Specific Process Knowledge/Lithography/EBeamLithography/BEAMER - Revision history

Thope at 07:00, 14 November 2023

2023-11-14T07:00:32Z

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	'''Feedback to this page''': '''[mailto:~~e-beam~~@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php~~?title=~~Specific_Process_Knowledge/Lithography click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER click here]'''

			Content and illustration by Thomas Pedersen, DTU Nanolab unless otherwise noted.

	=Beamer guide=		=Beamer guide=

Thope: /* Beamer guide */

2023-08-28T07:06:06Z

Beamer guide

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	Currently the content below is a mix of Beamer 6 and 7, we are working towards changing it all to Beamer 7.		Currently the content below is a mix of Beamer 6 and 7, we are working towards changing it all to Beamer 7. The difference is mostly visual though.

Thope: /* Beamer guide */

2023-08-28T07:05:33Z

Beamer guide

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	For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.]		For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.]


			Currently the content below is a mix of Beamer 6 and 7, we are working towards changing it all to Beamer 7.


	==Beamer nodes==		==Beamer nodes==

Thope: /* Visual-Job */

2023-08-28T06:52:29Z

Visual-Job

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	===Visual-Job===		===Visual-Job===
	Visual Job is essentially a graphical interface where one can setup a job consisting of multiple patterns. After setup Visual Job vil write the corresponding SDF and JDF files. A short video guide to [[https://youtu.be/Mi_HimB0Xa8?si=7WemvXTKJMGLY2jb Visual Job is available here.]]		Visual Job is essentially a graphical interface where one can setup a job consisting of multiple patterns. After setup Visual Job vil write the corresponding SDF and JDF files. A short video guide to [https://youtu.be/Mi_HimB0Xa8?si=7WemvXTKJMGLY2jb Visual Job is available here.] Notice that the video is from Beamer 6.2, there is only a few minor changes in Beamer 7.

	===PEC===		===PEC===

Thope: /* Visual-Job */

2023-08-28T06:51:08Z

Visual-Job

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	===Visual-Job===		===Visual-Job===
			Visual Job is essentially a graphical interface where one can setup a job consisting of multiple patterns. After setup Visual Job vil write the corresponding SDF and JDF files. A short video guide to [[https://youtu.be/Mi_HimB0Xa8?si=7WemvXTKJMGLY2jb Visual Job is available here.]]

	===PEC===		===PEC===

Thope: /* Import */

2023-08-24T09:28:31Z

Import

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	''Ignore text, Load Text, Text as Polygon:'' Either ignores text objects, imports them as text objects or converts them to polygons. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if the design originates from CleWin.		''Ignore text, Load Text, Text as Polygon:'' Either ignores text objects, imports them as text objects or converts them to polygons. Notice that text defined in CleWin is not saved as text objects but as polygons when saving the file as GDS and hence this option is not necesarry if the design originates from CleWin.

	''Generic curve:'' Allows the detection of ~~special shapes (format depended) early in~~ the ~~process~~ to ~~improve correction and fracturing~~.		''Generic curve:'' Allows the detection of curved structures such as arcs or circles. Opens the "Approximation accuracy" field where the user can input the highest allowable deviation from the drawn polygonal structure. If curved elements are found Beamer will determine the right amount of vertices to fit the curved structure.

	''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file.		''Keep Order of Elements:'' Preserves the order in which elements are drawn/listed in the import file.

Thope: /* Fracture */

2023-08-23T13:26:29Z

Fracture

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	===Fracture===		===Fracture===
	Before pattern writing the polygons of a design must be fractured into trapezoids filled with beam/shot positions. Careful setup of how a design is fractured and shots are placed can greatly enhance the end result both in terms of critical dimension accuracy, line edge roughness and pattern stitching between writing fields~~. The ''Fracture'' node has three main panes, ''General'', ''Advanced'' and ''Fields'' (if using ''Flat with Fields'')~~.		The ''Fracture'' node has changed considerably between Beamer 6 and Beamer 7. In Beamer 7 all features related to field placement has been moved into a new ''Field'' node. To gain the same functionality as in Beamer 6 simply put a ''Field'' node after the ''Fracture'' node in Beamer 7.

			Before pattern writing the shapes/polygons of a design must be fractured into trapezoids filled with beam/shot positions. Careful setup of how a design is fractured and shots are placed can greatly enhance the end result both in terms of critical dimension accuracy, line edge roughness and pattern stitching between writing fields.


	{\| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"		{\| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
	\|-		\|-
	\| [[image:~~BEAMER_F1~~.png\|~~300px~~]]		\| [[image:BEAMER7_Fracture.png\|400px]]
	\|-		\|-
	\| colspan="3" style="text-align:center;\|		\| colspan="3" style="text-align:center;\|
	The ~~''General'' pane of the~~ ''Fracture'' node.		The ''Fracture'' node in Beamer.
	\|}		\|}


	~~The options found on the ''General'' pane are:~~

	''Maintain grid:'' Check this to fracture at the database grid size, in most cases 1 nm. If unchecked the fracturing resolution can be changed in the ''Resolution'' field. The fracture resolutions should be set to the writing grid resolution, in most cases 1 nm.		''Maintain grid:'' Check this to fracture at the database grid size, in most cases 1 nm. If unchecked the fracturing resolution can be changed in the ''Resolution'' field. The fracture resolutions should be set to the writing grid resolution, in most cases 1 nm.
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	*''Hierarchical:'' This mode will preserve the hierarchical layout structure.		*''Hierarchical:'' This mode will preserve the hierarchical layout structure.
	*''Flat:'' This mode will remove the hierarchy in the pattern while preserving the layer information of the shapes.		*''Flat:'' This mode will remove the hierarchy in the pattern while preserving the layer information of the shapes.
	*''Flat with Fields:'' This mode will enable the use of the the Fields tab. By flattening the pattern with fields, the original hierarchy is removed and replaced with a hierarchy where the virtual fields are the cells that make up the pattern. The maximum size of each cell is the size of a field, which can be controlled in the Field tab.

	''Fracturing mode'' determines the method used for fracturing.		''Fracturing mode'' determines the method used for fracturing.
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	*''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids.		*''Large Rectangle Fine Trapezoid:'' The LRFT algorithm attempts to minimize the number of shapes using very large rectangles for large areas and fine trapezoids for smaller features. In other words, this mode fractures the polygons with as many large rectangles as possible and completes the filling with small trapezoids.
	*''Curved:'' This algorithm should typically be used to fracture circles and rings. This mode allows BEAMER to shift the vertices along curves to get fractures consistent with the specified resolution and beam step size. In other words, this mode will try to detect curves in the given polygons and fracture these curves within a specified tolerance consistent with the specified resolution and beam step size.		*''Curved:'' This algorithm should typically be used to fracture circles and rings. This mode allows BEAMER to shift the vertices along curves to get fractures consistent with the specified resolution and beam step size. In other words, this mode will try to detect curves in the given polygons and fracture these curves within a specified tolerance consistent with the specified resolution and beam step size.

	*''Symmetric Fracturing:'' This will attempt to perserve as high symmetry across the x- and y-axis as possible.		*''Symmetric Fracturing:'' This will attempt to perserve as high symmetry across the x- and y-axis as possible.
	*''Subfield Fracturing:'' Will force any fracture field to be smaller or equal to the subfield size. The subfield size is controlled on the ''Fields'' pane and on the JEOL 9500 system the maximum subfield size is 4 µm.

	~~''Interactive Resorting of Fields:'' This will allow the user to manually determine the field writing order.~~


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	Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''.		Illustration of the three different fracture modes on a 400 nm diameter circle. From left to right the fracture modes are ''Conventional'', ''LRFT'' and ''Curved''.
	\|}		\|}


			===Fields===

Thope: /* Extract */

2023-08-22T09:33:39Z

Extract

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	''Extraction type:'' Allows extraction of single cells of a design or a drawn region. In the example shown below a region has been drawn in the viewer by simply Shift-left clicking to select the region. The corners of a region can also be entered nummerically. Multiple regions can be defined for extraction. By clicking the ''Exclude Region(s)/Instance'' the selected parts can be omitted from the rest of the pattern instead.		''Extraction type:'' Allows extraction of single cells of a design or a drawn region. In the example shown below a region has been drawn in the viewer by simply Shift-left clicking to select the region. The corners of a region can also be entered nummerically. Multiple regions can be defined for extraction. By clicking the ''Exclude Region(s)/Instance'' the selected parts can be omitted from the rest of the pattern instead.

			''Region Layer:'' A layer of the design can be used to define regions for extraction.

	''Dose Classification:'' The dose modulation table (if any is present from PEC) can be truncated with the ''Shrink'' option to reflect the extracted region.		''Dose Classification:'' The dose modulation table (if any is present from PEC) can be truncated with the ''Shrink'' option to reflect the extracted region.

Thope: /* Extract */

2023-08-22T09:20:19Z

Extract

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	{\| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"		{\| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
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	\| [[image:~~BEAMER_Extract~~.png\|800px]]		\| [[image:BEAMER7_Extract.png\|800px]]
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	\| colspan="1" style="text-align:center;\|		\| colspan="1" style="text-align:center;\|

Thope: /* Export */

2023-08-22T09:05:56Z

Export

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	''Size:'' Size of the main writing field, maximum size is 1000 x 1000 µm.		''Size:'' Size of the main writing field, maximum size is 1000 x 1000 µm.

	''Fracture mode:'' This can be used to alter the way Beamer fractures the geometry into trapezoidal shapes. The options in the export module are fairly limited, much more control can be gained by using a ''Fracture'' node.		''Fracture mode:'' This can be used to alter the way Beamer fractures the geometry into trapezoidal shapes. The options in the export module are fairly limited, much more control can be gained by using a ''Fracture'' node. See the ''Fracture'' node for more details.

	''Feature Sorting in Field:'' Can be used to alter the writing order of pattern elements in each writing field. The actual result of these choices can be somewhat hard to predict. After export the result can be seen in the Viewer under ''Tool'' and either ''Show Traversal Path'' or ''Show Writing Order''.		''Feature Sorting in Field:'' Can be used to alter the writing order of pattern elements in each writing field. The actual result of these choices can be somewhat hard to predict. After export the result can be seen in the Viewer under ''Tool'' and either ''Show Traversal Path'' or ''Show Writing Order''.