Specific Process Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog - Revision history

Jmli: Replaced content with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog click here]''' "

2025-10-21T09:39:22Z

Replaced content with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog click here]'''   "

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 <!--Checked for updates on 30/7-2018 - ok/jmli -->
 <!--Checked for updates on 5/10-2020 - ok/jmli -->
+<!--Checked for updates on 21/10-2025. ok/ jmli-->

Jmli at 07:38, 5 October 2020

2020-10-05T07:38:07Z

← Older revision		Revision as of 09:38, 5 October 2020
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			'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/ProcessLog click here]'''
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
			<!--Checked for updates on 5/10-2020 - ok/jmli -->

	{\| {{table}}		{\| {{table}}

Jmli at 11:56, 30 July 2018

2018-07-30T11:56:39Z

← Older revision		Revision as of 13:56, 30 July 2018
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			<!--Checked for updates on 30/7-2018 - ok/jmli -->

	{\| {{table}}		{\| {{table}}
	\| align="center" style="background:#f0f0f0;"\|'''End date'''		\| align="center" style="background:#f0f0f0;"\|'''End date'''

Jmli: Created page with "{| {{table}} | align="center" style="background:#f0f0f0;"|'''End date''' | align="center" style="background:#f0f0f0;"|'''User''' | align="center" style="background:#f0f0f0;"|'..."

2016-06-15T12:50:57Z

Created page with "{| {{table}} | align="center" style="background:#f0f0f0;"|'''End date''' | align="center" style="background:#f0f0f0;"|'''User''' | align="center" style="background:#f0f0f0;"|'..."

New page

{| {{table}}
| align="center" style="background:#f0f0f0;"|'''End date'''
| align="center" style="background:#f0f0f0;"|'''User'''
| align="center" style="background:#f0f0f0;"|'''line'''
| align="center" style="background:#f0f0f0;"|'''noProcessingDone [text]'''
| align="center" style="background:#f0f0f0;"|'''Etched material [list+]'''
| align="center" style="background:#f0f0f0;"|'''Mask material [list+]'''
| align="center" style="background:#f0f0f0;"|'''Recipe [text]'''
| align="center" style="background:#f0f0f0;"|'''Wafer ID [text]'''
| align="center" style="background:#f0f0f0;"|'''Process time [m]'''
| align="center" style="background:#f0f0f0;"|'''Process time [s]'''
| align="center" style="background:#f0f0f0;"|'''Process time [hh:mm:ss calc]'''
| align="center" style="background:#f0f0f0;"|'''Chiller temperature [°C]'''
| align="center" style="background:#f0f0f0;"|'''Comments [text]'''
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| 02-05-2016 14:50||jmli||1||||None||None||HiLi10mins||none||10||0||00:10:00||0||
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| 02-05-2016 14:50||jmli||2||||4" Si||Az 4562||PrA-0||C03991.01||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||3||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
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| 02-05-2016 14:50||jmli||4||||4" Si||Az 4562||PrA-1||C03991.02||14||0||00:14:00||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||5||||None||None||HiLi10mins||none||10||0||00:10:00||0||
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| 02-05-2016 14:50||jmli||6||||4" Si||Az 4562||PrA-2||C03991.03||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||7||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
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| 02-05-2016 14:50||jmli||8||||4" Si||Az 4562||PrA-0||C03991.04||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||9||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
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| 02-05-2016 14:50||jmli||10||||4" Si||Az 4562||PrA-1||C03991.05||14||0||00:14:00||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||11||||None||None||3min TDESC clean||none||3||0||00:03:00||0||
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| 02-05-2016 14:50||jmli||12||||4" Si||Az 4562||PrA-2||C03991.06||14||40||00:14:40||20||Travka20 wafer, 80cyc step2;
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| 02-05-2016 14:50||jmli||13||||None||None||HiLi10mins||none||10||0||00:10:00||0||
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| 03-06-2016 14:47||jmli||1||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||2||||Si||Az Mir 701||PrA-0||C04047.01||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||3||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||4||||Si||Az Mir 701||PrA-1||C04047.02||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||5||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||6||||Si||Az Mir 701||PrA-2||C04047.03||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||7||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||8||||Si||Az Mir 701||PrA-0||C04047.04||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||9||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||10||||Si||Az Mir 701||PrA-1||C04047.05||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||11||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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| 03-06-2016 14:47||jmli||12||||Si||Az Mir 701||PrA-2||C04047.06||14||40||00:14:40||20||travka20 wafer
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| 03-06-2016 14:47||jmli||13||||None||None||3min TDESC clean||none||3||0||00:03:00||20||
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