Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey - Revision history

Jmli at 06:28, 4 April 2025

2025-04-04T06:28:08Z

← Older revision		Revision as of 08:28, 4 April 2025
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	<!--Checked for updates on 24/8-2021. ok/ jmli-->		<!--Checked for updates on 24/8-2021. ok/ jmli-->
			<!--Checked for updates on 4/4-2025 - ok/jmli -->

	= Survey spectrum processing =		= Survey spectrum processing =

Jmli at 13:59, 24 August 2021

2021-08-24T13:59:40Z

← Older revision		Revision as of 15:59, 24 August 2021
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			<!--Checked for updates on 24/8-2021. ok/ jmli-->

	= Survey spectrum processing =		= Survey spectrum processing =

Jmli: /* Survey spectrum processing */

2018-10-16T13:32:10Z

Survey spectrum processing

← Older revision		Revision as of 15:32, 16 October 2018
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	What to do about this?		What to do about this?
	# Continue with the fitting of the high resolution scans - here we will have a much better chancer to work with the fitting of the peaks.		# Continue with the fitting of the high resolution scans - here we will have a much better chancer to work with the fitting of the peaks with intermediate oxidation steps.
	# Use a [https://xpssimplified.com/magcis_ion_system.php MAGCIS gas cluster ion source] instead in another instrument to avoid the reducing action of the Ar (single) ion source.		# Use a [https://xpssimplified.com/magcis_ion_system.php MAGCIS gas cluster ion source] instead in another instrument to avoid the reducing action of the Ar (single) ion source.

			The analysis continues [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned\|'''here''']].

Jmli: /* Survey spectrum processing */

2018-10-16T13:30:25Z

Survey spectrum processing

← Older revision		Revision as of 15:30, 16 October 2018
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	Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the higher binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti will appear as the TiO<sub>2</sub> is sputtered. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.		Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the higher binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti will appear as the TiO<sub>2</sub> is sputtered. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.

			What to do about this?
			# Continue with the fitting of the high resolution scans - here we will have a much better chancer to work with the fitting of the peaks.
			# Use a [https://xpssimplified.com/magcis_ion_system.php MAGCIS gas cluster ion source] instead in another instrument to avoid the reducing action of the Ar (single) ion source.

Jmli: /* Survey spectrum processing */

2018-10-16T13:24:41Z

Survey spectrum processing

← Older revision		Revision as of 15:24, 16 October 2018
Line 31:		Line 31:
	In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.

	Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the higher binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti to appear. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.		Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the higher binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti will appear as the TiO<sub>2</sub> is sputtered. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.

Jmli: /* Survey spectrum processing */

2018-10-16T13:23:18Z

Survey spectrum processing

← Older revision		Revision as of 15:23, 16 October 2018
Line 31:		Line 31:
	In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.

	Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the ~~lower~~ binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti to appear. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.		Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the higher binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti to appear. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.

Jmli: /* Survey spectrum processing */

2018-10-16T13:22:39Z

Survey spectrum processing

← Older revision		Revision as of 15:22, 16 October 2018
Line 31:		Line 31:
	In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.

	Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the lower binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>.		Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the lower binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>. However, since the sputtering of the surface by Ar ions will usually act as mildly reducing, we can expect that intermediate oxidation steps of Ti to appear. These intermediate states will cause the expected dip between the two peaks of the Ti2p(<sup>4+</sup>) spin orbit couple to disappear and the fitting of the background goes wrong.

Jmli: /* Survey spectrum processing */

2018-10-16T13:11:36Z

Survey spectrum processing

← Older revision		Revision as of 15:11, 16 October 2018
Line 31:		Line 31:
	In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.

	Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. ~~separate peaks~~ of		Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. The other part of the spin couple (the Ti2p<sub>1/2</sub> peak) is some 6 eV away on the lower binding energy side. Knowing that titanium will oxidize completely if oxygen is present we can expect only to see Ti<sup>4+</sup>.

Jmli: /* Survey spectrum processing */

2018-10-16T13:06:17Z

Survey spectrum processing

← Older revision		Revision as of 15:06, 16 October 2018
Line 23:		Line 23:
	[[File:ALD-Sandwich-29a.jpg\|700px]]		[[File:ALD-Sandwich-29a.jpg\|700px]]

	As seen above there is only a very small amount of Ti2p. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes.		As seen above there is only a very small amount of Ti2p and at the same time the O1s is much too high. Why is this? Let us zoom in onto the Ti2p peak and see how the fitting goes.

	[[File:ALD sandwich Ti survey.gif\|630px]]		[[File:ALD sandwich Ti survey.gif\|630px]]
Line 30:		Line 30:

	In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.

			Judging by the way the background is fitted, it looks as if the software is programmed to fit the background below only the Ti2p<sub>3/2</sub> peak. separate peaks of

Jmli: /* Survey spectrum processing */

2018-10-16T12:56:33Z

Survey spectrum processing

← Older revision		Revision as of 14:56, 16 October 2018
Line 27:		Line 27:
	[[File:ALD sandwich Ti survey.gif\|630px]]		[[File:ALD sandwich Ti survey.gif\|630px]]

	In the gif file above one can see the etch level in the bottom center right. ~~The~~ fitting routine ~~adds~~ a background to the data ~~and subtracts it from the data~~ before the peak is fitted~~. This background~~ is shown with a light green color. It is clear that something goes wrong; the fitted ~~backrground~~ eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.		In the gif file above one can see the etch level in the bottom center right.

			In the automatic peak fitting routine, a background is added to the data below each peak. This background is then subtracted before the peak is fitted, it is shown with a light green color. It is clear that something goes wrong; the fitted background eats up the majority of the peak. The result is that the fitted Ti2p peak is much too small - then oxygen is seen as the only peak in the spectrum.