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Specific Process Knowledge/Etch/III-V ICP/GaAsnano - Revision history
2026-06-17T00:00:25Z
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https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=51430&oldid=prev
Bghe at 11:54, 31 March 2025
2025-03-31T11:54:45Z
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on 18/8-2021 - ok/bghe --> </div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on 18/8-2021 - ok/bghe --> </div></td></tr>
<tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"><!-- reviewed by bghe 31/3 2025--></ins></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=39015&oldid=prev
Bghe at 13:42, 18 August 2021
2021-08-18T13:42:39Z
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<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@<del style="font-weight: bold; text-decoration: none;">danchip</del>.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.<del style="font-weight: bold; text-decoration: none;">danchip</del>.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano click here]''' </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@<ins style="font-weight: bold; text-decoration: none;">nanolab</ins>.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.<ins style="font-weight: bold; text-decoration: none;">nanolab</ins>.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano click here]''' </div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on <del style="font-weight: bold; text-decoration: none;">11</del>/<del style="font-weight: bold; text-decoration: none;">2</del>-<del style="font-weight: bold; text-decoration: none;">2019 </del>- ok/<del style="font-weight: bold; text-decoration: none;">jmli </del>--> </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on <ins style="font-weight: bold; text-decoration: none;">18</ins>/<ins style="font-weight: bold; text-decoration: none;">8</ins>-<ins style="font-weight: bold; text-decoration: none;">2021 </ins>- ok/<ins style="font-weight: bold; text-decoration: none;">bghe </ins>--> </div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=30819&oldid=prev
Jmli at 10:33, 11 February 2019
2019-02-11T10:33:38Z
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<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;"> </del></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"><!--Checked for updates on 11/2-2019 - ok/jmli --> </ins></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td></tr>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=24813&oldid=prev
Bghe at 06:53, 19 September 2016
2016-09-19T06:53:09Z
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| border="1" cellspacing="2" cellpadding="3" align="left"</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| border="1" cellspacing="2" cellpadding="3" align="left"</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>|colspan="2" align="center"| '''Results (GaAs Nano Etch)''' </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|colspan="2" align="center"| '''Results (GaAs Nano Etch)'<ins style="font-weight: bold; text-decoration: none;">'' ''from 2011 by Thor Ansbæk @photonic</ins>''</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|- </div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|- </div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|GaAs</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|GaAs</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=24536&oldid=prev
Jmli at 09:41, 1 August 2016
2016-08-01T09:41:28Z
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<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div> </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"> </ins></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=== GaAs nano etch ===</div></td></tr>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano&diff=15245&oldid=prev
Bghe: Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."
2014-06-19T12:22:59Z
<p>Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."</p>
<p><b>New page</b></p><div>'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III-V_ICP/GaAsnano click here]''' <br />
<br />
=== GaAs nano etch ===<br />
<br />
{| border="1" cellspacing="2" cellpadding="3" <br />
|'''Recipe'''<br />
|'''GaAs Nano Etch'''<br />
|- <br />
|Cl<sub>2</sub> flow<br />
|4 sccm<br />
|-<br />
|Ar flow<br />
|12 sccm<br />
|-<br />
|Platen power<br />
|80 W<br />
|-<br />
|Coil power<br />
|700 W<br />
|- <br />
|Pressure <br />
|6 mTorr<br />
|-<br />
|Platen chiller temperature<br />
|20 <sup>o</sup>C<br />
|-<br />
|}<br />
<br />
<br />
{| border="1" cellspacing="2" cellpadding="3" align="left"<br />
|colspan="2" align="center"| '''Results (GaAs Nano Etch)''' <br />
|- <br />
|GaAs<br />
|5 nm/s<br />
|-<br />
|AlInP<br />
|1 nm/s<br />
|-<br />
|HSQ<br />
|1.5 nm/s<br />
|-<br />
|ZEP520a<br />
|2 nm/s<br />
|-<br />
|Si<sub>3</sub>N<sub>4</sub><br />
|2 nm/s<br />
|-<br />
|}<br />
<br />
{| border="0" align="left"<br />
|<br />
|- <br />
|}<br />
<br />
{| border="1" cellspacing="2" cellpadding="2" <br />
![[image:GaAs_Nano_Etch.jpg|300x300px|thumb|left|GaAs sample with a ZEP520a masking layer etched for 1 min 15 s with the "GaAs Nano Etch" recipe. Thor Ansbæk, DTU Photonics, 2011. ]]<br />
|-<br />
|}</div>
Bghe