Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch - Revision history

Mmat at 14:19, 16 June 2025

2025-06-16T14:19:41Z

← Older revision		Revision as of 16:19, 16 June 2025
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	==Barc Etch==		==Barc Etch==

2023-02-06T14:54:48Z

← Older revision		Revision as of 16:54, 6 February 2023
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	==Barc Etch==		==Barc Etch==

2022-08-29T13:57:34Z

← Older revision		Revision as of 15:57, 29 August 2022
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	==Barc Etch==		==Barc Etch==

	Etching barc with a ~~dedicated~~ recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and O2 descum process for comparison.		Etching barc with a CF4 recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and O2 descum process for comparison.

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2020-01-20T14:49:15Z

← Older revision		Revision as of 16:49, 20 January 2020
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Barc_Etch click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/Barc_Etch click here]'''

	==Barc Etch==		==Barc Etch==

2017-05-15T11:12:50Z

Barc Etch

2015-05-22T11:55:49Z

Barc Etch

← Older revision		Revision as of 13:55, 22 May 2015
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	==Barc Etch==		==Barc Etch==

	Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and o2 descum process for comparison.		Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and O2 descum process for comparison.

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2015-05-22T11:55:37Z

Barc Etch

2015-05-22T11:12:53Z

Barc Etch

← Older revision		Revision as of 13:12, 22 May 2015
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	==Barc Etch==		==Barc Etch==

	Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.		Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need. Here is an example of a barc etch I have started testing. I have also tried with and o2 descum process for comparison.

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2015-05-22T11:11:23Z

Barc Etch

← Older revision		Revision as of 13:11, 22 May 2015
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	! Parameter		! Parameter
	! Barc etch with CF4		! Barc etch with CF4
			! Barc etch with O2
	\|-		\|-
	\|Coil power\|\|800W		\|Coil power\|\|800W\|\|150w
	\|-		\|-
	\|Platen power\|\|100W		\|Platen power\|\|100W\|\|15W
	\|-		\|-
	\|Pressure\|\|3 mTorr		\|Pressure\|\|3 mTorr\|\|5mTorr
	\|-		\|-
	\|Flow rate CF4\|\|4 sccm		\|Flow rate CF4\|\|4 sccm\|\|
	\|-		\|-
	\|Flow rate H2\|\|20sccm		\|Flow rate H2\|\|20sccm\|\|
			\|-
			\|Flow rate O2\|\|\|\|20sccm
	\|-		\|-
	\|}		\|}
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	{\| border="1" cellspacing="1" cellpadding="2" align="left"		{\| border="1" cellspacing="1" cellpadding="2" align="left"
	! Parameter		! Parameter
	! Results		! Results with 'Barc etch with CF'
			! Results with 'Barc etch with O2'
	\|-		\|-
	\|Etch rate in barc\|\|'''52 nm in 30s''' ''[bghe 20150519]''		\|Etch rate in barc\|\|'''52 nm in 30s''' ''[bghe 20150519]''\|\|'''62 nm in 50s''' ''[bghe 20150521]''

	\|-		\|-
	\|Etch rate in KRF resist\|\|'''27 nm in 30s''' ''[bghe 20150519]''		\|Etch rate in KRF resist\|\|'''27 nm in 30s''' ''[bghe 20150519]''\|\|'''73 nm in 50s''' ''[bghe 20150521]''
	\|-		\|-
	\|Selectivity KRF:Barc\|\|'''1:2'''		\|Selectivity KRF:Barc\|\|'''1:2''' \|\|'''1:0.8'''
	\|-		\|-
	\|Etch 65nm barc\|\|'''Use 40-45s'''		\|Etch 65nm barc\|\|'''Use 40-45s'''\|\|'''Use 55-60s'''
	\|-		\|-
	\|}		\|}
	<br/>		<br/>

2015-05-19T11:36:36Z

Barc Etch

← Older revision		Revision as of 13:36, 19 May 2015
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	! Results		! Results
	\|-		\|-
	\|Etch rate in barc\|\|'''~~52nm~~ in 30s''' ''[bghe 20150519]''		\|Etch rate in barc\|\|'''52 nm in 30s''' ''[bghe 20150519]''
	\|-		\|-
	\|Etch rate in KRF resist\|\|'''27 nm in 30s''' ''[bghe 20150519]''		\|Etch rate in KRF resist\|\|'''27 nm in 30s''' ''[bghe 20150519]''