Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD-4 - Revision history

Jmli at 08:32, 4 September 2025

2025-09-04T08:32:58Z

← Older revision		Revision as of 10:32, 4 September 2025
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	<!--Page reviewed by jmli 28/4-2023 -->		<!--Page reviewed by jmli 28/4-2023 -->
	{{Author-jmli1}}		{{Author-jmli1}}
			<!--Checked for updates on 4/9-2025 - ok/jmli -->

Jmli at 10:27, 28 April 2023

2023-04-28T10:27:49Z

← Older revision		Revision as of 12:27, 28 April 2023
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Page reviewed 9/8-2022 jmli -->		<!-- Page reviewed 9/8-2022 jmli -->
			<!--Page reviewed by jmli 28/4-2023 -->
			{{Author-jmli1}}

Jmli at 09:18, 9 August 2022

2022-08-09T09:18:46Z

← Older revision		Revision as of 11:18, 9 August 2022
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
			<!-- Page reviewed 9/8-2022 jmli -->




	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

Jmli at 20:28, 25 November 2019

2019-11-25T20:28:31Z

← Older revision		Revision as of 22:28, 25 November 2019
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	\| Pegasus/jmli		\| Pegasus/jmli
	\| s004781		\| s004781
	\| ~~danchip~~/jml/showerhead/prD/PrD-4, 150 cyc or 8:00 mins		\| nanolab/jml/showerhead/prD/PrD-4, 150 cyc or 8:00 mins
	\| S004782		\| S004782
	! New showerhead		! New showerhead

Jmli at 09:35, 27 June 2017

2017-06-27T09:35:38Z

← Older revision		Revision as of 11:35, 27 June 2017
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	<-- Ok, jmli 20170627 /-->		<!-- Ok, jmli 20170627 -->

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Jmli at 09:34, 27 June 2017

2017-06-27T09:34:55Z

← Older revision		Revision as of 11:34, 27 June 2017
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			<-- Ok, jmli 20170627 /-->

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

Jmli: Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informat..."

2015-01-19T15:11:19Z

Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informat..."

New page

{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|+ '''Process runs'''
|-
! rowspan="2" width="40"| Date
! colspan="4" width="120"| Substrate Information
! colspan="4" | Process Information
! rowspan="2" width="500" |SEM Images
|-
! width="30" | Wafer info
! width="40" | Mask
! width="40" | Material/ Exposed area
! width="40" | Tool / Operator
! width="40" | Conditioning
! width="40" | Recipe
! width="40" | Wafer ID
! width="40" | Comments
|-
| 8/1-2015
| 4" Wafer with travkaXX mask
| AZ standard
| Si / XX %
| Pegasus/jmli
| s004781
| danchip/jml/showerhead/prD/PrD-4, 150 cyc or 8:00 mins
| S004782
! New showerhead
|
[[file:S004782-04.jpg|150px|frameless ]]
[[file:S004782-05.jpg|150px|frameless ]]
[[file:S004782-03.jpg|150px|frameless ]]
[[file:S004782-02.jpg|150px|frameless ]]
[[file:S004782-01.jpg|150px|frameless ]]
|-
|}