Specific Process Knowledge/Etch/ICP Metal Etcher/Titanium - Revision history

Jmli at 08:25, 4 September 2025

2025-09-04T08:25:44Z

← Older revision		Revision as of 10:25, 4 September 2025
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			<!--Checked for updates on 4/9-2025 - ok/jmli -->

	=== Titanium etch ===		=== Titanium etch ===

Jmli at 14:05, 2 February 2023

2023-02-02T14:05:47Z

← Older revision		Revision as of 16:05, 2 February 2023
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	=== Titanium etch ===		=== Titanium etch ===
			{{Template:Author-jmli1}}
			<!--Checked for updates on 2/02-2023 - ok/jmli -->

Jmli at 07:01, 5 October 2020

2020-10-05T07:01:01Z

← Older revision		Revision as of 09:01, 5 October 2020
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''
			<!--Checked for updates on 5/10-2020 - ok/jmli -->
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->

Jmli at 11:44, 30 July 2018

2018-07-30T11:44:48Z

← Older revision		Revision as of 13:44, 30 July 2018
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''

			<!--Checked for updates on 30/7-2018 - ok/jmli -->

	=== Titanium etch ===		=== Titanium etch ===

Bghe: /* Titanium etch */

2016-02-10T13:27:46Z

Titanium etch

← Older revision		Revision as of 15:27, 10 February 2016
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	\| 0.83		\| 0.83
	\|-		\|-
	~~!Etch rate in TiO2 (nm/min)~~
	\|
	\|
	\|}		\|}

Bghe: /* TiO2 etch, tested by Evgeniy Shkondin */

2016-02-10T13:27:31Z

TiO2 etch, tested by Evgeniy Shkondin

← Older revision		Revision as of 15:27, 10 February 2016
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	~~===TiO2 etch, tested by Evgeniy Shkondin===~~
	~~Recipe used: Ti etch~~
	~~[[File:TiO2_etch_Evgeniy.jpg\|400px]]~~

Bghe at 13:20, 10 February 2016

2016-02-10T13:20:19Z

← Older revision		Revision as of 15:20, 10 February 2016
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			===TiO2 etch, tested by Evgeniy Shkondin===
			Recipe used: Ti etch
			[[File:TiO2_etch_Evgeniy.jpg\|400px]]

Bghe: /* Titanium etch */

2015-12-11T09:31:43Z

Titanium etch

← Older revision		Revision as of 11:31, 11 December 2015
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	\| 0.83		\| 0.83
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			!Etch rate in TiO2 (nm/min)
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			\|
	\|}		\|}

Jmli at 14:33, 3 October 2013

2013-10-03T14:33:35Z

← Older revision		Revision as of 16:33, 3 October 2013
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			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Titanium click here]'''


	=== Titanium etch ===		=== Titanium etch ===

Jml: Created page with "=== Titanium etch === {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Ti etch''' |- ! Parameter ! width="200" | Process 1 ! width="200" | Proc..."

2012-12-10T19:35:15Z

Created page with "=== Titanium etch === {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Ti etch''' |- ! Parameter ! width="200" | Process 1 ! width="200" | Proc..."

New page

=== Titanium etch ===

{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Ti etch'''
|-
! Parameter
! width="200" | Process 1
! width="200" | Process 2
|-
! Cl<sub>2</sub> (sccm)
| 30
| 30
|-
! HBr (sccm)
| -
| -
|-
! Pressure (mTorr)
| 3, Strike 3 secs @ 15 mTorr???
| 3
|-
! Coil power (W)
| 800
| 900
|-
! Platen power (W)
| 100
| 50
|-
! Temperature (<sup>o</sup>C)
| 20
| 20
|-
! Spacers (mm)
| 30
| 30
|-
! Etch rate (nm/min)
| 152
| 64
|-
!AZ resist selectivity
| 0.67
| 0.83
|-
|}