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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep - Revision history
2026-04-22T13:17:07Z
Revision history for this page on the wiki
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Jmli at 08:25, 4 September 2025
2025-09-04T08:25:30Z
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=44020&oldid=prev
Jmli at 14:05, 2 February 2023
2023-02-02T14:05:32Z
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=37519&oldid=prev
Jmli at 06:32, 5 October 2020
2020-10-05T06:32:42Z
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"></div></td></tr>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=29407&oldid=prev
Jmli at 11:41, 30 July 2018
2018-07-30T11:41:07Z
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<tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on <del style="font-weight: bold; text-decoration: none;">3</del>/<del style="font-weight: bold; text-decoration: none;">2</del>-<del style="font-weight: bold; text-decoration: none;">2016 </del>- ok/jmli --></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><!--Checked for updates on <ins style="font-weight: bold; text-decoration: none;">30</ins>/<ins style="font-weight: bold; text-decoration: none;">7</ins>-<ins style="font-weight: bold; text-decoration: none;">2018 </ins>- ok/jmli --></div></td></tr>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=21881&oldid=prev
Jmli at 14:24, 3 February 2016
2016-02-03T14:24:31Z
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=11691&oldid=prev
Jmli at 10:12, 22 October 2013
2013-10-22T10:12:29Z
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<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"></div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div><gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"></div></td></tr>
<tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>image:WF_2B1_feb06_2011-030.jpg|The 30 nm zep profile</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>image:WF_2B1_feb06_2011-030.jpg|The 30 nm zep profile</div></td></tr>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&diff=7756&oldid=prev
Jml: Created page with "<gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"> image:WF_2B1_feb06_2011-030.jpg|The 30 nm zep profile image:WF_2B1_feb06_2011-0..."
2012-12-10T19:48:35Z
<p>Created page with "<gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"> image:WF_2B1_feb06_2011-030.jpg|The 30 nm zep profile image:WF_2B1_feb06_2011-0..."</p>
<p><b>New page</b></p><div><gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"><br />
image:WF_2B1_feb06_2011-030.jpg|The 30 nm zep profile<br />
image:WF_2B1_feb06_2011-060.jpg|The 60 nm zep profile<br />
image:WF_2B1_feb06_2011-090.jpg|The 90 nm zep profile<br />
image:WF_2B1_feb06_2011-120.jpg|The 120 nm zep profile<br />
image:WF_2B1_feb06_2011-150.jpg|The 150 nm zep profile<br />
</gallery></div>
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