Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA - Revision history

Jmli at 08:32, 4 September 2025

2025-09-04T08:32:29Z

← Older revision		Revision as of 10:32, 4 September 2025
Line 1:		Line 1:
	<!--Checked for updates on 11/2-2019 - ok/jmli -->		<!--Checked for updates on 11/2-2019 - ok/jmli -->
	<!--Page reviewed by jmli 9/8-2022 -->		<!--Page reviewed by jmli 9/8-2022 -->
			<!--Checked for updates on 4/9-2025 - ok/jmli -->
	{{Author-jmli1}}		{{Author-jmli1}}

Jmli at 10:23, 28 April 2023

2023-04-28T10:23:03Z

← Older revision		Revision as of 12:23, 28 April 2023
Line 1:		Line 1:
	<!--Checked for updates on 11/2-2019 - ok/jmli -->		<!--Checked for updates on 11/2-2019 - ok/jmli -->
	<!--Page reviewed by jmli 9/8-2022 -->		<!--Page reviewed by jmli 9/8-2022 -->
			{{Author-jmli1}}

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 09:13, 9 August 2022

2022-08-09T09:13:37Z

← Older revision		Revision as of 11:13, 9 August 2022
Line 1:		Line 1:
	<!--Checked for updates on 11/2-2019 - ok/jmli -->		<!--Checked for updates on 11/2-2019 - ok/jmli -->
			<!--Page reviewed by jmli 9/8-2022 -->

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

Jmli at 20:20, 25 November 2019

2019-11-25T20:20:11Z

← Older revision		Revision as of 22:20, 25 November 2019
Line 19:		Line 19:
	\|-		\|-
	\| 18/8-2014		\| 18/8-2014
	\| 4" ~~Danchip~~ QC Wafer		\| 4" Nanolab QC Wafer
	\| 1.5 µm AZ resist, daq2 mask		\| 1.5 µm AZ resist, daq2 mask
	\| Si / 10 %		\| Si / 10 %
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean, 10 minute PR strip post process		\| 10 minute TDESC clean, 10 minute PR strip post process
	\| ~~danchip~~/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes		\| nanolab/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes
	\| S004257		\| S004257
	! OLD showerhead		! OLD showerhead
Line 37:		Line 37:
	\|-		\|-
	\| 20/11-2014		\| 20/11-2014
	\| 4" ~~Danchip~~ QC Wafer		\| 4" Nanolab QC Wafer
	\| 1.5 µm AZ resist, daq2 mask		\| 1.5 µm AZ resist, daq2 mask
	\| Si / 10 %		\| Si / 10 %
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean, 10 minute PR strip post process		\| 10 minute TDESC clean, 10 minute PR strip post process
	\| ~~danchip~~/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes		\| Nanolab/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes
	\| S004580		\| S004580
	! OLD showerhead		! OLD showerhead
Line 52:		Line 52:
	\|-		\|-
	\| 1/12-2014		\| 1/12-2014
	\| 4" ~~Danchip~~ QC Wafer		\| 4" Nanolab QC Wafer
	\| 1.5 µm AZ resist, daq2 mask		\| 1.5 µm AZ resist, daq2 mask
	\| Si / 10 %		\| Si / 10 %
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean, 10 minute PR strip post process		\| 10 minute TDESC clean, 10 minute PR strip post process
	\| ~~danchip~~/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes		\| Nanolab/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes
	\| S004671		\| S004671
	! New showerhead		! New showerhead
Line 68:		Line 68:
	\|-		\|-
	\| 15/12-2014		\| 15/12-2014
	\| 4" ~~Danchip~~ QC Wafer		\| 4" Nanolab QC Wafer
	\| 1.5 µm AZ resist, daq2 mask		\| 1.5 µm AZ resist, daq2 mask
	\| Si / 10 %		\| Si / 10 %
	\| Pegasus/jmli		\| Pegasus/jmli
	\| 10 minute TDESC clean, 10 minute PR strip post process		\| 10 minute TDESC clean, 10 minute PR strip post process
	\| ~~danchip~~/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes		\| Nanolab/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes
	\| S004746		\| S004746
	! New showerhead		! New showerhead

Jmli at 10:37, 11 February 2019

2019-02-11T10:37:07Z

← Older revision		Revision as of 12:37, 11 February 2019
Line 1:		Line 1:
			<!--Checked for updates on 11/2-2019 - ok/jmli -->

	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"

Jmli at 12:27, 17 January 2017

2017-01-17T12:27:13Z

← Older revision		Revision as of 14:27, 17 January 2017
Line 1:		Line 1:


	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 14:49, 17 December 2014

2014-12-17T14:49:15Z

@@ Line 35: / Line 35: @@
 [[file:S004257-13.jpg|150px|frameless ]]
 [[file:S004257-14.jpg|150px|frameless ]]
 |-
 | 1/12-2014

Jmli at 14:46, 17 December 2014

2014-12-17T14:46:40Z

← Older revision		Revision as of 16:46, 17 December 2014
Line 46:		Line 46:
	! New showerhead		! New showerhead
	\|		\|
	~~No SEM images due to bad cleaving~~		[[file:S004671-04.jpg\|150px\|frameless ]]
			[[file:S004671-05.jpg\|150px\|frameless ]]
			[[file:S004671-06.jpg\|150px\|frameless ]]
			[[file:S004671-07.jpg\|150px\|frameless ]]

	\|-		\|-

Jmli at 13:55, 16 December 2014

2014-12-16T13:55:59Z

@@ Line 1: / Line 1: @@
@@ Line 106: / Line 59: @@
 ! New showerhead
+|
-[[file:S004746-01.jpg|250px|frameless ]]
+[[file:S004746-01.jpg|150px|frameless ]]
-[[file:S004746-02.jpg|250px|frameless ]]
+[[file:S004746-02.jpg|150px|frameless ]]
-[[file:S004746-03.jpg|250px|frameless ]]
+[[file:S004746-03.jpg|150px|frameless ]]
-[[file:S004746-04.jpg|250px|frameless ]]
+[[file:S004746-04.jpg|150px|frameless ]]
-[[file:S004746-05.jpg|250px|frameless ]]
+[[file:S004746-05.jpg|150px|frameless ]]
-[[file:S004746-06.jpg|250px|frameless ]]
+[[file:S004746-06.jpg|150px|frameless ]]
-[[file:S004746-07.jpg|250px|frameless ]]
+[[file:S004746-07.jpg|150px|frameless ]]
 |-
 |}

Jmli at 13:54, 16 December 2014

2014-12-16T13:54:59Z

@@ Line 16: / Line 16: @@
 ! width="40" | Wafer ID
 ! width="40" | Comments
 |-
 | 1/12-2014