Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest - Revision history

Elelop: /* Request for user exposure slot */

2025-06-12T09:21:14Z

Request for user exposure slot

← Older revision		Revision as of 11:21, 12 June 2025
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	<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Job requests are only handled during business hours. In order for us to verify the job and plan ahead, next day jobs must be submitted before 15.00.'''</div>		<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Job requests are only handled during business hours. In order for us to verify the job and plan ahead, next day jobs must be submitted before 13.00.'''</div>

Thope at 21:41, 26 November 2024

2024-11-26T21:41:23Z

← Older revision		Revision as of 23:41, 26 November 2024
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	<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''~~Next~~ day jobs must be submitted before 15.00.'''</div>		<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Job requests are only handled during business hours. In order for us to verify the job and plan ahead, next day jobs must be submitted before 15.00.'''</div>

Thope: /* Request form guide */

2023-12-12T09:24:05Z

Request form guide

← Older revision		Revision as of 11:24, 12 December 2023
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	'''Date:''' Date of the request.		'''Date:''' Date of the request [YYMMDD].

	'''Username:''' Labmanager username.		'''Username:''' Labmanager username.

	'''Date and time:''' ~~Find~~ vacant slots in the booking calendar ~~and fill in up to four dates and times that will work for~~ you.		'''Date and time:''' Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time.

	'''Cassette and window:''' Select the slot window(s) you would like to use.		'''Cassette and window:''' Select the slot window(s) you would like to use.

	'''Job files:''' Job files must either be placed on:		'''Job files:''' Job files must either be placed on:
	*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [~~ddmmyy~~-initials] with the date being the same as put on the request form		*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form
	*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username		*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
	*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles		*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles

Thope: /* Request for user exposure slot */

2023-12-12T09:20:12Z

Request for user exposure slot

← Older revision		Revision as of 11:20, 12 December 2023
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	The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].		The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].


	<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>		<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>

Thope: /* Request for user exposure slot */

2023-12-12T09:20:03Z

Request for user exposure slot

← Older revision		Revision as of 11:20, 12 December 2023
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	The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].		The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].

	<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>		<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>

Thope: /* Request form guide */

2023-12-12T09:17:43Z

Request form guide

← Older revision		Revision as of 11:17, 12 December 2023
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	'''Prealignment:''' Please indicate if you need prealignment.		'''Prealignment:''' Please indicate if you need prealignment.

	'''Estimated execution time:''' ~~State the expected~~ execution time. Either from job compilation or based on the [[~~Specific_Process_Knowledge/Lithography/EBeamLithography#Exposure_time~~\|~~expected exposure time~~]].		'''Estimated execution time:''' Expected execution time. Either from job compilation or based on the [[:File:Writing Time Estimator.xlsx\|Writing Time Estimator Excel sheet]].

	==Usage conditions==		==Usage conditions==

Thope: /* Request form guide */

2023-12-12T09:16:24Z

Request form guide

← Older revision		Revision as of 11:16, 12 December 2023
Line 39:		Line 39:
	'''Prealignment:''' Please indicate if you need prealignment.		'''Prealignment:''' Please indicate if you need prealignment.

	'''Estimated execution time:''' State the expected execution time. Either from ~~your own calculation~~ or ~~from~~ the ~~compilation program~~.		'''Estimated execution time:''' State the expected execution time. Either from job compilation or based on the [[Specific_Process_Knowledge/Lithography/EBeamLithography#Exposure_time\|expected exposure time]].

	==Usage conditions==		==Usage conditions==

Thope: /* Request form guide */

2023-12-12T08:44:52Z

Request form guide

← Older revision		Revision as of 10:44, 12 December 2023
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	==Request form guide==		==Request form guide==
	Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files.		Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. Please fill in the form as explained below.


	'''Date:''' ~~Please fill in the date~~ of the request.		'''Date:''' Date of the request.

	'''Username:''' ~~Please provide your Labmanger~~ username ~~in the username field~~.		'''Username:''' Labmanager username.

	'''Date and time:''' ~~Consult~~ the ~~JEOL 9500~~ booking calendar~~. Find vacant slots~~ and fill in up to four dates and times that will work for you.		'''Date and time:''' Find vacant slots in the booking calendar and fill in up to four dates and times that will work for you.

	'''Cassette and window:''' Select the window(s) you would like to use. You do not ''need'' to select a cassette. You ''can'' however select a particular cassette if for some reason you have a preference between two (in principle) identical cassettes. If you do select a particular cassette please let us know in the comment field why you need that particular cassette.		'''Cassette and window:''' Select the slot window(s) you would like to use.

	'''Job files:''' Job files must either be placed on:		'''Job files:''' Job files must either be placed on:
	*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form		*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form
	*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex		*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
	*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles		*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles

	Indicate on the form where we can find the files.		Indicate on the form where we can find the files.

	'''SDF filename(s):''' ~~Please provide the name~~ of the SDF file(s).		'''SDF filename(s):'''Name of the SDF file(s).

	'''Prealignment:''' Please indicate if you need prealignment.		'''Prealignment:''' Please indicate if you need prealignment.

Thope: /* Request for user exposure slot */

2023-12-07T20:09:27Z

Request for user exposure slot

← Older revision		Revision as of 22:09, 7 December 2023
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	The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk]. <div class="~~center~~" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>		The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].
			<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>

Thope: /* Request for user exposure slot */

2023-12-07T20:07:55Z

Request for user exposure slot

← Older revision		Revision as of 22:07, 7 December 2023
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	=Request for user exposure slot=		=Request for user exposure slot=
	~~As of October 16th 2023 all~~ exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff in order to optimize the use of the system. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign the user a slot of an appropriate length for the exposure. In this way we ensure that booking slots have the correct length and that no tool time is wasted on file preparation.		All exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff in order to optimize the use of the system. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign the user a slot of an appropriate length for the exposure. In this way we ensure that booking slots have the correct length and that no tool time is wasted on file preparation.

	It is thus necessary to have a working set of job files before a booking slot is assigned. It is advisable to compile the job files before submitting a request to make sure the job files compile as intended. One can either compile the job on the JEOL 9500 system while another user is exposing or one can compile remotely on the [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] through the external Beamer PC. If you need help creating your job files, please request a meeting and we will be happy to help.		It is thus necessary to have a working set of job files before a booking slot is assigned. It is advisable to compile the job files before submitting a request to make sure the job files compile as intended. One can either compile the job on the JEOL 9500 system while another user is exposing or one can compile remotely on the [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer\|JEOL Compilation Computer]] through the external Beamer PC. If you need help creating your job files, please request a meeting and we will be happy to help.
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	The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk].		The request form [[:File:JEOL9500 request form.docx \|can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk]. <div class="center" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Next day jobs must be submitted before 15.00.'''</div>