Jmli at 06:40, 4 April 2025

2025-04-04T06:40:54Z

← Older revision		Revision as of 08:40, 4 April 2025
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	<!-- Page reviewed 9/8-2022 jmli -->		<!-- Page reviewed 9/8-2022 jmli -->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

Jmli at 09:29, 9 August 2022

2022-08-09T09:29:15Z

← Older revision		Revision as of 11:29, 9 August 2022
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			<!-- Page reviewed 9/8-2022 jmli -->



	{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		{\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
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Jmli: Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Information ! colspan="4" | Pro..."

2020-03-20T09:42:34Z

Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Information ! colspan="4" | Pro..."

New page

{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|-
! rowspan="2" width="40"| Date
! colspan="2" width="120"| Substrate Information
! colspan="4" | Process Information
! colspan="3" width="200" | Results
|-
! width="30" | Wafer info
! width="40" | Material/ Exposed area
! width="40" | Condi- tioning
! width="40" | Recipe
! width="40" | Wafer ID
! width="40" | Comments
! width="400" |SEM images
! width="400" |Picoscope
! width="400" |Numbers
|-
|29/11-2019
|Medusa One
|Si / 10%
|stab-19 chamber clean 20
|nanolab/ jmli /DREM 3.0 kW 100% b
|S018653
|[http://labmanager.dtu.dk/function.php?module=Processlog&view=editlog&usageid=340452 Process log entry]
|
[[file:S018653a000.png |120px|frameless ]]
[[file:S018653a001.png |120px|frameless ]]
[[file:S018653a002.png |120px|frameless ]]
[[file:S018653a003.png |120px|frameless ]]
[[file:S018653a004.png |120px|frameless ]]
[[file:S018653a005.png |120px|frameless ]]
[[file:S018653a006.png |120px|frameless ]]
[[file:S018653a007.png |120px|frameless ]]
[[file:S018653a008.png |120px|frameless ]]
[[file:S018653a009.png |120px|frameless ]]
[[file:S018653a010.png |120px|frameless ]]
[[file:S018653a011.png |120px|frameless ]]
[[file:S018653a012.png |120px|frameless ]]
[[file:S018653a013.png |120px|frameless ]]
| 
|
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''SEM image:'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a000.png a000]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a001.png a001]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a002.png a002]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a003.png a003]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a004.png a004]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a005.png a005]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a006.png a006]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a007.png a007]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a008.png a008]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a009.png a009]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a010.png a010]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a011.png a011]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a012.png a012]'''
| align="center" style="background:#f0f0f0;"|'''[http://labintra.nanolab.dtu.dk/index.php/File:S018653a013.png a013]'''
|-
| Trench width (um)||159.77||401.82||251.88||250.36||158.96||99.72||61.82||40.77||32.13||25.67||12.84||7.24||4.13||2.6
|-
| Etched depth (um)||145.56||145.42||145.8||147.62||146.52||142.74||136.64||128.65||123.88||118.18||100.34||84.65||69.04||60.36
|-
| Etch rate (um/min)||14.56||14.54||14.58||14.76||14.65||14.27||13.66||12.86||12.39||11.82||10.03||8.46||6.9||6.04
|-
| <span title="The cycles will vary if the aspect ratio is large "> Etch rate (nm/cyc) </span>||1.21||1.21||1.21||1.23||1.22||1.19||1.14||1.07||1.03||0.98||0.84||0.71||0.58||0.5
|-
| Sidewall bowing (%)||-0.28||-0.51||-0.38||-0.38||-0.4||0.05||0.18||-0.14||0.09||0.19||0.36||0.45||0.52||0.53
|-
| Sidewall angle (degs)||92.65||93.1||92.66||93.02||92.84||92.17||92.04||91.86||91.92||91.7||91.52||91.05||90.71||90.61
|-
| Bottom bowing (%)||8.1||3.9||6.18||6.71||9.14||10.53||14.26||17.43||16||16.76||15.69||16.18||14.53||11.69
|-
|Aspect ratio||0.87||0.35||0.56||0.57||0.88||1.36||2.05||2.86||3.41||4.05||6.47||9.64||13.86||18.56
|-
|}
|-
|}

Specific Process Knowledge/Etch/DRIE/Pegasus/DREM/DREM 3kW 100% b - Revision history

Jmli at 06:40, 4 April 2025

Jmli at 09:29, 9 August 2022

Jmli: Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |- ! rowspan="2" width="40"| Date ! colspan="2" width="120"| Substrate Information ! colspan="4" | Pro..."