Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings - Revision history

Bghe at 09:33, 4 September 2025

2025-09-04T09:33:38Z

← Older revision		Revision as of 11:33, 4 September 2025
Line 5:		Line 5:
	\|-		\|-

	\|colspan="3" style="text-align: center;" style="background:Black; color:White;" \| '''SIMS ~~setting~~ for different materials'''		\|colspan="3" style="text-align: center;" style="background:Black; color:White;" \| '''SIMS settings for different materials'''

	\|-		\|-

Bghe at 14:50, 6 February 2023

2023-02-06T14:50:17Z

← Older revision		Revision as of 16:50, 6 February 2023
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''

	''~~Made by bghe@nanolab in~~ 2015''		<br> {{CC-bghe1}} - ''2015''<br>
	{\| border="1" style="text-align: center; width: 320px; height: 200px;"		{\| border="1" style="text-align: center; width: 320px; height: 200px;"
	\|-		\|-

Bghe at 13:46, 18 August 2021

2021-08-18T13:46:06Z

← Older revision		Revision as of 15:46, 18 August 2021
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''

	''Made by bghe@nanolab in 2015''		''Made by bghe@nanolab in 2015''

Bghe at 06:28, 26 June 2019

2019-06-26T06:28:58Z

← Older revision		Revision as of 08:28, 26 June 2019
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''

	''Made by ~~bge~~@~~danchip~~ in 2015''		''Made by bghe@nanolab in 2015''
	{\| border="1" style="text-align: center; width: 320px; height: 200px;"		{\| border="1" style="text-align: center; width: 320px; height: 200px;"
	\|-		\|-

Bghe at 06:29, 29 June 2017

2017-06-29T06:29:41Z

← Older revision		Revision as of 08:29, 29 June 2017
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''

			''Made by bge@danchip in 2015''
	{\| border="1" style="text-align: center; width: 320px; height: 200px;"		{\| border="1" style="text-align: center; width: 320px; height: 200px;"
	\|-		\|-

Bghe at 09:09, 20 April 2015

2015-04-20T09:09:55Z

← Older revision		Revision as of 11:09, 20 April 2015
Line 1:		Line 1:
			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]'''

	{\| border="1" style="text-align: center; width: 320px; height: 200px;"		{\| border="1" style="text-align: center; width: 320px; height: 200px;"
	\|-		\|-

Bghe at 09:09, 20 April 2015

2015-04-20T09:09:05Z

← Older revision		Revision as of 11:09, 20 April 2015
Line 2:		Line 2:
	\|-		\|-

	\|colspan="3" style="text-align: center;" style="background: ~~#efefef~~;" \| '''SIMS setting for different materials'''		\|colspan="3" style="text-align: center;" style="background:Black; color:White;" \| '''SIMS setting for different materials'''

	\|-		\|-

Bghe at 09:06, 20 April 2015

2015-04-20T09:06:50Z

← Older revision		Revision as of 11:06, 20 April 2015
Line 2:		Line 2:
	\|-		\|-

	\|colspan="3" style="text-align: center;" style="background: #efefef;" \| '''~~IBSD~~ setting for different materials'''		\|colspan="3" style="text-align: center;" style="background: #efefef;" \| '''SIMS setting for different materials'''

	\|-		\|-

Bghe: Created page with "{| border="1" style="text-align: center; width: 320px; height: 200px;" |- |colspan="3" style="text-align: center;" style="background: #efefef;" | '''IBSD setting for differen..."

2014-12-12T10:05:00Z

Created page with "{| border="1" style="text-align: center; width: 320px; height: 200px;" |- |colspan="3" style="text-align: center;" style="background: #efefef;" | '''IBSD setting for differen..."

New page

{| border="1" style="text-align: center; width: 320px; height: 200px;"
|-

|colspan="3" style="text-align: center;" style="background: #efefef;" | '''IBSD setting for different materials'''

|-
!scope="row" | 
!|Lower plate
!|Upper plate
|-
!Ti
| -1
|
|-
!Si
| -1
|(2)
|-
!Al
| -1
|1
|-
!Cr
| -1
|
|-
!Ni
| -6
|
|}