Specific Process Knowledge/Etch/DRIE-Pegasus/ProcessA/PrA-1 - Revision history

Jmli at 09:59, 4 September 2025

2025-09-04T09:59:10Z

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Jmli at 10:36, 28 June 2023

2023-06-28T10:36:03Z

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Jmli at 07:37, 5 October 2020

2020-10-05T07:37:53Z

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			'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/ProcessA/PrA-1 click here]'''
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Jmli at 11:56, 30 July 2018

2018-07-30T11:56:06Z

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Jmli at 13:36, 15 June 2016

2016-06-15T13:36:45Z

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Jmli at 13:35, 15 June 2016

2016-06-15T13:35:20Z

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Jmli at 13:32, 15 June 2016

2016-06-15T13:32:35Z

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Jmli: Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Informa..."

2016-06-15T13:31:02Z

Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Informa..."

New page

{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|+ '''Process runs'''
|-
! rowspan="2" width="40"| Date
! colspan="2" width="120"| Substrate Information
! colspan="3" | Process Information
! rowspan="2" width="500" |SEM Images
|-
! width="30" | Wafer info
! width="40" | Exposed area
! width="40" | Conditioning
! width="40" | Recipe
! width="40" | Wafer ID
|-
| 2/5-2016
| 4" Travka20 Wafer
| 20 % Si
| 3 minute TDESC clean
| PrA-1, 80 cycles or 14:40 minutes
| C03991.02
|
[[file:C03991.02 086.jpg|150px|frameless ]]
[[file:C03991.02 087.jpg|150px|frameless ]]
[[file:C03991.02 088.jpg|150px|frameless ]]
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[[file:C03991.02 097.jpg|150px|frameless ]]
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|-
| 2/5-2016
| 4" Travka20 Wafer
| 20 % Si
| 3 minute TDESC clean
| PrA-1, 80 cycles or 14:40 minutes
| C03991.05
|

|-
| 3/6-2016
| 4" Travka20 Wafer
| 20 % Si
| 3 minute TDESC clean
| PrA-1, 80 cycles or 14:40 minutes
| C04047.02
|

|-
| 3/6-2016
| 4" Travka20 Wafer
| 20 % Si
| 3 minute TDESC clean
| PrA-1, 80 cycles or 14:40 minutes
| C04047.05
|

|-
|}