Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano35 - Revision history

Jmli at 06:36, 4 April 2025

2025-04-04T06:36:03Z

← Older revision		Revision as of 08:36, 4 April 2025
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!--Checked for updates on 24/8-2021. ok/ jmli-->		<!--Checked for updates on 24/8-2021. ok/ jmli-->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

	== The Sinano3.5 recipe ==		== The Sinano3.5 recipe ==

Jmli at 14:17, 24 August 2021

2021-08-24T14:17:38Z

← Older revision		Revision as of 16:17, 24 August 2021
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
			<!--Checked for updates on 24/8-2021. ok/ jmli-->

	== The Sinano3.5 recipe ==		== The Sinano3.5 recipe ==
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->

Jmli at 08:50, 10 July 2019

2019-07-10T08:50:16Z

← Older revision		Revision as of 10:50, 10 July 2019
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			<!--Checked for updates on 10/7-2019 - ok/jmli -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->

Jmli: /* The Sinano3.5 recipe */

2017-06-27T09:45:12Z

The Sinano3.5 recipe

← Older revision		Revision as of 11:45, 27 June 2017
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			<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	== The Sinano3.5 recipe ==		== The Sinano3.5 recipe ==

Jmli at 09:44, 27 June 2017

2017-06-27T09:44:52Z

← Older revision		Revision as of 11:44, 27 June 2017
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			<!-- Ok, jmli 20170627 -->
	== The Sinano3.5 recipe ==		== The Sinano3.5 recipe ==
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->

Jmli: /* The Sinano3.5 recipe */

2015-06-01T12:15:30Z

The Sinano3.5 recipe

← Older revision		Revision as of 14:15, 1 June 2015
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	== The Sinano3.5 recipe ==		== The Sinano3.5 recipe ==
			<!-- revised 1/6-2015 by jmli -->
	{\| border="2" cellpadding="2" cellspacing="1"		{\| border="2" cellpadding="2" cellspacing="1"
	\|+ '''Recipe Sinano3.5'''		\|+ '''Recipe Sinano3.5'''

Jml: /* The Sinano3.5 recipe */

2012-12-11T14:22:12Z

The Sinano3.5 recipe

← Older revision		Revision as of 16:22, 11 December 2012
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	\|-		\|-
	\| Mask		\| Mask
	\| 180 nm zep etched down to 43 nm		\| The [[Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep\|180 nm zep resist]] etched down to 43 nm
	\|-		\|-
	\|}		\|}

Jml: Created page with "== The Sinano3.5 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.5''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."

2012-12-11T12:41:55Z

Created page with "== The Sinano3.5 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.5''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, HB..."

New page

== The Sinano3.5 recipe ==

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Recipe Sinano3.5'''
|-
! rowspan="6" align="center"| Recipe
| Gas
| BCl<sub>3</sub> 5 sccm, HBR 15 sccm
|-
| Pressure
| 5 mTorr, Strike 3 secs @ 5 mTorr
|-
| Power
| 900 W CP, 60 W PP
|-
| Temperature
| 20 degs
|-
| Hardware
| 100 mm Spacers
|-
| Time
| 120 secs
|-
! rowspan="3" align="center"| Conditions
| Run ID
| 438, 440, ID
|-
| Conditioning
| Sequence: Oxygen clean, MU tests, processes, no oxygen between runs
|-
| Mask
| 180 nm zep etched down to 43 nm
|-
|}

<gallery caption="The results of the Sinano3.5 recipe" widths="250" heights="200" perrow="3">
image:WF2A-6-feb06-2011-030nm.jpg|The 30 nm trenches
image:WF2A-6-feb06-2011-060nm.jpg|The 60 nm trenches
image:WF2A-6-feb06-2011-090nm.jpg|The 90 nm trenches
image:WF2A-6-feb06-2011-120nm.jpg|The 120 nm trenches
image:WF2A-6-feb06-2011-150nm.jpg|The 150 nm trenches
BCl3 5 sccm, HBr 15 sccm, 5 mTorr, Strike 3 secs @ 5 mTorr, 900 W CP, 60 W PP, 20 degs, 120 secs
</gallery>

{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''30'''
| align="center" style="background:#f0f0f0;"|'''60'''
| align="center" style="background:#f0f0f0;"|'''90'''
| align="center" style="background:#f0f0f0;"|'''120'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''Average'''
| align="center" style="background:#f0f0f0;"|'''Std. dev.'''
|-
| Etch rate||nm/min||||90||109||112||114||117||108||11
|-
| Sidewall angle||degs||||83||81||82||81||80||81||1
|-
| CD loss||nm/edge||||27||47||62||80||97||63||27
|-
| CD loss foot||nm/edge||||27||47||62||80||97||63||27
|-
| Bowing||||||10||14||13||11||13||12||2
|-
| Bottom curvature||||||-24||-18||10||5||5||-4||15
|-
|
|}

Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano35 - Revision history

Jmli at 06:36, 4 April 2025

Jmli at 14:17, 24 August 2021

Jmli at 08:50, 10 July 2019

Jmli: /* The Sinano3.5 recipe */

Jmli at 09:44, 27 June 2017

Jmli: /* The Sinano3.5 recipe */

Jml: /* The Sinano3.5 recipe */

Jml: Created page with "== The Sinano3.5 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.5''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl3 5 sccm, HB..."

Jml: Created page with "== The Sinano3.5 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.5''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."