Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan37 - Revision history

Jmli at 06:37, 4 April 2025

2025-04-04T06:37:05Z

← Older revision		Revision as of 08:37, 4 April 2025
Line 3:		Line 3:
	<!--Checked for updates on 10/7-2019 - ok/jmli -->		<!--Checked for updates on 10/7-2019 - ok/jmli -->
	<!--Checked for updates on 24/8-2021. ok/ jmli-->		<!--Checked for updates on 24/8-2021. ok/ jmli-->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->
	<!--Checked for updates on 4/4-2025 - ok/jmli -->		<!--Checked for updates on 4/4-2025 - ok/jmli -->

Jmli at 06:30, 4 April 2025

2025-04-04T06:30:20Z

← Older revision		Revision as of 08:30, 4 April 2025
Line 3:		Line 3:
	<!--Checked for updates on 10/7-2019 - ok/jmli -->		<!--Checked for updates on 10/7-2019 - ok/jmli -->
	<!--Checked for updates on 24/8-2021. ok/ jmli-->		<!--Checked for updates on 24/8-2021. ok/ jmli-->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

	{\| {{table}}		{\| {{table}}

Jmli at 14:15, 24 August 2021

2021-08-24T14:15:18Z

← Older revision		Revision as of 16:15, 24 August 2021
Line 2:		Line 2:
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->
	<!--Checked for updates on 10/7-2019 - ok/jmli -->		<!--Checked for updates on 10/7-2019 - ok/jmli -->
			<!--Checked for updates on 24/8-2021. ok/ jmli-->

	{\| {{table}}		{\| {{table}}
	\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''		\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''

Jmli at 08:48, 10 July 2019

2019-07-10T08:48:20Z

← Older revision		Revision as of 10:48, 10 July 2019
Line 1:		Line 1:
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->
			<!--Checked for updates on 10/7-2019 - ok/jmli -->
	{\| {{table}}		{\| {{table}}
	\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''		\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''

Jmli at 09:42, 27 June 2017

2017-06-27T09:42:04Z

← Older revision		Revision as of 11:42, 27 June 2017
Line 1:		Line 1:
			<!-- Ok, jmli 20170627 -->
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->
	{\| {{table}}		{\| {{table}}

Jmli at 12:13, 1 June 2015

2015-06-01T12:13:11Z

← Older revision		Revision as of 14:13, 1 June 2015
Line 1:		Line 1:

			<!-- revised 1/6-2015 by jmli -->
	{\| {{table}}		{\| {{table}}
	\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''		\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''

Jml: Created page with "{| {{table}} | align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' | align="center" style="background:#f0f0f0;"|'''''' | align="center" style="backgroun..."

2012-12-11T12:44:16Z

Created page with "{| {{table}} | align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' | align="center" style="background:#f0f0f0;"|'''''' | align="center" style="backgroun..."

New page

{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''30'''
| align="center" style="background:#f0f0f0;"|'''60'''
| align="center" style="background:#f0f0f0;"|'''90'''
| align="center" style="background:#f0f0f0;"|'''120'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''Average'''
| align="center" style="background:#f0f0f0;"|'''Std. dev.'''
|-
| Etch rate||nm/min||||59||67||67||67||68||66||4
|-
| Sidewall angle||degs||||84||86||84||86||86||85||1
|-
| CD loss||nm/edge||||-16||-31||-29||-36||-33||-29||8
|-
| CD loss foot||nm/edge||||-16||-23||-14||-18||-12||-17||4
|-
| Bowing||||||7||23||15||10||9||13||7
|-
| Bottom curvature||||||-27||-8||11||9||4||-2||15
|-
|
|}