Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig - Revision history

Jmli at 10:00, 4 September 2025

2025-09-04T10:00:20Z

← Older revision		Revision as of 12:00, 4 September 2025
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	<!--Checked for updates on 28/6-2023 - ok/jmli -->		<!--Checked for updates on 28/6-2023 - ok/jmli -->
			<!--Checked for updates on 4/9-2025 - ok/jmli -->

	{{contentbydryetch}}		{{contentbydryetch}}

Jmli at 10:49, 28 June 2023

2023-06-28T10:49:50Z

← Older revision		Revision as of 12:49, 28 June 2023
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	[[Category: Equipment \|Etch DRIE]]		[[Category: Equipment \|Etch DRIE]]
	[[Category: Etch (Dry) Equipment\|DRIE]]		[[Category: Etch (Dry) Equipment\|DRIE]]

			<!--Checked for updates on 28/6-2023 - ok/jmli -->

			{{contentbydryetch}}

	=== Past configurations ===		=== Past configurations ===

Jmli: /* Access to Pegasus 2 configuration templates */

2023-06-28T10:49:22Z

Access to Pegasus 2 configuration templates

← Older revision		Revision as of 12:49, 28 June 2023
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	: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201]		: 2021 Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 39(3), [032201]
	: https://doi.org/10.1116/6.0000922		: https://doi.org/10.1116/6.0000922



	~~=== Access to Pegasus 2 configuration templates ===~~


	~~'''Pegasus 2 configuration table version 1'''~~

	* '''Table header''': [[Template:Peg2configheader1]]

	* '''Table content''': [[Template:Peg2configcontent1]]

Jmli: /* Configuration valid from June 13 2022 to May 17 2023 */

2023-05-17T15:03:18Z

Configuration valid from June 13 2022 to May 17 2023

← Older revision		Revision as of 17:03, 17 May 2023
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	{{Template:Peg2configheader1		{{Template:Peg2configheader1
	\|TableHeader= 6: Currently valid ~~from~~ May 17 2023 ~~onwards~~		\|TableHeader= 6: Currently valid June 13 2022 to May 17 2023
	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1

Jmli: /* Configuration valid from June 13 2022 to May 17 2023 */

2023-05-17T15:01:08Z

Configuration valid from June 13 2022 to May 17 2023

← Older revision		Revision as of 17:01, 17 May 2023
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	{{Template:Peg2configheader1		{{Template:Peg2configheader1
	\|TableHeader= 6: Currently valid from ~~June 13 2022~~ onwards		\|TableHeader= 6: Currently valid from May 17 2023 onwards
	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1
	\|ItemName= Available gasses and gas chemistry		\|ItemName= Available gasses and gas chemistry
	\|ItemConfiguration= '''Available gasses:'''		\|ItemConfiguration= '''Available gasses:'''
	* SF<sub>6</sub>~~-1: 1200 sccm~~		* SF<sub>6</sub>: 50 sccm
	* SF<sub>6</sub>-2: 50 sccm
	* O<sub>2</sub>: 50 sccm		* O<sub>2</sub>: 50 sccm
	* Ar: 283		* Ar: 283
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	* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm		* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm
	* CO<sub>2</sub>: (It is not in the software)		* CO<sub>2</sub>: (It is not in the software)
	\|ItemComment=~~Only SF~~<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up		\|ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up
	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1
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	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1
	\|ItemName= Recipes		\|ItemName= Recipes
	\|ItemConfiguration= Do ''~~not~~'' ~~run~~ any ~~recipes from~~ the ~~folder called~~ '~~z-Archive~~'.		\|ItemConfiguration= In the past, only recipes in the 'std' folder were allowed to run. Now, you can develop your own recipes '''as long as they don't violate any of the limitations/restrictions and rules in this table.'''
	\|ItemComment= ~~The configuration of Pegasus 2 has changed over time (hence this table) so there is a large number of~~ recipes ~~that are no longer working. Also, some inappropriate settings~~ in the ~~some recipes (mainly with respect to the pressure control) have been identified. This is why it was decided that all existing (by autumn 2022) recipes be relocated to the folder called~~ '~~z-Archive~~' ~~from which~~ they ~~must serve ''only'' as backup. To run a recipe in the z-Archive folder, it must~~ be ~~verified by the dry etch group and copied~~ to ~~another folder (typically user\group\****)~~.		\|ItemComment= Be extremely careful with recipes in other folders than your own or the 'std' folder as they may no longer be safe to run because of hardware changes.

	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1
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	\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.		\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
	\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process \|section below]].		\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process \|section below]].

	}}		}}
	\|}		\|}

Jmli: /* Past configurations */

2023-05-17T14:56:27Z

Past configurations

← Older revision		Revision as of 16:56, 17 May 2023
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	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1
	\|ItemName= Recipes		\|ItemName= Recipes
	\|ItemConfiguration= ~~In the past, only recipes in the 'std' folder were allowed to run. Now, you can develop your own recipes~~ '''~~as long as they don~~'~~t violate~~ any of the ~~limitations/restrictions and rules in this table.'~~''		\|ItemConfiguration= Do ''not'' run any recipes from the folder called 'z-Archive'.
	\|ItemComment= ~~Be extremely careful~~ with recipes ~~in other folders than your own or~~ the '~~std~~' folder ~~as they may no longer~~ be ~~safe~~ to ~~run because of hardware changes~~.		\|ItemComment= The configuration of Pegasus 2 has changed over time (hence this table) so there is a large number of recipes that are no longer working. Also, some inappropriate settings in the some recipes (mainly with respect to the pressure control) have been identified. This is why it was decided that all existing (by autumn 2022) recipes be relocated to the folder called 'z-Archive' from which they must serve ''only'' as backup. To run a recipe in the z-Archive folder, it must be verified by the dry etch group and copied to another folder (typically user\group\****).

	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1

Jmli: /* Configuration valid from June 13 2022 to May 17 2023 */

2023-05-17T14:42:30Z

Configuration valid from June 13 2022 to May 17 2023

← Older revision		Revision as of 16:42, 17 May 2023
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	* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm		* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm
	* CO<sub>2</sub>: (It is not in the software)		* CO<sub>2</sub>: (It is not in the software)
	\|ItemComment=~~OnlySF~~<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up		\|ItemComment=Only SF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up
	}}		}}
	{{Template:Peg2configcontent1		{{Template:Peg2configcontent1

Jmli: /* Configuration valid from June 13 2022 to May 17 2023 */

2023-05-17T14:42:15Z

Configuration valid from June 13 2022 to May 17 2023

← Older revision		Revision as of 16:42, 17 May 2023
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	\|ItemName= Available gasses and gas chemistry		\|ItemName= Available gasses and gas chemistry
	\|ItemConfiguration= '''Available gasses:'''		\|ItemConfiguration= '''Available gasses:'''
	* SF<sub>6</sub>: 50 sccm		* SF<sub>6</sub>-1: 1200 sccm
			* SF<sub>6</sub>-2: 50 sccm
	* O<sub>2</sub>: 50 sccm		* O<sub>2</sub>: 50 sccm
	* Ar: 283		* Ar: 283
Line 72:		Line 73:
	}}		}}
	\|}		\|}



	==== Configuration valid from May 25 2022 to June 13 2022 ====		==== Configuration valid from May 25 2022 to June 13 2022 ====

Jmli: /* Past configurations */

2023-05-17T14:38:52Z

Past configurations

← Older revision		Revision as of 16:38, 17 May 2023
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	=== Past configurations ===		=== Past configurations ===

			==== Configuration valid from June 13 2022 to May 17 2023====

			{{Template:Peg2configheader1
			\|TableHeader= 6: Currently valid from June 13 2022 onwards
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Available gasses and gas chemistry
			\|ItemConfiguration= '''Available gasses:'''
			* SF<sub>6</sub>: 50 sccm
			* O<sub>2</sub>: 50 sccm
			* Ar: 283
			* N<sub>2</sub>: 500 sccm
			* He: 11 sccm
			'''Not available:'''
			* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm
			* CO<sub>2</sub>: (It is not in the software)
			\|ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Plasma source heaters
			\|ItemConfiguration=The following heaters in the plasma source are off:
			* Plenum Heater
			* Inner Heater
			* Magnetic Confinement Heater
			* Chamber Heater
			\|ItemComment= The temperature on the heaters in the plasma source are set to 20 degrees with a high tolerance. This essentially corresponds to powered off compared to default Pegasus temperatures which are in the 120-140 degrees range. The absence of fluorocarbons in the plasma makes it unnecessary to maintain a high temperature on the chamber walls in order to reduce polymer condensation (see below).

			Always make sure that the temperature settings in the recipes are ''not'' enabled. Click [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings \|'''here''']] to have more information.
			}}

			{{Template:Peg2configcontent1
			\|ItemName= Carbon free plasmas
			\|ItemConfiguration= The process chamber does not have any carbon containing etch gasses. Therefore, polymer build-up on the chamber walls is not an issue. The 'carbon free' policy does not, however, apply to the choice of masking materials and CSAR, AZ and DUV resists are allowed.
			\|ItemComment=
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Chamber conditioning and cleaning
			\|ItemConfiguration= Running long oxygen cleans is not necessary and must be avoided. Neither are shorter cleans between wafers.
			\|ItemComment= The absence of carbon containing etch gasses ensures that the process chamber is kept clean.
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Recipes
			\|ItemConfiguration= In the past, only recipes in the 'std' folder were allowed to run. Now, you can develop your own recipes '''as long as they don't violate any of the limitations/restrictions and rules in this table.'''
			\|ItemComment= Be extremely careful with recipes in other folders than your own or the 'std' folder as they may no longer be safe to run because of hardware changes.
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Etch of chromium and silicon nitrides
			\|ItemConfiguration= Recipes for etching chromium and silicon nitrides have been developed.
			\|ItemComment= Etching the two materials is only allowed for processes in combination with other Pegasus 2 specific recipes such as the CORE recipe. '''Always consult with Nanolab staff.'''
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Electrostatic clamping, chip bonding with Galden oil and helium backside cooling are no longer being used.
			\|ItemConfiguration= The processes run in Pegasus 2 operate at such low powers that they do not require very efficient cooling. It has therefore been decided that the following options/procedures
			* Electrostatic clamping of carriers/substrates
			* Helium backside cooling
			* Using bonding procedures such as droplets of Galden oil to increase thermal contact between chips and carrier
			will no longer be required.
			\|ItemComment= So far we have not seen any changes in the results but if you do, please contact Nanolab staff.
			}}
			{{Template:Peg2configcontent1
			\|ItemName= Background knowledge required for safe operation
			\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
			\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2#Publications_on_the_CORE_process \|section below]].

			}}
			\|}



	==== Configuration valid from May 25 2022 to June 13 2022 ====		==== Configuration valid from May 25 2022 to June 13 2022 ====

Jmli: /* Past configurations */

2023-05-02T09:22:19Z

Past configurations

← Older revision		Revision as of 11:22, 2 May 2023
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	\|ItemName= Background knowledge required for safe operation		\|ItemName= Background knowledge required for safe operation
	\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.		\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
	\|ItemComment= See the papers in the section below.		\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig#Publications_on_the_CORE_process \| section below]].

	}}		}}
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	\|ItemName= Background knowledge required for safe operation		\|ItemName= Background knowledge required for safe operation
	\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.		\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
	\|ItemComment= See the papers in the section below.		\|ItemComment=See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig#Publications_on_the_CORE_process \| section below]].

	}}		}}

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	\|ItemName= Background knowledge required for safe operation		\|ItemName= Background knowledge required for safe operation
	\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.		\|ItemConfiguration= The users and supervisors of Pegasus-2 must carefully read the 4 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
	\|ItemComment= See the papers in the section below.		\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig#Publications_on_the_CORE_process \| section below]].
	}}		}}
	\|}		\|}
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	\|ItemName= Background knowledge required for safe operation		\|ItemName= Background knowledge required for safe operation
	\|ItemConfiguration= Users and supervisors of Pegasus-2 should carefully read the 3 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.		\|ItemConfiguration= Users and supervisors of Pegasus-2 should carefully read the 3 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance.
	\|ItemComment= See the papers in the section below.		\|ItemComment= See the papers in the [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OldConfig#Publications_on_the_CORE_process \| section below]].
	}}		}}
	\|}		\|}