revision as of 00:53, 1 August 2024
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	To connect to the JCC simply start the PuTTY terminal found on the desktop. Choose the '''JEOL Compilation Computer''' in the Saved Sessions and click '''Open'''. The terminal will now connect and prompt for a password. The password is "Jeoleb", remember the capital J. The interface behaves alsmost identical to the JEOL 9500 computer, hence all the usual commands can be used, such as:		To connect to the JCC simply start the PuTTY terminal found on the desktop. Choose the '''JEOL Compilation Computer''' in the Saved Sessions and click '''Open'''. The terminal will now connect and prompt for a password. The password is "Jeoleb", remember the capital J. The interface behaves alsmost identical to the JEOL 9500 computer, hence all the usual commands can be used, such as:

	*Change directory in the terminal with the '''CD''' command. Use '''CD job/1PreExposureFiles''' to go to the pre exposure files working directory		*Change directory in the terminal with the '''cd''' command. Use '''cd job/1PreExposureFiles''' to go to the pre exposure files working directory
	*Compile with the usual '''schd -exptime sdfname''' command		*Compile with the usual '''schd -exptime sdfname''' command
	*Use '''ebxmenu''' to open the EBX Menu, launch the '''Analysis''' program to find '''ACHK'''		*Use '''ebxmenu''' to open the EBX Menu, launch the '''Analysis''' program to find '''ACHK'''

Thope: /* Troubleshooting */

2023-11-20T06:35:00Z

Troubleshooting

← Older revision		Revision as of 08:35, 20 November 2023
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	==Troubleshooting==		==Troubleshooting==
	#If the console returns a "Can't open display" error when attempting to launch the ~~EBXMENU~~, please restart the computer.		#If the console returns a "Can't open display" error when attempting to launch the EBX Menu, please restart the computer.
	#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen].		#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen].

Thope: /* Using the remote interface */

2023-11-20T06:34:45Z

Using the remote interface

← Older revision		Revision as of 08:34, 20 November 2023
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	*Change directory in the terminal with the '''CD''' command. Use '''CD job/1PreExposureFiles''' to go to the pre exposure files working directory		*Change directory in the terminal with the '''CD''' command. Use '''CD job/1PreExposureFiles''' to go to the pre exposure files working directory
	*Compile with the usual '''schd -exptime sdfname''' command		*Compile with the usual '''schd -exptime sdfname''' command
	*Use '''ebxmenu''' to open the EBX ~~menu~~, launch the '''Analysis''' program to find '''ACHK'''		*Use '''ebxmenu''' to open the EBX Menu, launch the '''Analysis''' program to find '''ACHK'''
	*Edit you SDF/JDF by launching GEdit with the '''gedit&''' command (remember the last &)		*Edit you SDF/JDF by launching GEdit with the '''gedit&''' command (remember the last &)
	*When done using the interface, please close PuTTY with the '''exit''' command		*When done using the interface, please close PuTTY with the '''exit''' command

Thope: /* Troubleshooting */

2023-11-20T06:33:35Z

Troubleshooting

← Older revision		Revision as of 08:33, 20 November 2023
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	==Troubleshooting==		==Troubleshooting==
	#If the console returns a "Can't open display" error when attempting to launch the EBXMENU, please restart the computer.		#If the console returns a "Can't open display" error when attempting to launch the EBXMENU, please restart the computer.
	#Any other issues, please notify [[mailto:thope@dtu.dk Thomas Pedersen]].		#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen].

Thope: /* Limitations of the JEOL Compilation Computer */

2023-11-20T06:33:10Z

Limitations of the JEOL Compilation Computer

← Older revision		Revision as of 08:33, 20 November 2023
Line 34:		Line 34:
	#Not all condition files found on the control computer will be present on the JCC. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.		#Not all condition files found on the control computer will be present on the JCC. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.
	#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate.		#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate.

			==Troubleshooting==
			#If the console returns a "Can't open display" error when attempting to launch the EBXMENU, please restart the computer.
			#Any other issues, please notify [[mailto:thope@dtu.dk Thomas Pedersen]].

Thope: /* JEOL Compilation Computer (JCC) */

2023-11-20T06:30:10Z

JEOL Compilation Computer (JCC)

← Older revision		Revision as of 08:30, 20 November 2023
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	=JEOL Compilation Computer (JCC)=		=JEOL Compilation Computer (JCC)=
	From the external Beamer PC (~~dtu~~-~~em00awqd~~) it is possible to remotely compile job files on the JEOL Compilation Computer (JCC), thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer for re-compilation and exposure. Remember to book and log in on the external Beamer PC when using this.		From the external Beamer PC (DTU-EM00AWQD) it is possible to remotely compile job files on the JEOL Compilation Computer (JCC), thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer for re-compilation and exposure. Remember to book and log in on the external Beamer PC when using this.

	The following describes how to remotely access the JCC from the external Beamer PC.		The following describes how to remotely access the JCC from the external Beamer PC.

Thope: /* Limitations of the JEOL Compilation Computer */

2023-11-15T11:07:22Z

Limitations of the JEOL Compilation Computer

← Older revision		Revision as of 13:07, 15 November 2023
Line 32:		Line 32:
	The JCC has two important differences from the JEOL 9500 exposure system:		The JCC has two important differences from the JEOL 9500 exposure system:

	#~~It only has a single working~~ condition ~~file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of~~ the ~~SDF file~~. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.		#Not all condition files found on the control computer will be present on the JCC. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.
	#The JCC is ~~slower than~~ the ~~JEOL 9500 computer~~. ~~Hence~~ for ~~large V30 files it is quite slow and one should consider going~~ to the ~~cleanroom and compile on the JEOL 9500 computer instead~~.		#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate.

Thope: /* Limitations of the JEOL Compilation Computer */

2023-10-18T09:58:32Z

Limitations of the JEOL Compilation Computer

← Older revision		Revision as of 11:58, 18 October 2023
Line 30:		Line 30:

	==Limitations of the JEOL Compilation Computer==		==Limitations of the JEOL Compilation Computer==
	The JCC has ~~three~~ important differences from the JEOL 9500 exposure system:		The JCC has two important differences from the JEOL 9500 exposure system:

	#It only has a single working condition file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of the SDF file. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.		#It only has a single working condition file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of the SDF file. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.
	#The base unit for shot pitch is 0.5 nm whereas it is 0.25 nm on the JEOL 9500 system. Thus, if you intend to exposure with 4 nm shot pitch you will use SHOT A, 8 on the JCC while you should use SHOT A, 16 on the JEOL 9500 system
	#The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead.		#The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead.

Thope: /* Limitations of the JEOL Compilation Computer */

2023-09-22T06:54:04Z

Limitations of the JEOL Compilation Computer

← Older revision		Revision as of 08:54, 22 September 2023
Line 33:		Line 33:

	#It only has a single working condition file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of the SDF file. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.		#It only has a single working condition file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of the SDF file. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system.
	#The base unit for shot pitch is 0.5 nm ~~instead of~~ 0.25 nm. Thus, if you intend to exposure with 4 nm shot pitch you will use SHOT A, 8 on the JCC while you should use SHOT A, 16 on the JEOL 9500 system		#The base unit for shot pitch is 0.5 nm whereas it is 0.25 nm on the JEOL 9500 system. Thus, if you intend to exposure with 4 nm shot pitch you will use SHOT A, 8 on the JCC while you should use SHOT A, 16 on the JEOL 9500 system
	#The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead.		#The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead.