Specific Process Knowledge/Characterization/Sample imaging - Revision history

Mmat at 09:49, 28 May 2025

2025-05-28T09:49:47Z

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	== Optical Profilers ==		== Optical Profilers ==

	An optical profiler, f.ex. [[Specific Process Knowledge/Characterization/~~Profiler#Optical_Profiler_(~~Sensofar)\|Sensofar S Neox]], provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument.		An optical profiler, f.ex. [[Specific Process Knowledge/Characterization/Sensofar S Neox\|Sensofar S Neox]], provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument.

	The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.		The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.

Mmat: /* Optical Microscopes */

2025-05-28T09:48:19Z

Optical Microscopes

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	One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any kind of sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications, one will experience problems when trying to image structures that have been etched more than some 10 µm: One cannot focus on both the top and the bottom at the same time. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm.		One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any kind of sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications, one will experience problems when trying to image structures that have been etched more than some 10 µm: One cannot focus on both the top and the bottom at the same time. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm.
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	== Optical Profilers ==		== Optical Profilers ==

Mmat: /* Scanning Electron Microscopes (SEM) */

2025-05-28T09:48:11Z

Scanning Electron Microscopes (SEM)

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	* Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics.		* Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics.
	* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.		* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.
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Mmat: /* Scanning Electron Microscopes (SEM) */

2025-05-28T09:48:01Z

Scanning Electron Microscopes (SEM)

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	* Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics.		* Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics.
	* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.		* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.
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	== Atomic Force Microscope (AFM)==		== Atomic Force Microscope (AFM)==

Mmat: /* Optical Profilers */

2025-05-28T09:47:51Z

Optical Profilers

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	The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.		The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.
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	== Scanning Electron Microscopes (SEM)==		== Scanning Electron Microscopes (SEM)==

Mmat: /* The atomic force microscope */

2025-05-28T09:46:48Z

The atomic force microscope

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	* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.		* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders.

	== ~~The atomic force microscope~~ ==		== Atomic Force Microscope (AFM)==

	The [[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy\|atomic force microscope]] has limited use as a sample imaging instrument. In some cases the resolution of the SEM is not enough:		The [[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy\|atomic force microscope]] has limited use as a sample imaging instrument. In some cases the resolution of the SEM is not enough:

Mmat: /* The scanning electron microscopes */

2025-05-28T09:46:37Z

The scanning electron microscopes

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	The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.		The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution.

	== ~~The scanning electron microscopes~~ ==		== Scanning Electron Microscopes (SEM)==

	Both shortcomings of the optical microscopes mentioned above are addressed by the use of a beam of electrons (as you do in a SEM) instead of light. The depth of focus and the resolution of a [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy\|scanning electron microscope]] are at least one order of magnitude better. The list of advantages of a SEM compared to an optical microscope includes:		Both shortcomings of the optical microscopes mentioned above are addressed by the use of a beam of electrons (as you do in a SEM) instead of light. The depth of focus and the resolution of a [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy\|scanning electron microscope]] are at least one order of magnitude better. The list of advantages of a SEM compared to an optical microscope includes:

Mmat: /* The optical microscopes */

2025-05-28T09:46:26Z

The optical microscopes

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	== ~~The optical microscopes~~ ==		== Optical Microscopes ==

	There is a lot of [[Specific Process Knowledge/Characterization/Optical microscope\|optical microscopes]] scattered around in the cleanroom because they are in great need. They are useful if, for instance, you need to		There is a lot of [[Specific Process Knowledge/Characterization/Optical microscope\|optical microscopes]] scattered around in the cleanroom because they are in great need. They are useful if, for instance, you need to

Mmat: /* Sample imaging */

2025-05-28T09:45:57Z

Sample imaging

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			'''Imaging Equipment:'''
			*[[Specific_Process_Knowledge/Characterization/Optical_microscope\|Optical Microscopes]]

	*[[Specific_Process_Knowledge/Characterization/~~Optical_microscope~~\|~~Sample imaging using optical microscopes~~]]		*[[Specific_Process_Knowledge/Characterization/Sensofar S Neox\|Optical Profiler (e.g. ''Sensofar S Neox'')]]

	*[[Specific_Process_Knowledge/Characterization/~~Sensofar S Neox~~\|~~Sample imaging using optical profiler~~ (~~Sensofar S Neox~~)]]		*[[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy\|Scanning Electron Microscopy (SEM)]]

	*[[Specific_Process_Knowledge/Characterization/~~SEM~~:~~_Scanning_Electron_Microscopy~~\|~~Sample imaging using SEM~~]]		*[[Specific_Process_Knowledge/Characterization/AFM:_Atomic_Force_Microscopy\|Atomic Force Microscopy (AFM)]]

	*[[Specific_Process_Knowledge/Characterization/AFM:_Atomic_Force_Microscopy\|Sample imaging using AFM (NanoMan)]]		*[[Specific_Process_Knowledge/Characterization/Dektak XTA\|Stylus Profiler (e.g ''Dektak XTA'')]]

	*[[Specific_Process_Knowledge/Characterization/Dektak XTA\|~~Sample imaging using stylus profiler~~ (Dektak XTA)]]

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	==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging==		==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging==

Mmat: /* Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging */

2025-05-28T09:43:08Z

Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging

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← Older revision		Revision as of 11:45, 28 May 2025
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			'''Imaging Equipment:'''
			*[[Specific_Process_Knowledge/Characterization/Optical_microscope\|Optical Microscopes]]

	*[[Specific_Process_Knowledge/Characterization/~~Optical_microscope~~\|~~Sample imaging using optical microscopes~~]]		*[[Specific_Process_Knowledge/Characterization/Sensofar S Neox\|Optical Profiler (e.g. ''Sensofar S Neox'')]]

	*[[Specific_Process_Knowledge/Characterization/~~Sensofar S Neox~~\|~~Sample imaging using optical profiler~~ (~~Sensofar S Neox~~)]]		*[[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy\|Scanning Electron Microscopy (SEM)]]

	*[[Specific_Process_Knowledge/Characterization/~~SEM~~:~~_Scanning_Electron_Microscopy~~\|~~Sample imaging using SEM~~]]		*[[Specific_Process_Knowledge/Characterization/AFM:_Atomic_Force_Microscopy\|Atomic Force Microscopy (AFM)]]

	*[[Specific_Process_Knowledge/Characterization/AFM:_Atomic_Force_Microscopy\|Sample imaging using AFM (NanoMan)]]		*[[Specific_Process_Knowledge/Characterization/Dektak XTA\|Stylus Profiler (e.g ''Dektak XTA'')]]

	*[[Specific_Process_Knowledge/Characterization/Dektak XTA\|~~Sample imaging using stylus profiler~~ (Dektak XTA)]]

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	==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging==		==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging==