Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1 - Revision history

Mmat: /* Process information */

2025-06-03T07:31:49Z

Process information

← Older revision		Revision as of 09:31, 3 June 2025
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic\|Isotropic etches]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic\|Isotropic etches]]

	More processes, such as for DUV resist, are currently being developed, but they are not quite 'ready for publication' at LabAdviser so please contact Jonas (mailto:jmli@dtu.dk) for more information.		More processes, such as for DUV resist, are currently being developed, but they are not quite 'ready for publication' at LabAdviser so please contact Jonas ([mailto:jmli@dtu.dk jmli@dtu.dk]) for more information.

	<!-- *[[Specific Process Knowledge/Etch/DRIE-Pegasus/slopedsidewalls\|Etches that produce positively sloped sidewalls for imprinting purposes]] -->		<!-- *[[Specific Process Knowledge/Etch/DRIE-Pegasus/slopedsidewalls\|Etches that produce positively sloped sidewalls for imprinting purposes]] -->

2025-02-03T09:27:56Z

Wafer bonding

← Older revision		Revision as of 11:27, 3 February 2025
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	Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]		Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]

	~~{{global:Infobox Software/MediaWiki}}~~

2023-06-28T11:00:16Z

← Older revision		Revision as of 13:00, 28 June 2023
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	[[Category: Equipment \|Etch DRIE]]		[[Category: Equipment \|Etch DRIE]]
	[[Category: Etch (Dry) Equipment\|DRIE]]		[[Category: Etch (Dry) Equipment\|DRIE]]
	{{~~Template:Author-jmli1~~}}
	<!--Checked for updates on 24/4-2023 - ok/jmli -->		{{contentbydryetch}}
			<!--Checked for updates on 28/6-2023 - ok/jmli -->

2023-05-02T13:08:53Z

Acceptance test

← Older revision		Revision as of 15:08, 2 May 2023
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	To find information on how to bond wafers or chips to a carrier wafer, click [[Specific Process Knowledge/Etch/DryEtchProcessing/Bonding\| here]].		To find information on how to bond wafers or chips to a carrier wafer, click [[Specific Process Knowledge/Etch/DryEtchProcessing/Bonding\| here]].

	~~=== Acceptance test ===~~

	The instrument was opened for users in April 2010 when the acceptance test was signed. This was based on the performance of five standard recipes (A, B, C, D and SOI) that are further examined below. The acceptance test report is found [[Media:Pegasus_AcceptanceTest.pdf\|here]].

	'''Characterisation of etched trenches'''		'''Characterisation of etched trenches'''

2023-05-02T13:08:05Z

Advanced Processing - Henri Jansen style

← Older revision		Revision as of 15:08, 2 May 2023
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	=== Advanced Processing - Henri Jansen style ===		=== Advanced Processing - Henri Jansen style ===

	~~[[Template:Author-jmli1]]~~
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]

2023-04-28T11:18:00Z

← Older revision		Revision as of 13:18, 28 April 2023
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	[[Category: Equipment \|Etch DRIE]]		[[Category: Equipment \|Etch DRIE]]
	[[Category: Etch (Dry) Equipment\|DRIE]]		[[Category: Etch (Dry) Equipment\|DRIE]]
			{{Template:Author-jmli1}}
			<!--Checked for updates on 24/4-2023 - ok/jmli -->


	= DRIE-Pegasus 1=		= DRIE-Pegasus 1=

	[[Image:DRIE-Pegasus.jpg \|frame\|left\|x300px\|The DRIE-Pegasus 1 load lock and cassette loader in the Nanolab cleanroom A-1]]		[[Image:DRIE-Pegasus.jpg \|frame\|left\|x300px\|The DRIE-Pegasus 1 load lock and cassette loader in the Nanolab cleanroom A-1. {{photo1}} ]]

	'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''		'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''

2023-04-28T08:30:54Z

Advanced Processing - Henri Jansen style

← Older revision		Revision as of 10:30, 28 April 2023
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	=== Advanced Processing - Henri Jansen style ===		=== Advanced Processing - Henri Jansen style ===

	[Template:Author-jmli1]		[[Template:Author-jmli1]]
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]

2023-04-28T08:30:26Z

Advanced Processing - Henri Jansen style

← Older revision		Revision as of 10:30, 28 April 2023
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	=== Advanced Processing - Henri Jansen style ===		=== Advanced Processing - Henri Jansen style ===

			[Template:Author-jmli1]
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures\|Etch silicon nanostructures ]]
	* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]		* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Etch high aspect ratio silicon microstructures\|Etch high aspect ratio silicon microstructures ]]

2023-02-06T15:13:30Z

Acceptance test

← Older revision		Revision as of 17:13, 6 February 2023
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	Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]		Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]

			{{global:Infobox Software/MediaWiki}}

2023-02-06T15:11:58Z

Acceptance test

← Older revision		Revision as of 17:11, 6 February 2023
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	Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]		Process log at Nanolab [http://labintra.nanolab.dtu.dk/index.php/Main_Page/Process_Logs/jmli/Pegasus]

	~~{{URL}}~~

	{{#invoke:WikidataIB \|getValue \|<PropertyID> \|name=<fieldname> \|suppressfields=<list of fields which will never display> \|fetchwikidata=<list of fields to fetch values from Wikidata> \|onlysourced=<yes/no> \|noicon=<yes/no> \|df=<dmy/mdy/y> \|bc=<BC/BCE> \|qual=<ALL/DATES/P999> \|list=<ubl/hlist/prose> \|linked=<yes/no> \|<local parameter>}}