Specific Process Knowledge/Lithography/Coaters/SprayCoater - Revision history

Taran at 14:10, 25 August 2025

2025-08-25T14:10:24Z

← Older revision		Revision as of 16:10, 25 August 2025
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	==Spray Coater==		==Spray Coater==
	[[image:1042_spraycoater_overview.jpg\|400x239px\|right\|thumb\|Spray Coater in ~~Cleanroom C-1~~]]		[[image:1042_spraycoater_overview.jpg\|400x239px\|right\|thumb\|Spray Coater is located in Serviceroom Cx1]]

	The spray coater at DTU Nanolab is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic ~~tranducer~~ for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results.		The spray coater at DTU Nanolab is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic transducer for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results.

	Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns.		Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns.

Jehem at 12:49, 10 May 2023

2023-05-10T12:49:33Z

← Older revision		Revision as of 14:49, 10 May 2023
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			{{cc-nanolab}}

	'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''		'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''

	~~{{cc-nanolab}}~~

	==Spray Coater==		==Spray Coater==

Jehem at 12:49, 10 May 2023

2023-05-10T12:49:19Z

← Older revision		Revision as of 14:49, 10 May 2023
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''		'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''

	{{~~:Specific Process Knowledge/Lithography/authors_generic~~}}		{{cc-nanolab}}

	==Spray Coater==		==Spray Coater==

Kabi at 15:21, 7 February 2023

2023-02-07T15:21:35Z

← Older revision		Revision as of 17:21, 7 February 2023
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	'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''		'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''

			{{:Specific Process Knowledge/Lithography/authors_generic}}

	==Spray Coater==		==Spray Coater==

Taran: /* Process development */

2022-04-27T15:15:06Z

Process development

← Older revision		Revision as of 17:15, 27 April 2022
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	== Process development==		== Process development==
	*[[/AZ4562\|Spray coating using AZ4562]]		*[[/AZ4562\|Spray coating using AZ4562]]
			*[[/TISpray\|Spray coating using TI Spray]]

	==Equipment performance and process related parameters==		==Equipment performance and process related parameters==

Jmli at 16:48, 25 November 2019

2019-11-25T16:48:51Z

← Older revision		Revision as of 18:48, 25 November 2019
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	'''Feedback to this page''': '''[mailto:CustomerSupport@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''		'''Feedback to this page''': '''[mailto:CustomerSupport@Nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters/SprayCoater click here]'''

	==Spray Coater==		==Spray Coater==
	[[image:1042_spraycoater_overview.jpg\|400x239px\|right\|thumb\|Spray Coater in Cleanroom C-1]]		[[image:1042_spraycoater_overview.jpg\|400x239px\|right\|thumb\|Spray Coater in Cleanroom C-1]]

	The spray coater at ~~Danchip~~ is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic tranducer for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results.		The spray coater at DTU Nanolab is located in Cleanroom C-1. The machine is an ExactaCoat from Sono-tek which can be fitted with one of three different nozzles depending on the nature of the spray coating tasks at hand. The three different nozzles (Impact, AccuMist and Vortex) are optimized for different applications such as spray coating of large areas (e.g. entire wafers), smaller areas (e.g. wafer pieces or other small samples) or already structured samples that cannot be coated uniformly by spin coating. All nozzles use an ultrasonic tranducer for atomizing the solution to be spray coated. It is therefore a prerequisite that all components are compatible with this process. This is the case with most substances, although process parameters may need optimization to give satisfactory results.

	Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns.		Practically any sample that will fit inside the spray coater can be processed. Spray patterns are easily programmed either using predefined spray patterns (1D line, 2D rectangles/circles/meanders/spirals) or custom 3D spray patterns.
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	'''Further information about the spray coater (manual, process log, technical information etc.) can be found in LabManger''':		'''Further information about the spray coater (manual, process log, technical information etc.) can be found in LabManger''':

	[http://labmanager~~.danchip~~.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]'''		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]'''

	== Process development==		== Process development==

Bghe at 14:18, 11 December 2018

2018-12-11T14:18:29Z

← Older revision		Revision as of 16:18, 11 December 2018
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	[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]'''		[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=293 Spray coater in LabManager]'''

			== Process development==
			*[[/AZ4562\|Spray coating using AZ4562]]
	==Equipment performance and process related parameters==		==Equipment performance and process related parameters==

Choi: /* Equipment performance and process related parameters */

2018-10-24T12:13:07Z

Equipment performance and process related parameters

← Older revision		Revision as of 14:13, 24 October 2018
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*'''All chemicals to be spray coated must be approved specifically for spray coating'''		*'''All chemicals to be spray coated must be approved specifically for spray coating'''
	*Most non-toxic, non-particulate and non-crosslinking material is likely to be approved		*Most non-toxic, non-particulate and non-crosslinking material likely to be approved
	*Suspensions challenging due to very low diameter tubing		*Suspensions challenging due to very low diameter tubing
	\|-		\|-

Choi: /* Equipment performance and process related parameters */

2018-10-24T12:12:47Z

Equipment performance and process related parameters

← Older revision		Revision as of 14:12, 24 October 2018
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*'''All chemicals to be spray coated must be approved specifically for spray coating'''		*'''All chemicals to be spray coated must be approved specifically for spray coating'''
	*~~Any~~ non-toxic, non-particulate and non-crosslinking material is likely to be approved		*Most non-toxic, non-particulate and non-crosslinking material is likely to be approved
			*Suspensions challenging due to very low diameter tubing
	\|-		\|-
	\|}		\|}

Choi: /* Equipment performance and process related parameters */

2018-10-24T12:10:52Z

Equipment performance and process related parameters

← Older revision		Revision as of 14:10, 24 October 2018
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	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Spraying imprint resists (primarily mr-NIL 6000E and mr-I 8000E ~~series have been tested so far~~)		*Spraying imprint resists (primarily mr-NIL 6000E and mr-I 8000E)
	*Spraying photoresist (primarily AZ 4562~~, AZ 4999 and AR-N 7520 have been tested so far~~)		*Spraying photoresist (primarily AZ-4562)
	*Spraying of other solutions		*Spraying of other solutions
	\|-		\|-