Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 - Revision history

Jmli at 08:26, 4 September 2025

2025-09-04T08:26:29Z

← Older revision		Revision as of 10:26, 4 September 2025
Line 2:		Line 2:
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
	<!--Checked for updates on 5/10-2020 - ok/jmli -->		<!--Checked for updates on 5/10-2020 - ok/jmli -->
			<!--Checked for updates on 4/9-2025 - ok/jmli -->

Jmli: /* The nano1.4 recipe */

2023-02-02T14:17:08Z

The nano1.4 recipe

← Older revision		Revision as of 16:17, 2 February 2023
Line 6:		Line 6:

	== The nano1.4 recipe ==		== The nano1.4 recipe ==
			{{Template:Author-jmli1}}
			<!--Checked for updates on 2/02-2023 - ok/jmli -->

	{\| border="2" cellpadding="2" cellspacing="1"		{\| border="2" cellpadding="2" cellspacing="1"

Jmli at 06:28, 5 October 2020

2020-10-05T06:28:58Z

← Older revision		Revision as of 08:28, 5 October 2020
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
			<!--Checked for updates on 5/10-2020 - ok/jmli -->



	== The nano1.4 recipe ==		== The nano1.4 recipe ==

Jmli at 11:42, 30 July 2018

2018-07-30T11:42:36Z

← Older revision		Revision as of 13:42, 30 July 2018
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''
	<!--Checked for updates on 3/2-~~2016~~ - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->


	== The nano1.4 recipe ==		== The nano1.4 recipe ==

Jmli at 14:25, 3 February 2016

2016-02-03T14:25:48Z

← Older revision		Revision as of 16:25, 3 February 2016
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''
			<!--Checked for updates on 3/2-2016 - ok/jmli -->

Jmli at 10:34, 22 October 2013

2013-10-22T10:34:44Z

← Older revision		Revision as of 12:34, 22 October 2013
Line 1:		Line 1:
			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 click here]'''


	== The nano1.4 recipe ==		== The nano1.4 recipe ==

Jml: /* The nano1.4 recipe */

2011-05-10T12:48:22Z

The nano1.4 recipe

← Older revision		Revision as of 14:48, 10 May 2011
Line 44:		Line 44:
	C4F8 75 sccm, SF6 38 sccm, 4 mTorr, Strike 3 secs @ 15 mTorr, 800 W CP, 50 W PP, -20 degs, 120 secs		C4F8 75 sccm, SF6 38 sccm, 4 mTorr, Strike 3 secs @ 15 mTorr, 800 W CP, 50 W PP, -20 degs, 120 secs
	</gallery>		</gallery>


			{\| {{table}}
			\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''
			\| align="center" style="background:#f0f0f0;"\|''''''
			\| align="center" style="background:#f0f0f0;"\|'''30'''
			\| align="center" style="background:#f0f0f0;"\|'''60'''
			\| align="center" style="background:#f0f0f0;"\|'''90'''
			\| align="center" style="background:#f0f0f0;"\|'''120'''
			\| align="center" style="background:#f0f0f0;"\|'''150'''
			\| align="center" style="background:#f0f0f0;"\|'''Average'''
			\| align="center" style="background:#f0f0f0;"\|'''Std. dev.'''
			\|-
			\| Etch rates\|\|nm/min\|\|168\|\|182\|\|185\|\|189\|\|191\|\|183\|\|9
			\|-
			\| Sidewall angle\|\|degs\|\|91\|\|91\|\|91\|\|91\|\|90\|\|91\|\|0
			\|-
			\| CD loss\|\|nm/edge\|\|7\|\|-3\|\|-3\|\|-25\|\|-26\|\|-10\|\|15
			\|-
			\| CD loss foot\|\|nm/edge\|\|12\|\|9\|\|10\|\|-11\|\|1\|\|4\|\|9
			\|-
			\| Bowing\|\|\|\|9\|\|6\|\|4\|\|5\|\|7\|\|6\|\|2
			\|-
			\| Bottom curvature\|\|\|\|-47\|\|-34\|\|-34\|\|-26\|\|-19\|\|-32\|\|10
			\|-
			\| zep\|\|nm/min\|\|\|\|\|\|\|\|\|\|\|\|67\|\|
			\|-
			\|
			\|}

Jml: /* The nano1.4 recipe */

2011-05-09T07:36:38Z

The nano1.4 recipe

← Older revision		Revision as of 09:36, 9 May 2011
Line 31:		Line 31:
	\|-		\|-
	\| Mask		\| Mask
	\| nm zep etched down to ~~6dgh4~~ nm		\| 211 nm zep etched down to 77 nm
	\|-		\|-
	\|}		\|}

Jml: /* The nano1.4 recipe */

2011-05-02T06:35:33Z

The nano1.4 recipe

← Older revision		Revision as of 08:35, 2 May 2011
Line 36:		Line 36:


	<gallery caption="The results of the nano1.21 recipe" widths="250" heights="200" perrow="3">		<gallery caption="The results of the nano1.4 recipe" widths="250" heights="200" perrow="3">
	image:WF_2E07a_mar23_2011-030.jpg\|The 30 nm trenches		image:WF_2E07a_mar23_2011-030.jpg\|The 30 nm trenches
	image:WF_2E07a_mar23_2011-060.jpg\|The 60 nm trenches		image:WF_2E07a_mar23_2011-060.jpg\|The 60 nm trenches

Jml: New page: == The nano1.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.4''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF_...

2011-05-02T06:31:35Z

New page: == The nano1.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.4''' |- ! rowspan="6" align="center"| Recipe | Gas | C4F8 75 sccm, SF...

New page

== The nano1.4 recipe ==

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Recipe nano1.4'''
|-
! rowspan="6" align="center"| Recipe
| Gas
| C4F8 75 sccm, SF6 38 sccm
|-
| Pressure
| 4 mTorr, Strike 3 secs @ 15 mTorr
|-
| Power
| 800 W CP, 50 W PP
|-
| Temperature
| -20 degs
|-
| Hardware
| 100 mm Spacers
|-
| Time
| 120 secs
|-
! rowspan="3" align="center"| Conditions
| Run ID
| 2000
|-
| Conditioning
| Sequence: Oxygen clean, MU tests, processes, no oxygen between runs
|-
| Mask
| nm zep etched down to 6dgh4 nm
|-
|}

<gallery caption="The results of the nano1.21 recipe" widths="250" heights="200" perrow="3">
image:WF_2E07a_mar23_2011-030.jpg|The 30 nm trenches
image:WF_2E07a_mar23_2011-060.jpg|The 60 nm trenches
image:WF_2E07a_mar23_2011-090.jpg|The 90 nm trenches
image:WF_2E07a_mar23_2011-120.jpg|The 120 nm trenches
image:WF_2E07a_mar23_2011-150.jpg|The 150 nm trenches
C4F8 75 sccm, SF6 38 sccm, 4 mTorr, Strike 3 secs @ 15 mTorr, 800 W CP, 50 W PP, -20 degs, 120 secs
</gallery>

Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano14 - Revision history

Jmli at 08:26, 4 September 2025

Jmli: /* The nano1.4 recipe */

Jmli at 06:28, 5 October 2020

Jmli at 11:42, 30 July 2018

Jmli at 14:25, 3 February 2016

Jmli at 10:34, 22 October 2013

Jml: /* The nano1.4 recipe */

Jml: /* The nano1.4 recipe */

Jml: /* The nano1.4 recipe */

Jml: New page: == The nano1.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.4''' |- ! rowspan="6" align="center"| Recipe | Gas | C4F8 75 sccm, SF...

Jml: New page: == The nano1.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.4''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF_...