Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ - Revision history

Mmat at 14:02, 5 May 2025

2025-05-05T14:02:46Z

← Older revision		Revision as of 16:02, 5 May 2025
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi\|Positively tapered sidewalls]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi\|Positively tapered sidewalls]]

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Jmli: /* Some questions and answers */

2023-02-02T14:22:11Z

Some questions and answers

← Older revision		Revision as of 16:22, 2 February 2023
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Masks\|Mask materials]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch\|Nanoetching]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch\|Nanoetching]]

Jmli at 09:24, 9 August 2022

2022-08-09T09:24:26Z

← Older revision		Revision as of 11:24, 9 August 2022
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]'''
	<!--Checked for updates on 2/2-2016 - ok/jmli -->		<!--Checked for updates on 2/2-2016 - ok/jmli -->
			<!-- Page reviewed 9/8-2022 jmli -->




	== Some questions and answers ==		== Some questions and answers ==

Jmli: /* Some questions and answers */

2019-11-26T09:57:24Z

Some questions and answers

← Older revision		Revision as of 11:57, 26 November 2019
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	[[Template:DanchipInfo]]		[[Template:DanchipInfo]]
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Jmli at 08:58, 25 November 2019

2019-11-25T08:58:46Z

← Older revision		Revision as of 10:58, 25 November 2019
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi\|Positively tapered sidewalls]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Potasi\|Positively tapered sidewalls]]

			[[Template:DanchipInfo]]

Jmli: /* Some questions and answers */

2018-05-16T11:50:21Z

Some questions and answers

← Older revision		Revision as of 13:50, 16 May 2018
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	The content in here (and the links below) is from email correspondence with SPTS - We pose a question and they answer. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.		The content in here (and the links below) is from email correspondence with SPTS - We pose a question and they answer. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware\|Hardware and setup]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Bonding\|Bonding wafers]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Bonding\|Bonding wafers]]

Jmli: /* Some questions and answers */

2018-05-16T11:50:02Z

Some questions and answers

← Older revision		Revision as of 13:50, 16 May 2018
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	<!--Checked for updates on 2/2-2016 - ok/jmli -->		<!--Checked for updates on 2/2-2016 - ok/jmli -->
	== Some questions and answers ==		== Some questions and answers ==
	~~This section contains material~~ from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.
			'''Disclaimer'''

			The content in here (and the links below) is from email correspondence with SPTS - We pose a question and they answer. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware\|Hardware and setup]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware\|Hardware and setup]]

Jmli at 09:17, 2 February 2016

2016-02-02T09:17:21Z

← Older revision		Revision as of 11:17, 2 February 2016
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]'''
			<!--Checked for updates on 2/2-2016 - ok/jmli -->
	== Some questions and answers ==		== Some questions and answers ==
	This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.		This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.

Jmli at 14:32, 3 October 2013

2013-10-03T14:32:07Z

← Older revision		Revision as of 16:32, 3 October 2013
Line 1:		Line 1:
			'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/FAQ click here]'''

	== Some questions and answers ==		== Some questions and answers ==
	This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.		This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.

Jml: /* Some questions and answers */

2012-03-06T10:14:00Z

Some questions and answers

← Older revision		Revision as of 12:14, 6 March 2012
Line 1:		Line 1:
	== Some questions and answers ==		== Some questions and answers ==
	This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside en email correspondence the information is also very likely to get completely lost should the people involved decide to change job.		This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware\|Hardware and setup]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Hardware\|Hardware and setup]]

← Older revision		Revision as of 16:22, 2 February 2023
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	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Matching\|Problems with matching]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Masks\|Mask materials]]

	*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch\|Nanoetching]]		*[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ/Nanoetch\|Nanoetching]]