Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/SOI/SOI - Revision history

Jmli at 08:32, 4 September 2025

2025-09-04T08:32:44Z

← Older revision		Revision as of 10:32, 4 September 2025
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	<!-- Page reviewed 9/8-2022 jmli -->		<!-- Page reviewed 9/8-2022 jmli -->
	{{Author-jmli1}}		{{Author-jmli1}}
			<!--Checked for updates on 4/9-2025 - ok/jmli -->

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

Jmli at 10:26, 28 April 2023

2023-04-28T10:26:37Z

← Older revision		Revision as of 12:26, 28 April 2023
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Page reviewed 9/8-2022 jmli -->		<!-- Page reviewed 9/8-2022 jmli -->
			{{Author-jmli1}}

Jmli at 09:19, 9 August 2022

2022-08-09T09:19:07Z

← Older revision		Revision as of 11:19, 9 August 2022
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
			<!-- Page reviewed 9/8-2022 jmli -->




	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 20:27, 25 November 2019

2019-11-25T20:27:45Z

← Older revision		Revision as of 22:27, 25 November 2019
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	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean		\| 10 minute TDESC clean
	\| ~~danchip~~/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins		\| nanolab/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins
	\| S004745		\| S004745
	! New showerhead		! New showerhead

Jmli at 09:36, 27 June 2017

2017-06-27T09:36:01Z

← Older revision		Revision as of 11:36, 27 June 2017
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			<!-- Ok, jmli 20170627 -->
	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 09:33, 27 June 2017

2017-06-27T09:33:43Z

← Older revision		Revision as of 11:33, 27 June 2017
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	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 14:18, 16 January 2015

2015-01-16T14:18:32Z

← Older revision		Revision as of 16:18, 16 January 2015
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	\| 10 minute TDESC clean		\| 10 minute TDESC clean
	\| danchip/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins		\| danchip/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins
	\| ~~S00474~~		\| S004745
	! New showerhead		! New showerhead
	\|		\|

Jmli: Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informat..."

2015-01-16T14:13:34Z

Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informat..."

New page

{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|+ '''Process runs'''
|-
! rowspan="2" width="40"| Date
! colspan="4" width="120"| Substrate Information
! colspan="4" | Process Information
! rowspan="2" width="500" |SEM Images
|-
! width="30" | Wafer info
! width="40" | Mask
! width="40" | Material/ Exposed area
! width="40" | Tool / Operator
! width="40" | Conditioning
! width="40" | Recipe
! width="40" | Wafer ID
! width="40" | Comments
|-
| 15/12-2014
| 4" Wafer with travka65 mask
| AZ standard
| Si / 65 %
| Pegasus/jmli
| 10 minute TDESC clean
| danchip/jml/showerhead/SOI/SOI, 96 cyc or 8:00 mins
| S00474
! New showerhead
|
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|-
|}