Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nanobosch6 - Revision history

Jmli at 06:35, 4 April 2025

2025-04-04T06:35:28Z

← Older revision		Revision as of 08:35, 4 April 2025
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!--Checked for updates on 24/8-2021. ok/ jmli-->		<!--Checked for updates on 24/8-2021. ok/ jmli-->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==

Jmli at 14:18, 24 August 2021

2021-08-24T14:18:00Z

← Older revision		Revision as of 16:18, 24 August 2021
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	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
			<!--Checked for updates on 24/8-2021. ok/ jmli-->

	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->

Jmli at 08:49, 10 July 2019

2019-07-10T08:49:41Z

← Older revision		Revision as of 10:49, 10 July 2019
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			<!--Checked for updates on 10/7-2019 - ok/jmli -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->

Jmli: /* Test run using AZ resist 24/9-2012 */

2017-06-27T09:42:51Z

Test run using AZ resist 24/9-2012

← Older revision		Revision as of 11:42, 27 June 2017
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			<!-- Ok, jmli 20170627 -->
	<!-- Ok, jmli 20170627 -->		<!-- Ok, jmli 20170627 -->
	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==

Jmli: /* Test run using AZ resist 24/9-2012 */

2017-06-27T09:40:11Z

Test run using AZ resist 24/9-2012

← Older revision		Revision as of 11:40, 27 June 2017
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			<!-- Ok, jmli 20170627 -->
	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==
	<!-- revised 1/6-2015 by jmli -->		<!-- revised 1/6-2015 by jmli -->

Jmli: /* Test run using AZ resist 24/9-2012 */

2015-06-01T12:11:13Z

Test run using AZ resist 24/9-2012

← Older revision		Revision as of 14:11, 1 June 2015
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	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==
			<!-- revised 1/6-2015 by jmli -->
	{\| border="2" cellpadding="2" cellspacing="1"		{\| border="2" cellpadding="2" cellspacing="1"
	\|+ '''Process conditions'''		\|+ '''Process conditions'''
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	image:Peg-C01296.05-no.14.jpg\|		image:Peg-C01296.05-no.14.jpg\|
	</gallery>		</gallery>



	== Test run using AZ resist 24/9-2012 ==		== Test run using AZ resist 24/9-2012 ==

Jml: Created page with "== Test run using AZ resist 24/9-2012 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Process conditions''' |- ! rowspan="4" align="center"| Substrate information ! W..."

2012-11-29T12:59:50Z

Created page with "== Test run using AZ resist 24/9-2012 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Process conditions''' |- ! rowspan="4" align="center"| Substrate information ! W..."

New page

== Test run using AZ resist 24/9-2012 ==

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Process conditions'''
|-
! rowspan="4" align="center"| Substrate information
! Wafer
| C01296.05
|-
! Mask
| Travka50 mask in a few microns of AZ resist
|-
! Date
| 24/9-2012
|-
! Tool
| Pegasus
|-
! rowspan="5" align="center"| Process
! Recipe
| nanobosch6
|-
! Tool conditioning
| 3 minute TDESC clean
|-
! Process duration
| 15 minutes
|-
! Purpose
| test
|-
! Characterisation
| SEM Zeiss
|-
|}

<gallery caption="SEM images" widths="250" heights="200" perrow="3">
image:Peg-C01296.05-no.12.jpg|
image:Peg-C01296.05-no.13.jpg|
image:Peg-C01296.05-no.14.jpg|
</gallery>

== Test run using AZ resist 24/9-2012 ==

{| border="2" cellpadding="2" cellspacing="1"
|+ '''Process conditions'''
|-
! rowspan="4" align="center"| Substrate information
! Wafer
| C01296.09
|-
! Mask
| Travka80 mask in a few microns of AZ resist
|-
! Date
| 24/9-2012
|-
! Tool
| Pegasus
|-
! rowspan="5" align="center"| Process
! Recipe
| nanobosch6
|-
! Tool conditioning
| 3 minute TDESC clean
|-
! Process duration
| 15 minutes
|-
! Purpose
| test
|-
! Characterisation
| SEM Zeiss
|-
|}

<gallery caption="SEM images" widths="250" heights="200" perrow="3">
image:Peg-C01296.09-no.15.jpg|
image:Peg-C01296.09-no.16.jpg|
image:Peg-C01296.09-no.17.jpg|
</gallery>