Specific Process Knowledge/Etch/Wet Platinum Etch - Revision history

Hvje at 07:31, 31 July 2025

2025-07-31T07:31:21Z

← Older revision		Revision as of 09:31, 31 July 2025
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	At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.		At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

	Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].		Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. Be aware that no other processes can be done in the fumehood at the same time.You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].

	===Platinum Etch data===		===Platinum Etch data===

Hvje at 09:07, 7 February 2023

2023-02-07T09:07:09Z

← Older revision		Revision as of 11:07, 7 February 2023
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	'''Feedback to this page''': '''[mailto:wetchemistry@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Platinum_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Platinum_Etch click here]'''

	'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''		'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

Hvje at 13:24, 31 January 2023

2023-01-31T13:24:23Z

← Older revision		Revision as of 15:24, 31 January 2023
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	'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Platinum_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Platinum_Etch click here]'''

			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Kemibrug (SDS) and Labmanager Including APV requires login.'''

			'''All measurements on this page has been made by Nanolab staff.'''

	Etching of Platinum can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.		Etching of Platinum can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions.

Kabi: /* Wet Etching of Platinum */

2023-01-12T10:45:05Z

Wet Etching of Platinum

← Older revision		Revision as of 12:45, 12 January 2023
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	H<sub>2</sub>O : HCl : HNO<sub>3</sub> (8 : 7 : 1) at 85 °C (note: etching starts at 70 C, 170nm etched in 5 min 70 C-85 C) Nisoer July 2022		H<sub>2</sub>O : HCl : HNO<sub>3</sub> (8 : 7 : 1) at 85 °C (note: etching starts at 70 C, 170nm etched in 5 min 70 C-85 C) Nisoer July 2022
	'''You have to be very careful when you work with this etch. It can generate nitrous ~~oxides~~ which are very toxic!!'''		'''You have to be very careful when you work with this etch. It can generate nitrous gasses which are very toxic!!'''

	At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.		At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

Kabi: /* Wet Etching of Platinum */

2023-01-12T10:43:35Z

Wet Etching of Platinum

← Older revision		Revision as of 12:43, 12 January 2023
Line 14:		Line 14:
	At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.		At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

	Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 ~~see APV/Manual~~ here].		Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].

	===Platinum Etch data===		===Platinum Etch data===

Kabi: /* Wet Etching of Platinum */

2023-01-12T10:42:57Z

Wet Etching of Platinum

← Older revision		Revision as of 12:42, 12 January 2023
Line 14:		Line 14:
	At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.		At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

	Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager~~.danchip~~.dtu.dk/d4Show.php?id=~~2479~~&mach=~~146~~ here].		Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 see APV/Manual here].

	===Platinum Etch data===		===Platinum Etch data===

Sifkle: /* Wet Etching of Platinum */

2023-01-04T11:53:00Z

Wet Etching of Platinum

← Older revision		Revision as of 13:53, 4 January 2023
Line 9:		Line 9:
	Platinum can be etched by the following wet etch:		Platinum can be etched by the following wet etch:

	~~HCl : HNO~~<sub>3</sub> : H<sub>2</sub>O (7 : 1 ~~: 8~~) at 85 °C (note: ~~etches~~ at 70 C, 170nm etched in 5 min) Nisoer July 2022		H<sub>2</sub>O : HCl : HNO<sub>3</sub> (8 : 7 : 1) at 85 °C (note: etching starts at 70 C, 170nm etched in 5 min 70 C-85 C) Nisoer July 2022
	'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''		'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''

Sifkle: /* Wet Etching of Platinum */

2023-01-04T11:45:00Z

Wet Etching of Platinum

← Older revision		Revision as of 13:45, 4 January 2023
Line 9:		Line 9:
	Platinum can be etched by the following wet etch:		Platinum can be etched by the following wet etch:

	HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C (note: ~~eacthes~~ at 70 C 170nm etched in 5 min) Nisoer July 2022		HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C (note: etches at 70 C, 170nm etched in 5 min) Nisoer July 2022
	'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''		'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''

Nisoer: /* Wet Etching of Platinum */

2022-07-21T08:11:50Z

Wet Etching of Platinum

← Older revision		Revision as of 10:11, 21 July 2022
Line 9:		Line 9:
	Platinum can be etched by the following wet etch:		Platinum can be etched by the following wet etch:

	*HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C		HCl : HNO<sub>3</sub> : H<sub>2</sub>O (7 : 1 : 8) at 85 °C (note: eacthes at 70 C 170nm etched in 5 min) Nisoer July 2022
	'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''		'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!'''

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	\|-style="background:LightGrey; color:black"		\|-style="background:LightGrey; color:black"
	!Process temperature		!Process temperature
	\|85 °C		\|85 °C etches at 70 C* Nisoer July 2022
	\|-		\|-

Choi: /* Wet Etching of Platinum */

2020-01-27T09:07:25Z

Wet Etching of Platinum

← Older revision		Revision as of 11:07, 27 January 2020
Line 14:		Line 14:
	At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.		At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

	Wet etching of Platinum is done by making your own setup in a glass beaker in ~~the fumehood~~ in ~~cleanroom B~~-1. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].		Wet etching of Platinum is done by making your own setup in a glass beaker in Fumehood 01 or 02 in Cleanroom D-3. Write content on the beaker and which metals has been etched with yellow permanent pen. You can see the APV [http://labmanager.danchip.dtu.dk/d4Show.php?id=2479&mach=146 here].

	===Platinum Etch data===		===Platinum Etch data===