Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv - Revision history

Jmli at 06:42, 4 April 2025

2025-04-04T06:42:33Z

← Older revision		Revision as of 08:42, 4 April 2025
Line 1:		Line 1:
	<!--Page reviewed by jmli 9/8-2022 -->		<!--Page reviewed by jmli 9/8-2022 -->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

2022-08-09T09:12:37Z

← Older revision		Revision as of 11:12, 9 August 2022
Line 1:		Line 1:
			<!--Page reviewed by jmli 9/8-2022 -->


	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

2019-11-25T20:23:15Z

← Older revision		Revision as of 22:23, 25 November 2019
Line 23:		Line 23:
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean + 45 sec barc etch		\| 10 minute TDESC clean + 45 sec barc etch
	\| ~~danchip~~/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| nanolab/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	! Old showerhead		! Old showerhead
Line 41:		Line 41:
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean + 45 sec barc etch		\| 10 minute TDESC clean + 45 sec barc etch
	\| ~~danchip~~/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| nanolab/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	! New showerhead		! New showerhead

2017-01-17T12:26:55Z

← Older revision		Revision as of 14:26, 17 January 2017
Line 1:		Line 1:

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

2014-12-11T12:55:10Z

← Older revision		Revision as of 14:55, 11 December 2014
Line 23:		Line 23:
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean + 45 sec barc etch		\| 10 minute TDESC clean + 45 sec barc etch
	\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| danchip/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	! Old showerhead		! Old showerhead
Line 41:		Line 41:
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean + 45 sec barc etch		\| 10 minute TDESC clean + 45 sec barc etch
	\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| danchip/jml/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	! New showerhead		! New showerhead

2014-12-11T12:33:32Z

← Older revision		Revision as of 14:33, 11 December 2014
Line 43:		Line 43:
	\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	\|		! New showerhead
	\|		\|

	\|-		\|-
	\|}		\|}

2014-12-11T12:32:11Z

← Older revision		Revision as of 14:32, 11 December 2014
Line 25:		Line 25:
	\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes		\| danchip/showerhead/polySi etch DUV mask, 20 cycles or 3:02 minutes
	\| S004675		\| S004675
	\|		! Old showerhead
	\|		\|
	[[file:S00459305.jpg\|150px\|frameless ]]		[[file:S00459305.jpg\|150px\|frameless ]]
Line 35:		Line 35:
	[[file:s004593-03.jpg\|150px\|frameless ]]		[[file:s004593-03.jpg\|150px\|frameless ]]
	\|-		\|-
	\| 20/11-2014		\| 1/12-2014
	\| 6" Wafer with 210 nm oxide and 1800 nm polysilicon		\| 1/4 6" Wafer with 210 nm oxide and 1800 nm polysilicon crystalbonded on carrier
	\| standard stepper mask (50 nm barc + 320 nm krf)		\| standard stepper mask (50 nm barc + 320 nm krf)
	\| Si / 50+ %		\| Si / 50+ %
Line 45:		Line 45:
	\|		\|
	\|		\|
	~~[[file:S00459305.jpg\|150px\|frameless ]]~~
	~~[[file:S00459306.jpg\|150px\|frameless ]]~~
	~~[[file:S00459307.jpg\|150px\|frameless ]]~~
	~~[[file:S00459308.jpg\|150px\|frameless ]]~~
	~~[[file:s004593-01.jpg\|150px\|frameless ]]~~
	~~[[file:s004593-02.jpg\|150px\|frameless ]]~~
	~~[[file:s004593-03.jpg\|150px\|frameless ]]~~

	\|-		\|-
	\|}		\|}

2014-12-11T12:19:02Z

@@ Line 34: / Line 34: @@
 [[file:s004593-02.jpg|150px|frameless ]]
 [[file:s004593-03.jpg|150px|frameless ]]
 |-
 |}

2014-12-11T11:25:06Z

2014-12-11T10:50:22Z