Specific Process Knowledge/Etch/Wet Titanium Etch - Revision history

Hvje: /* Comparing the two solutions */

2024-06-27T10:44:07Z

Comparing the two solutions

← Older revision		Revision as of 12:44, 27 June 2024
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	Not known (it bubbles while etching)		Not known (it bubbles while etching)
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	~~Not known~~		50 nm etches in around 2 min
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Hvje at 09:06, 7 February 2023

2023-02-07T09:06:00Z

← Older revision		Revision as of 11:06, 7 February 2023
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	'''Feedback to this page''': '''[mailto:wetchemistry@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''

	'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''		'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

Hvje at 13:14, 31 January 2023

2023-01-31T13:14:07Z

← Older revision		Revision as of 15:14, 31 January 2023
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	'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Titanium_Etch click here]'''

			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Kemibrug (SDS) and Labmanager Including APV requires login.'''

			'''All measurements on this page has been made by Nanolab staff.'''

	[[Category: Equipment\|Etch Wet Titanium]]		[[Category: Equipment\|Etch Wet Titanium]]

Choi: /* Comparing the two solutions */

2020-01-27T08:41:51Z

Comparing the two solutions

← Older revision		Revision as of 10:41, 27 January 2020
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	\|-style="background:WhiteSmoke; color:black"		\|-style="background:WhiteSmoke; color:black"
	\|'''Chemical solution'''		\|'''Chemical solution'''
	\|HF:NH<sub>4</sub>F		\|HF : NH<sub>4</sub>F : NH<sub>4</sub>HF<sub>2</sub>
	\|NH<sub>3</sub>~~OH:~~H<sub>2</sub>O<sub>2</sub>:H<sub>2</sub>O - 1:1:5		\|H<sub>2</sub>O : NH<sub>4</sub>OH : H<sub>2</sub>O<sub>2</sub> - 5:1:1
	\|-		\|-

Choi: /* Wet etching of Titanium */

2020-01-27T08:24:24Z

Wet etching of Titanium

← Older revision		Revision as of 10:24, 27 January 2020
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	==Wet etching of Titanium==		==Wet etching of Titanium==
	~~[[Image:Stinkskab RR2.jpg\|250x250px\|thumb\|Fumehood(RCA) in cleanroom B-1. <br />Wet etching of titanium can be done in the "HF5%/BHF-dirty" bath in this fume hood]]~~		[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 01 and 02 in Cleanroom D-3 for working with acids and bases.<br>Wet etching of titanium can be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]
	[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 1 and 2 for acids and bases ~~in cleanroom D-3~~. <br />Wet etching of titanium can ~~also~~ be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]

	We have two solutions for wet titanium etching:		We have two solutions for wet titanium etching:

	# BHF (~~wetbench or~~ fumehood)		# BHF (beaker in fumehood)
	# Cold RCA1 (fumehood)		# Cold RCA1 (beaker in fumehood)
	<br>		<br>
	Etching titanium ~~in BHF can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only pre-made BHF bath where metals are allowed. You can also do the titanium etch~~ in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in ~~cleanroom~~ D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].		Etching titanium in BHF or RCA1 mix is made by making your own solution in a beaker in either Fumehood 01 or 02 in Cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].


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	!Allowed materials		!Allowed materials
	\|		\|
	Practically no restrictions when used in beaker ~~or 'HF5%~~/~~BHF-dirty' bath in Fumehood(RCA) in cleanroom B-1~~.		Practically no restrictions when used in beaker. Make sure to use a plastic beaker, since glass will be attacked by BHF/HF.
	Make a note on the beaker of which materials have been processed.		Make a note on the beaker of which materials have been processed.
	\|		\|

Choi: /* Wet etching of Titanium */

2019-02-07T11:43:49Z

Wet etching of Titanium

← Older revision		Revision as of 13:43, 7 February 2019
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	\|'''Link to safety APV and KBA'''		\|'''Link to safety APV and KBA'''
	\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]		\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
	[~~http~~://kemibrug.dk/~~KBA/CAS/106534/~~?~~show_KBA=1&portaldesign~~=~~1 see KBA~~ here]		[https://kemibrug.dk/Kemikalier?stofnavn=BHF See SDS here (requires Kemibrug login)]
	\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]		\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
	\|-		\|-
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	!Batch size		!Batch size
	\|		\|
	1-5 4" in beaker		1-5 wafers in beaker
	~~1-25 wafers at a time in PP-etch bath~~
	\|		\|
	1-5 ~~4" wafer at a time~~		1-5 wafers in beaker
	\|-		\|-

Choi: /* Wet etching of Titanium */

2017-02-27T14:04:29Z

Wet etching of Titanium

← Older revision		Revision as of 16:04, 27 February 2017
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	!Allowed materials		!Allowed materials
	\|		\|
	No restrictions when used in beaker or PP-~~etch~~ bath in ~~the fume hood~~ in cleanroom 2.		Practically no restrictions when used in beaker or 'HF5%/BHF-dirty' bath in Fumehood(RCA) in cleanroom B-1.
	Make a note on the beaker of which materials have been processed.		Make a note on the beaker of which materials have been processed.
	\|		\|
	No restrictions when used in beaker.		Practically no restrictions when used in beaker.
	Make a note on the beaker of which materials have been processed.		Make a note on the beaker of which materials have been processed.
	\|-		\|-
	\|}		\|}

Choi: /* Wet etching of Titanium */

2017-02-27T14:02:27Z

Wet etching of Titanium

← Older revision		Revision as of 16:02, 27 February 2017
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	# Cold RCA1 (fumehood)		# Cold RCA1 (fumehood)
	<br>		<br>
	BHF ~~etching~~ can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ~~ready~~ made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].		Etching titanium in BHF can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only pre-made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].

Choi: /* Wet etching of Titanium */

2017-02-27T14:00:52Z

Wet etching of Titanium

← Older revision		Revision as of 16:00, 27 February 2017
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	# BHF (wetbench or fumehood)		# BHF (wetbench or fumehood)
	# Cold RCA1 (fumehood)		# Cold RCA1 (fumehood)
			<br>
	BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].		BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].

Choi: /* Wet etching of Titanium */

2017-02-27T14:00:23Z

Wet etching of Titanium

← Older revision		Revision as of 16:00, 27 February 2017
Line 7:		Line 7:

	==Wet etching of Titanium==		==Wet etching of Titanium==
	[[Image:Stinkskab RR2.jpg\|300x300px\|thumb\|Fume hood in cleanroom B-1. <br />Wet ~~Etch~~ of ~~Titanium~~ can ~~take place~~ in ~~this pp tank~~ or in a beaker in ~~this~~ fume ~~hood~~]]		[[Image:Stinkskab RR2.jpg\|250x250px\|thumb\|Fumehood(RCA) in cleanroom B-1. <br />Wet etching of titanium can be done in the "HF5%/BHF-dirty" bath in this fume hood]]
			[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 1 and 2 for acids and bases in cleanroom D-3. <br />Wet etching of titanium can also be done in beakers with BHF or RCA1 mix in a beaker in one of these fume hoods]]

	We have two solutions for wet titanium etching:		We have two solutions for wet titanium etching:

	# BHF		# BHF (wetbench or fumehood)
	# Cold RCA1		# Cold RCA1 (fumehood)

	~~Do it~~ by making your own ~~set up~~ in a beaker in ~~a fume hood - preferably~~ in cleanroom ~~B-1 or~~ D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here]~~. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom B-1~~.		BHF etching can take place in the 'HF5%/BHF-dirty' bath inside Fumehood(RCA) in cleanroom B-1. This is the only ready made BHF bath where metals are allowed. You can also do the titanium etch in BHF or RCA1 mix by making your own solution in a beaker in Fumehood 01 or 02 in cleanroom D-3. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].


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	\|-style="background:LightGrey; color:black"		\|-style="background:LightGrey; color:black"
	\|'''Link to safety APV and KBA'''		\|'''Link to safety APV and KBA'''
	\|[http://labmanager~~.danchip~~.dtu.dk/d4Show.php?id=~~2479~~&mach=~~146~~ see APV here]		\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
	[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]		[http://kemibrug.dk/KBA/CAS/106534/?show_KBA=1&portaldesign=1 see KBA here]
	\|[http://labmanager~~.danchip~~.dtu.dk/d4Show.php?id=~~2479~~&mach=~~146~~ see APV here]		\|[http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV here]
	\|-		\|-