Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 - Revision history

Jmli at 08:27, 4 September 2025

2025-09-04T08:27:14Z

← Older revision		Revision as of 10:27, 4 September 2025
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	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
	<!--Checked for updates on 5/10-2020 - ok/jmli -->		<!--Checked for updates on 5/10-2020 - ok/jmli -->
			<!--Checked for updates on 4/9-2025 - ok/jmli -->
	== The nano1.3 recipe ==		== The nano1.3 recipe ==
	{{Template:Author-jmli1}}		{{Template:Author-jmli1}}

Jmli: /* The nano1.3 recipe */

2023-02-02T14:17:20Z

The nano1.3 recipe

← Older revision		Revision as of 16:17, 2 February 2023
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	== The nano1.3 recipe ==		== The nano1.3 recipe ==
			{{Template:Author-jmli1}}
			<!--Checked for updates on 2/02-2023 - ok/jmli -->

	{\| border="2" cellpadding="2" cellspacing="1"		{\| border="2" cellpadding="2" cellspacing="1"

Jmli at 06:29, 5 October 2020

2020-10-05T06:29:29Z

← Older revision		Revision as of 08:29, 5 October 2020
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
			<!--Checked for updates on 5/10-2020 - ok/jmli -->

	== The nano1.3 recipe ==		== The nano1.3 recipe ==

Jmli at 11:42, 30 July 2018

2018-07-30T11:42:24Z

← Older revision		Revision as of 13:42, 30 July 2018
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''
	<!--Checked for updates on 3/2-~~2016~~ - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->


	== The nano1.3 recipe ==		== The nano1.3 recipe ==

Jmli at 14:25, 3 February 2016

2016-02-03T14:25:38Z

← Older revision		Revision as of 16:25, 3 February 2016
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''
			<!--Checked for updates on 3/2-2016 - ok/jmli -->

Jmli at 10:34, 22 October 2013

2013-10-22T10:34:25Z

← Older revision		Revision as of 12:34, 22 October 2013
Line 1:		Line 1:
			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 click here]'''


	== The nano1.3 recipe ==		== The nano1.3 recipe ==

Jml: /* The nano1.3 recipe */

2011-05-10T12:30:01Z

The nano1.3 recipe

← Older revision		Revision as of 14:30, 10 May 2011
Line 50:		Line 50:

	</gallery>		</gallery>

			{\| {{table}}
			\|+ After 60 seconds
			\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''
			\| align="center" style="background:#f0f0f0;"\|''''''
			\| align="center" style="background:#f0f0f0;"\|'''30'''
			\| align="center" style="background:#f0f0f0;"\|'''60'''
			\| align="center" style="background:#f0f0f0;"\|'''90'''
			\| align="center" style="background:#f0f0f0;"\|'''120'''
			\| align="center" style="background:#f0f0f0;"\|'''150'''
			\| align="center" style="background:#f0f0f0;"\|'''Avg'''
			\| align="center" style="background:#f0f0f0;"\|'''Std'''
			\|-
			\| ER\|\|nm/min\|\|241\|\|285\|\|307\|\|325\|\|335\|\|299\|\|37
			\|-
			\| SA\|\|degs\|\|92\|\|92\|\|92\|\|91\|\|91\|\|92\|\|0
			\|-
			\| base\|\|nm/edge\|\|-5\|\|-8\|\|-18\|\|-18\|\|-34\|\|-17\|\|11
			\|-
			\| foot\|\|nm/edge\|\|-5\|\|-8\|\|-18\|\|-18\|\|-4\|\|-10\|\|7
			\|-
			\| Bowing\|\|\|\|19\|\|11\|\|11\|\|14\|\|10\|\|13\|\|4
			\|-
			\| Curve\|\|\|\|-48\|\|-46\|\|-43\|\|-40\|\|-40\|\|-44\|\|4
			\|-
			\| zep\|\|nm/min\|\|\|\|\|\|\|\|\|\|\|\|95\|\|
			\|-
			\|
			\|}


			{\| {{table}}
			\|+ After 120 seconds
			\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''
			\| align="center" style="background:#f0f0f0;"\|''''''
			\| align="center" style="background:#f0f0f0;"\|'''30'''
			\| align="center" style="background:#f0f0f0;"\|'''60'''
			\| align="center" style="background:#f0f0f0;"\|'''90'''
			\| align="center" style="background:#f0f0f0;"\|'''120'''
			\| align="center" style="background:#f0f0f0;"\|'''150'''
			\| align="center" style="background:#f0f0f0;"\|'''Average'''
			\| align="center" style="background:#f0f0f0;"\|'''Std. dev.'''
			\|-
			\| ER\|\|nm/min\|\|189\|\|195\|\|229\|\|241\|\|242\|\|219\|\|25
			\|-
			\| SA\|\|degs\|\|95\|\|93\|\|93\|\|93\|\|94\|\|94\|\|1
			\|-
			\| base\|\|nm/edge\|\|0\|\|4\|\|-6\|\|-26\|\|-34\|\|-13\|\|17
			\|-
			\| foot\|\|nm/edge\|\|5\|\|16\|\|6\|\|-12\|\|-7\|\|2\|\|12
			\|-
			\| Bowing\|\|\|\|27\|\|12\|\|30\|\|22\|\|30\|\|24\|\|7
			\|-
			\| Curve\|\|\|\|-56\|\|-54\|\|-45\|\|-40\|\|-45\|\|-48\|\|7
			\|-
			\| zep\|\|nm/min\|\|\|\|\|\|\|\|\|\|\|\|81\|\|
			\|-
			\|
			\|}

Jml: /* The nano1.3 recipe */

2011-05-04T13:24:37Z

The nano1.3 recipe

← Older revision		Revision as of 15:24, 4 May 2011
Line 31:		Line 31:
	\|-		\|-
	\| Mask		\| Mask
	\| ~~190~~ nm zep		\| 211 nm zep etched down 117 nm
	\|-		\|-
	\|}		\|}

Jml: /* The nano1.3 recipe */

2011-04-11T13:09:38Z

The nano1.3 recipe

← Older revision		Revision as of 15:09, 11 April 2011
Line 36:		Line 36:


	<gallery caption="The results of the nano1.2 recipe" widths="250" heights="200" perrow="5">		<gallery caption="The results of the nano1.3 recipe" widths="250" heights="200" perrow="5">
	image:WF_2E01_mar23_2011_030a.jpg\|The 30 nm trenches after 60 secs.		image:WF_2E01_mar23_2011_030a.jpg\|The 30 nm trenches after 60 secs.
	image:WF_2E01_mar23_2011_060a.jpg\|The 60 nm trenches after 60 secs.		image:WF_2E01_mar23_2011_060a.jpg\|The 60 nm trenches after 60 secs.

Jml: New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 38 sccm, SF_...

2011-03-30T13:07:39Z

New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C4F8 38 sccm, SF...

New page

== The nano1.3 recipe ==

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Recipe nano1.3'''
|-
! rowspan="6" align="center"| Recipe
| Gas
| C4F8 38 sccm, SF6 52 sccm
|-
| Pressure
| 4 mTorr, Strike 3 secs @ 15 mTorr
|-
| Power
| 600 W CP, 40 W PP
|-
| Temperature
| -10 degs
|-
| Hardware
| 100 mm Spacers
|-
| Time
| 60 secs (a) and 120 secs (b)
|-
! rowspan="3" align="center"| Conditions
| Run ID
| (a) 1856 and (b) 1856+1857
|-
| Conditioning
| Sequence: Oxygen clean, processes, no oxygen between runs
|-
| Mask
| 190 nm zep
|-
|}

<gallery caption="The results of the nano1.2 recipe" widths="250" heights="200" perrow="5">
image:WF_2E01_mar23_2011_030a.jpg|The 30 nm trenches after 60 secs.
image:WF_2E01_mar23_2011_060a.jpg|The 60 nm trenches after 60 secs.
image:WF_2E01_mar23_2011_090a.jpg|The 90 nm trenches after 60 secs.
image:WF_2E01_mar23_2011_120a.jpg|The 120 nm trenches after 60 secs.
image:WF_2E01_mar23_2011_150a.jpg|The 150 nm trenches after 60 secs.

image:WF_2E01_mar23_2011_030b.jpg|The 30 nm trenches after 120 secs.
image:WF_2E01_mar23_2011_060b.jpg|The 60 nm trenches after 120 secs.
image:WF_2E01_mar23_2011_090b.jpg|The 90 nm trenches after 120 secs.
image:WF_2E01_mar23_2011_120b.jpg|The 120 nm trenches after 120 secs.
image:WF_2E01_mar23_2011_150b.jpg|The 150 nm trenches after 120 secs.

</gallery>

← Older revision		Revision as of 14:30, 10 May 2011
Line 50:		Line 50:

	</gallery>		</gallery>

			{\| {{table}}
			\|+ After 60 seconds
			\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''
			\| align="center" style="background:#f0f0f0;"\|''''''
			\| align="center" style="background:#f0f0f0;"\|'''30'''
			\| align="center" style="background:#f0f0f0;"\|'''60'''
			\| align="center" style="background:#f0f0f0;"\|'''90'''
			\| align="center" style="background:#f0f0f0;"\|'''120'''
			\| align="center" style="background:#f0f0f0;"\|'''150'''
			\| align="center" style="background:#f0f0f0;"\|'''Avg'''
			\| align="center" style="background:#f0f0f0;"\|'''Std'''
			\|-
			\| ER\|\|nm/min\|\|241\|\|285\|\|307\|\|325\|\|335\|\|299\|\|37
			\|-
			\| SA\|\|degs\|\|92\|\|92\|\|92\|\|91\|\|91\|\|92\|\|0
			\|-
			\| base\|\|nm/edge\|\|-5\|\|-8\|\|-18\|\|-18\|\|-34\|\|-17\|\|11
			\|-
			\| foot\|\|nm/edge\|\|-5\|\|-8\|\|-18\|\|-18\|\|-4\|\|-10\|\|7
			\|-
			\| Bowing\|\|\|\|19\|\|11\|\|11\|\|14\|\|10\|\|13\|\|4
			\|-
			\| Curve\|\|\|\|-48\|\|-46\|\|-43\|\|-40\|\|-40\|\|-44\|\|4
			\|-
			\| zep\|\|nm/min\|\|\|\|\|\|\|\|\|\|\|\|95\|\|
			\|-
			\|
			\|}


			{\| {{table}}
			\|+ After 120 seconds
			\| align="center" style="background:#f0f0f0;"\|'''Nominal trench line width'''
			\| align="center" style="background:#f0f0f0;"\|''''''
			\| align="center" style="background:#f0f0f0;"\|'''30'''
			\| align="center" style="background:#f0f0f0;"\|'''60'''
			\| align="center" style="background:#f0f0f0;"\|'''90'''
			\| align="center" style="background:#f0f0f0;"\|'''120'''
			\| align="center" style="background:#f0f0f0;"\|'''150'''
			\| align="center" style="background:#f0f0f0;"\|'''Average'''
			\| align="center" style="background:#f0f0f0;"\|'''Std. dev.'''
			\|-
			\| ER\|\|nm/min\|\|189\|\|195\|\|229\|\|241\|\|242\|\|219\|\|25
			\|-
			\| SA\|\|degs\|\|95\|\|93\|\|93\|\|93\|\|94\|\|94\|\|1
			\|-
			\| base\|\|nm/edge\|\|0\|\|4\|\|-6\|\|-26\|\|-34\|\|-13\|\|17
			\|-
			\| foot\|\|nm/edge\|\|5\|\|16\|\|6\|\|-12\|\|-7\|\|2\|\|12
			\|-
			\| Bowing\|\|\|\|27\|\|12\|\|30\|\|22\|\|30\|\|24\|\|7
			\|-
			\| Curve\|\|\|\|-56\|\|-54\|\|-45\|\|-40\|\|-45\|\|-48\|\|7
			\|-
			\| zep\|\|nm/min\|\|\|\|\|\|\|\|\|\|\|\|81\|\|
			\|-
			\|
			\|}

Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13 - Revision history

Jmli at 08:27, 4 September 2025

Jmli: /* The nano1.3 recipe */

Jmli at 06:29, 5 October 2020

Jmli at 11:42, 30 July 2018

Jmli at 14:25, 3 February 2016

Jmli at 10:34, 22 October 2013

Jml: /* The nano1.3 recipe */

Jml: /* The nano1.3 recipe */

Jml: /* The nano1.3 recipe */

Jml: New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C4F8 38 sccm, SF...

Jml: New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 38 sccm, SF_...