Specific Process Knowledge/Etch/Wet Chromium Etch - Revision history

Mbec at 09:29, 4 February 2026

2026-02-04T09:29:53Z

← Older revision		Revision as of 11:29, 4 February 2026
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	==Wet etching of Chromium==		==Wet etching of Chromium==
	[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 01 or 02 (for acids and bases) in cleanroom D-3 can be used for wet chromium etching.]]		[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 01 or 02 (for acids and bases) in cleanroom D-3 can be used for wet chromium etching.]]
	Wet etching of chromium at DTU Nanolab is done making your own set up in a beaker in a fume hood - preferably in D-3. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].		Wet etching of chromium at DTU Nanolab is done making your own set up in a beaker in a fume hood - preferably in D-3. Make sure no other setup is present in the fume hood before you start. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].

	We use the following solution to etch chromium:		We use the following solution to etch chromium:

Hvje: /* Wet etching of Chromium */

2025-10-22T13:06:39Z

Wet etching of Chromium

← Older revision		Revision as of 15:06, 22 October 2025
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	'''All measurements on this page has been made by Nanolab staff.'''		'''All measurements on this page has been made by Nanolab staff.'''

	[[Category:Equipment\|Etch Wet Chromium]]		[[index.php?title=Category:Equipment\|Etch Wet Chromium]]
	[[Category:Etch (Wet) bath\|Chromium]]		[[index.php?title=Category:Etch (Wet) bath\|Chromium]]

	==Wet etching of Chromium==		==Wet etching of Chromium==
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	PECVD SiO2 and LPCVD SiN coated wafers have been immersed in Cr etch 18 for 10min. Thickness wise: absolutely no changes (roughness after etch not measured)		PECVD SiO2 and LPCVD SiN coated wafers have been immersed in Cr etch 18 for 10min. Thickness wise: absolutely no changes (roughness after etch not measured)

	Normally the etch is reused (if you etch Molybdenum never reuse), but if you need to dispose it, collect it in a bottle marked O waste.		Normally the etch is reused (if you etch Molybdenum never reuse), but if you need to dispose it, collect it in a bottle marked X waste.

	===Overview of the chromium etch process===		===Overview of the chromium etch process===

Mmat at 21:46, 16 June 2025

2025-06-16T21:46:36Z

← Older revision		Revision as of 23:46, 16 June 2025
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	'''All measurements on this page has been made by Nanolab staff.'''		'''All measurements on this page has been made by Nanolab staff.'''

	[[~~index.php?title=~~Category:Equipment\|Etch Wet Chromium]]		[[Category:Equipment\|Etch Wet Chromium]]
	[[~~index.php?title=~~Category:Etch (Wet) bath\|Chromium]]		[[Category:Etch (Wet) bath\|Chromium]]

	==Wet etching of Chromium==		==Wet etching of Chromium==

Mbec: /* Wet etching of Chromium */

2025-03-31T11:28:49Z

Wet etching of Chromium

← Older revision		Revision as of 13:28, 31 March 2025
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	PECVD SiO2 and LPCVD SiN coated wafers have been immersed in Cr etch 18 for 10min. Thickness wise: absolutely no changes (roughness after etch not measured)		PECVD SiO2 and LPCVD SiN coated wafers have been immersed in Cr etch 18 for 10min. Thickness wise: absolutely no changes (roughness after etch not measured)

	Normally the etch is reused, but if you need to dispose it, collect it in a bottle marked O waste.		Normally the etch is reused (if you etch Molybdenum never reuse), but if you need to dispose it, collect it in a bottle marked O waste.

	===Overview of the chromium etch process===		===Overview of the chromium etch process===

Hvje: /* Wet etching of Chromium */

2025-03-24T13:40:09Z

Wet etching of Chromium

← Older revision		Revision as of 15:40, 24 March 2025
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	'''All measurements on this page has been made by Nanolab staff.'''		'''All measurements on this page has been made by Nanolab staff.'''

	[[Category: Equipment\|Etch Wet Chromium]]		[[index.php?title=Category:Equipment\|Etch Wet Chromium]]
	[[Category: Etch (Wet) bath\|Chromium]]		[[index.php?title=Category:Etch (Wet) bath\|Chromium]]

	==Wet etching of Chromium==		==Wet etching of Chromium==
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	The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.		The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.

			PECVD SiO2 and LPCVD SiN coated wafers have been immersed in Cr etch 18 for 10min. Thickness wise: absolutely no changes (roughness after etch not measured)

	Normally the etch is reused, but if you need to dispose it, collect it in a bottle marked O waste.		Normally the etch is reused, but if you need to dispose it, collect it in a bottle marked O waste.

Mbec: /* Wet etching of Chromium */

2023-02-17T12:32:01Z

Wet etching of Chromium

← Older revision		Revision as of 14:32, 17 February 2023
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	We use the following solution to etch chromium:		We use the following solution to etch chromium:

	# Commercial chromium etch (Chrome Etch 18). You can see the KBA [https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESk5HTklNVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K here]		# Commercial chromium etch (Chrome Etch 18). You can see the KBA (needs login) [https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESk5HTklNVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K here]

	The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.		The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.

Mbec: /* Wet etching of Chromium */

2023-02-17T10:24:45Z

Wet etching of Chromium

← Older revision		Revision as of 12:24, 17 February 2023
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	The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.		The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.

			Normally the etch is reused, but if you need to dispose it, collect it in a bottle marked O waste.

	===Overview of the chromium etch process===		===Overview of the chromium etch process===

Hvje at 13:11, 31 January 2023

2023-01-31T13:11:59Z

← Older revision		Revision as of 15:11, 31 January 2023
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	'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Chrominum_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Chrominum_Etch click here]'''

			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Kemibrug (SDS) and Labmanager Including APV requires login.'''

			'''All measurements on this page has been made by Nanolab staff.'''

	[[Category: Equipment\|Etch Wet Chromium]]		[[Category: Equipment\|Etch Wet Chromium]]

Mbec: /* Wet etching of Chromium */

2022-08-05T12:53:52Z

Wet etching of Chromium

← Older revision		Revision as of 14:53, 5 August 2022
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	# Commercial chromium etch (Chrome Etch 18). You can see the KBA [https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESk5HTklNVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K here]		# Commercial chromium etch (Chrome Etch 18). You can see the KBA [https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESk5HTklNVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K here]

	The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the ~~etch~~ rate is around 150 nm/min.		The etch rate depends on the level of surface oxidation of the chromium metal, but the standard procedure (etch at room temperature: ~22°C) the Etch rate is around 150 nm/min.

	===Overview of the chromium etch process===		===Overview of the chromium etch process===

Jmli at 16:18, 25 November 2019

2019-11-25T16:18:14Z

← Older revision		Revision as of 18:18, 25 November 2019
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:wetchemistry@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Chrominum_Etch click here]'''		'''Feedback to this page''': '''[mailto:wetchemistry@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Wet_Chrominum_Etch click here]'''

	[[Category: Equipment\|Etch Wet Chromium]]		[[Category: Equipment\|Etch Wet Chromium]]
Line 6:		Line 6:
	==Wet etching of Chromium==		==Wet etching of Chromium==
	[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 01 or 02 (for acids and bases) in cleanroom D-3 can be used for wet chromium etching.]]		[[Image:Fumehood1-2.jpg\|300x300px\|thumb\|Fume hood 01 or 02 (for acids and bases) in cleanroom D-3 can be used for wet chromium etching.]]
	Wet etching of chromium at ~~Danchip~~ is done making your own set up in a beaker in a fume hood - preferably in D-3. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].		Wet etching of chromium at DTU Nanolab is done making your own set up in a beaker in a fume hood - preferably in D-3. You can see the APV [http://labmanager.dtu.dk/d4Show.php?id=4748&mach=368 here].

	We use the following solution to etch chromium:		We use the following solution to etch chromium: