https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=Specific_Process_Knowledge%2FEtch%2FDRIE-Pegasus%2FIsotropic%2FIsoslow7
Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7 - Revision history
2026-04-05T10:16:30Z
Revision history for this page on the wiki
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https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7&diff=51492&oldid=prev
Jmli at 06:27, 4 April 2025
2025-04-04T06:27:32Z
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7&diff=37526&oldid=prev
Jmli at 06:45, 5 October 2020
2020-10-05T06:45:12Z
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7&diff=29439&oldid=prev
Jmli at 11:53, 30 July 2018
2018-07-30T11:53:43Z
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 13:53, 30 July 2018</td>
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Jmli
https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7&diff=24181&oldid=prev
Jmli: Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informati..."
2016-06-24T08:06:25Z
<p>Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informati..."</p>
<p><b>New page</b></p><div>{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"<br />
|+ '''Process runs'''<br />
|-<br />
! rowspan="2" width="40"| Date<br />
! colspan="4" width="120"| Substrate Information<br />
! colspan="4" | Process Information<br />
! rowspan="2" width="500" |SEM Images<br />
|-<br />
! width="30" | Wafer info<br />
! width="40" | Mask<br />
! width="40" | Material/ Exposed area<br />
! width="40" | Tool / Operator<br />
! width="40" | Conditioning<br />
! width="40" | Recipe<br />
! width="40" | Wafer ID<br />
! width="40" | Comments<br />
|-<br />
| 28/2-2014<br />
| 4" <br />
| travka50 wafer 1.5 µm AZ<br />
| Si / 50 %<br />
| Pegasus/jmli<br />
| 1 minute TDESC clean + MU runs<br />
| jml/isotropic/isoslow7 1:00 minutes <br />
| S003900<br />
| Bottom fine!!<br />
| <br />
[[file:S003900-01.jpg |120px|frameless ]]<br />
[[file:S003900-02.jpg |120px|frameless ]]<br />
[[file:S003900-03.jpg |120px|frameless ]]<br />
[[file:S003900-04.jpg |120px|frameless ]]<br />
[[file:S003900-05.jpg |120px|frameless ]]<br />
[[file:S003900-06.jpg |120px|frameless ]]<br />
|-<br />
|}</div>
Jmli