Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM - Revision history

Jmli at 06:43, 4 April 2025

2025-04-04T06:43:06Z

← Older revision	Revision as of 08:43, 4 April 2025
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		<!--Checked for updates on 4/4-2025 - ok/jmli -->

Jmli at 07:46, 24 January 2022

2022-01-24T07:46:12Z

← Older revision		Revision as of 09:46, 24 January 2022
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	}}		}}
	\|}		\|}

	~~[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]~~

Jmli at 09:29, 21 January 2022

2022-01-21T09:29:36Z

← Older revision		Revision as of 11:29, 21 January 2022
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	[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]		[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]






			= DREM 0.2kW =

			{{Template:Peg1RecipeTableVerCColors
			\|TableHeader=DREM 0.2 kW v2
			}}
			{{Template:Peg1RecipeTableVerCAddrowColors
			\|RecipeName=DREM 0.2kW
			\|PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab
			\|Keywords=
			\|PlatenPosition=U \|PlatenFrequency=HF \|StabilisationTime= \|StartCycleEndCycle=D/E
			\|DepositionTime=2.8 \|EtchTime=2.6 \|NumberOfCycles=
			\|PressureDepDelay= \|PressureDepBoost= \|PressureDepMain=100%
			\|PressureEtchDelay= \|PressureEtchBoost= \|PressureEtchMain=100%
			\|C4F8DepDelay=0.3@5 \|C4F8DepBoost= 0.5@15 \|C4F8DepMain=25
			\|C4F8EtchDelay=0.3@25 \|C4F8EtchBoost= \|C4F8EtchMain=5
			\|SF6DepDelay=0.3@15 \|SF6DepBoost=0.5@10 \|SF6DepMain=10
			\|SF6EtchDelay=1.9@10 \|SF6EtchBoost=0.5@20 \|SF6EtchMain=20
			\|O2Dep= \|O2Etch= \|ArDep=60 \|ArEtch=60
			\|WCoilDep=0.25 \|WCoilEtch=0.25 \|WPlatenDep=1
			\|WPlatenEtchDelay=0.9@1 \|WPlatenEtchBoost=1@20 \|WPlatenEtchMain=1
			\|%CoilDepLoad=40 \|%CoilDepTune=50 \|%CoilEtchLoad=40 \|%CoilEtchTune=50
			\|%PlatenDepLoad=38.2 \|%PlatenDepTune=53.8 \|%PlatenEtchLoad=38.2 \|%PlatenEtchTune=53.8
			\|Temperature=0
			\|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW \| '''1''']]
			\|Link2RecipeRun=[[Main Page/Process Logs/jmli/Pegasus3/DREM/DREM 0.2kW newMFC \| '''9''']]
			}}
			\|}

Jmli at 14:57, 2 December 2021

2021-12-02T14:57:39Z

← Older revision		Revision as of 16:57, 2 December 2021
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	\|%PlatenDepLoad=41 \|%PlatenDepTune=60 \|%PlatenEtchLoad=41 \|%PlatenEtchTune=60		\|%PlatenDepLoad=41 \|%PlatenDepTune=60 \|%PlatenEtchLoad=41 \|%PlatenEtchTune=60
	\|Temperature=0		\|Temperature=0
	\|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]		\|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]

	}}		}}
	\|}		\|}
	[[Specific Process Knowledge/Etch/DRIE~~-Pegasus~~/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]
			[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]

Jmli at 14:56, 2 December 2021

2021-12-02T14:56:58Z

← Older revision		Revision as of 16:56, 2 December 2021
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	{{Template:Peg1RecipeTableVerCColors		{{Template:Peg1RecipeTableVerCColors
	\|TableHeader=DREM 0.5 kW ~~v2.3~~		\|TableHeader=DREM 0.5 kW recipes
	}}		}}
	{{Template:Peg1RecipeTableVerCAddrowColors		{{Template:Peg1RecipeTableVerCAddrowColors

Jmli at 14:55, 2 December 2021

2021-12-02T14:55:49Z

← Older revision		Revision as of 16:55, 2 December 2021
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	}}		}}
	\|}		\|}
	[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]		[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]

Jmli at 14:55, 2 December 2021

2021-12-02T14:55:29Z

← Older revision		Revision as of 16:55, 2 December 2021
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	\|Temperature=0		\|Temperature=0
	\|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]		\|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]

	}}		}}
	\|}		\|}
			[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM/DREM 0.5kW v2.3 \| '''10+''']]
	[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM \| ~~The DREM recipes compared~~ ]]

Jmli at 14:52, 2 December 2021

2021-12-02T14:52:29Z

← Older revision		Revision as of 16:52, 2 December 2021
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	}}		}}
	\|}		\|}

			[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM \| The DREM recipes compared ]]

Jmli: Created page with " The DREM 0.5kW v2.3 recipe is in the standard recipe folder. {{Template:Peg1RecipeTableVerCColors |TableHeader=DREM 0.5 kW v2.3 }} {{Template:Peg1RecipeTableVerCAddrowCo..."

2021-12-02T14:51:25Z

Created page with " The DREM 0.5kW v2.3 recipe is in the standard recipe folder. {{Template:Peg1RecipeTableVerCColors |TableHeader=DREM 0.5 kW v2.3 }} {{Template:Peg1RecipeTableVerCAddrowCo..."

New page

The DREM 0.5kW v2.3 recipe is in the standard recipe folder.

{{Template:Peg1RecipeTableVerCColors
|TableHeader=DREM 0.5 kW v2.3
}}
{{Template:Peg1RecipeTableVerCAddrowColors
|RecipeName=DREM 0.5kW v2.3
|PriorProcessSteps= Clamp Substrate,Pump to base, home platen matching unit, barc1, stab
|Keywords=
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E
|DepositionTime=3 |EtchTime='''2.5''' |NumberOfCycles=
|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100%
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100%
|C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@10 |C4F8DepMain=45
|C4F8EtchDelay=0.3@25 |C4F8EtchBoost= |C4F8EtchMain=5
|SF6DepDelay=0.3@20 |SF6DepBoost=0.5@10 |SF6DepMain=10
|SF6EtchDelay=1.9@20 |SF6EtchBoost=0.5@30 |SF6EtchMain=30
|O2Dep= |O2Etch= |ArDep=75 |ArEtch=1.5@75,75
|WCoilDep=0.5 |WCoilEtch=0.5 |WPlatenDep=1
|WPlatenEtchDelay=0.9@1 |WPlatenEtchBoost=1@40 |WPlatenEtchMain=1
|WClaritasDep= |WClaritasEtch=
|%CoilDepLoad=45 |%CoilDepTune=50 |%CoilEtchLoad=45 |%CoilEtchTune=50
|%PlatenDepLoad=41 |%PlatenDepTune=60 |%PlatenEtchLoad=41 |%PlatenEtchTune=60
|Temperature=0
|Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE/Pegasus-3/DREM/DREM 0.5kW v2.3 | '''10+''']]
}}
|}