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	<id>https://labadviser.nanolab.dtu.dk//index.php?action=history&amp;feed=atom&amp;title=Specific_Process_Knowledge%2FDRIE-Pegasus%2FPegasus-2%2FOldConfig</id>
	<title>Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://labadviser.nanolab.dtu.dk//index.php?action=history&amp;feed=atom&amp;title=Specific_Process_Knowledge%2FDRIE-Pegasus%2FPegasus-2%2FOldConfig"/>
	<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig&amp;action=history"/>
	<updated>2026-06-11T03:21:18Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
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	<entry>
		<id>https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig&amp;diff=51491&amp;oldid=prev</id>
		<title>Jmli at 06:27, 4 April 2025</title>
		<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig&amp;diff=51491&amp;oldid=prev"/>
		<updated>2025-04-04T06:27:17Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
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				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 08:27, 4 April 2025&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l1&quot;&gt;Line 1:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#039;&amp;#039;&amp;#039;Feedback to this page:  &lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;#039;&amp;#039;&amp;#039;Feedback to this page:  &lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2 click here]&amp;#039;&amp;#039;&amp;#039;&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2 click here]&amp;#039;&amp;#039;&amp;#039;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-side-deleted&quot;&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;&lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&amp;lt;!--Checked for updates on 4/4-2025 - ok/jmli --&amp;gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[Category: Equipment |Etch DRIE]]&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[Category: Equipment |Etch DRIE]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[Category: Etch (Dry) Equipment|DRIE]]&lt;/div&gt;&lt;/td&gt;&lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;&lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;[[Category: Etch (Dry) Equipment|DRIE]]&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
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		<author><name>Jmli</name></author>
	</entry>
	<entry>
		<id>https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig&amp;diff=37852&amp;oldid=prev</id>
		<title>Jmli: Created page with &quot;&#039;&#039;&#039;Feedback to this page:  [mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRI...&quot;</title>
		<link rel="alternate" type="text/html" href="https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig&amp;diff=37852&amp;oldid=prev"/>
		<updated>2020-12-15T15:05:52Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;&amp;#039;&amp;#039;&amp;#039;Feedback to this page:  [mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRI...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;&amp;#039;&amp;#039;&amp;#039;Feedback to this page: &lt;br /&gt;
[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2 click here]&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
[[Category: Equipment |Etch DRIE]]&lt;br /&gt;
[[Category: Etch (Dry) Equipment|DRIE]]&lt;br /&gt;
&lt;br /&gt;
=== Past configurations ===&lt;br /&gt;
&lt;br /&gt;
As of December 2020  there is not yet any old configurations.&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
=== Access to Pegasus 2 configuration templates ===&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Pegasus 2 configuration table version 1&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;Table header&amp;#039;&amp;#039;&amp;#039;: [[Template:Peg2configheader1]]&lt;br /&gt;
&lt;br /&gt;
* &amp;#039;&amp;#039;&amp;#039;Table content&amp;#039;&amp;#039;&amp;#039;: [[Template:Peg2configcontent1]]&lt;/div&gt;</summary>
		<author><name>Jmli</name></author>
	</entry>
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