https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Specific_Process_Knowledge%2FEtch%2FICP_Metal_Etcher%2Fsilicon_oxide%2FBy_Peixiong
Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong - Revision history
2026-06-09T22:09:38Z
Revision history for this page on the wiki
MediaWiki 1.43.3
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=54321&oldid=prev
Bghe at 09:44, 4 September 2025
2025-09-04T09:44:29Z
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 11:44, 4 September 2025</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br> {{CC-bghe1}} <br></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br> {{CC-bghe1}} <br></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>APOX refers to a thick SiO2 grown <del style="font-weight: bold; text-decoration: none;">in </del>a silicon wafer in a wet thermal process at high temperature.</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>APOX refers to a thick SiO2 grown <ins style="font-weight: bold; text-decoration: none;">on </ins>a silicon wafer in a wet thermal process at high temperature.</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=54320&oldid=prev
Bghe at 09:43, 4 September 2025
2025-09-04T09:43:44Z
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 11:43, 4 September 2025</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br> {{CC-bghe1}} <br></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><br> {{CC-bghe1}} <br></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td></tr>
<tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">APOX refers to a thick SiO2 grown in a silicon wafer in a wet thermal process at high temperature.</ins></div></td></tr>
<tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"></ins></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=54319&oldid=prev
Bghe at 09:38, 4 September 2025
2025-09-04T09:38:23Z
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 11:38, 4 September 2025</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | </div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=83 style='width:62.0pt;border-top:none;border-left:solid white 1.0pt; border-bottom:solid white 3.0pt;border-right:solid white 1.0pt;background: #D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | </div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA>Wafer size and ID</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A1_feb252013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A4_feb262013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A6_feb262013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A2_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A3_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A4_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A5_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><del style="font-weight: bold; text-decoration: none;">6inch</del>,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 3.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:33.3pt' | <p class=MsoNormal><span lang=DA><ins style="font-weight: bold; text-decoration: none;">6 inch</ins>,</span></p><p class=MsoNormal><span lang=DA>6A6_feb272013</span></p></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|- style='height:71.7pt'</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|- style='height:71.7pt'</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | </div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=83 style='width:62.0pt;border:solid white 1.0pt;border-top:none; background:#D0D8E8;padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | </div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=68 style='width:51.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><span lang=DA>Mask</span></p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><del style="font-weight: bold; text-decoration: none;">440nm </del>resist on <del style="font-weight: bold; text-decoration: none;">62nmBarc </del>on <del style="font-weight: bold; text-decoration: none;">1800nm </del>apox, first etch barc</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=81 style='width:61.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><ins style="font-weight: bold; text-decoration: none;">440 nm </ins>resist on <ins style="font-weight: bold; text-decoration: none;">62 nm Barc </ins>on <ins style="font-weight: bold; text-decoration: none;">1800 nm </ins>apox, first etch barc</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">20sec </del>by Ox plasma</p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">20 sec </ins>by Ox plasma</p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><del style="font-weight: bold; text-decoration: none;">440nm </del>resist on <del style="font-weight: bold; text-decoration: none;">62nmBarc </del>on <del style="font-weight: bold; text-decoration: none;">1800nm </del>apox, first etch barc</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=72 style='width:54.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><ins style="font-weight: bold; text-decoration: none;">440 nm </ins>resist on <ins style="font-weight: bold; text-decoration: none;">62 nm Barc </ins>on <ins style="font-weight: bold; text-decoration: none;">1800 nm </ins>apox, first etch barc</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">20sec </del>by Ox plasma</p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">20 sec </ins>by Ox plasma</p></div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><del style="font-weight: bold; text-decoration: none;">780nm </del>resist on <del style="font-weight: bold; text-decoration: none;">62nmBarc </del>on <del style="font-weight: bold; text-decoration: none;">1800nm </del>apox, first etch barc</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal><ins style="font-weight: bold; text-decoration: none;">780 nm </ins>resist on <ins style="font-weight: bold; text-decoration: none;">62 nm Barc </ins>on <ins style="font-weight: bold; text-decoration: none;">1800 nm </ins>apox, first etch barc</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">20sec </del>by Ox plasma</p></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">20 sec </ins>by Ox plasma</p></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| width=79 style='width:59.0pt;border-top:none;border-left:none;border-bottom: solid white 1.0pt;border-right:solid white 1.0pt;background:#D0D8E8; padding:2.25pt 2.25pt 2.25pt 2.25pt;height:71.7pt' | <p class=MsoNormal>780nm resist on 62nmBarc on 800nm apox, first etch barc</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>20sec by Ox plasma</p></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>20sec by Ox plasma</p></div></td></tr>
</table>
Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=44580&oldid=prev
Bghe at 08:31, 10 February 2023
2023-02-10T08:31:48Z
<p></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:31, 10 February 2023</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div> </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"><br> {{CC-bghe1}} <br></ins></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
</table>
Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=44579&oldid=prev
Bghe: /* With C4F8 and H2 chemistry (tests done by Peixiong Shi, DTU Nanolab) */
2023-02-10T08:31:09Z
<p><span class="autocomment">With C4F8 and H2 chemistry (tests done by Peixiong Shi, DTU Nanolab)</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:31, 10 February 2023</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Line 1:</td>
<td colspan="2" class="diff-lineno">Line 1:</td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (tests done by Peixiong Shi, DTU Nanolab)=</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (<ins style="font-weight: bold; text-decoration: none;">all </ins>tests done by Peixiong Shi, DTU Nanolab)=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td></tr>
</table>
Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=44578&oldid=prev
Bghe: /* With CF4 and H2 chemistry by Peixiong@nanolab */
2023-02-10T08:30:10Z
<p><span class="autocomment">With CF4 and H2 chemistry by Peixiong@nanolab</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:30, 10 February 2023</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=With CF4 and H2 chemistry by ''Peixiong<del style="font-weight: bold; text-decoration: none;">@nanolab</del>''=</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=With CF4 and H2 chemistry by ''Peixiong <ins style="font-weight: bold; text-decoration: none;">Shi, DTU Nanolab</ins>''=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
</table>
Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=44577&oldid=prev
Bghe: /* With C4F8 and H2 chemistry (tests done by Peixiong@nanolab) */
2023-02-10T08:29:20Z
<p><span class="autocomment">With C4F8 and H2 chemistry (tests done by Peixiong@nanolab)</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:29, 10 February 2023</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Line 1:</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (tests done by Peixiong<del style="font-weight: bold; text-decoration: none;">@nanolab</del>)=</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (tests done by Peixiong <ins style="font-weight: bold; text-decoration: none;">Shi, DTU Nanolab</ins>)=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td></tr>
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Bghe
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Bghe at 13:04, 18 August 2021
2021-08-18T13:04:31Z
<p></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 15:04, 18 August 2021</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Line 1:</td>
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<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@<del style="font-weight: bold; text-decoration: none;">danchip</del>.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.<del style="font-weight: bold; text-decoration: none;">danchip</del>.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@<ins style="font-weight: bold; text-decoration: none;">nanolab</ins>.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.<ins style="font-weight: bold; text-decoration: none;">nanolab</ins>.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (tests done by Peixiong@nanolab)=</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry (tests done by Peixiong@nanolab)=</div></td></tr>
</table>
Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=30722&oldid=prev
Bghe: /* With CF4 and H2 chemistry */
2019-01-28T08:45:07Z
<p><span class="autocomment">With CF4 and H2 chemistry</span></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
<col class="diff-marker" />
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:45, 28 January 2019</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l328">Line 328:</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>|}<p class=MsoNormal><span lang=DA>&nbsp;</span></p></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=With CF4 and H2 chemistry=</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=With CF4 and H2 chemistry <ins style="font-weight: bold; text-decoration: none;">by ''Peixiong@nanolab''</ins>=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
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Bghe
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong&diff=30721&oldid=prev
Bghe at 08:44, 28 January 2019
2019-01-28T08:44:39Z
<p></p>
<table style="background-color: #fff; color: #202122;" data-mw="interface">
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 10:44, 28 January 2019</td>
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_oxide/By_Peixiong click here]'''</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr>
<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry=</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>=With C4F8 and H2 chemistry <ins style="font-weight: bold; text-decoration: none;">(tests done by Peixiong@nanolab)</ins>=</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Part 1==</div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>{| class=MsoNormalTable border=0 cellspacing=0 cellpadding=0 width=855 style='width:641.0pt;border-collapse:collapse' style='height:36.0pt'</div></td></tr>
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Bghe