Specific Process Knowledge/Characterization/SEM Tabletop 1 - Revision history

Pevo at 09:24, 19 November 2025

2025-11-19T09:24:45Z

← Older revision		Revision as of 11:24, 19 November 2025
Line 46:		Line 46:
	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	* Building ~~451~~ - ~~room 913~~		* Building 347 - SupportLab
	~~(in the North-East corner of the building, in the basement.~~
	~~Note that if you enter the building from the East, you enter directly into the basement.)~~
	\|-		\|-
	!style="background:silver; color:black;" align="center" valign="center" width="60"\|Performance		!style="background:silver; color:black;" align="center" valign="center" width="60"\|Performance

Pevo at 08:03, 8 May 2025

2025-05-08T08:03:13Z

← Older revision		Revision as of 10:03, 8 May 2025
Line 12:		Line 12:
	In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use.		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use.

	Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] to be authorized to use the tabletop SEM, but an an individual training to the SEM is of course required.		Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] to be authorized to use the tabletop SEM, but an individual training to the SEM is of course required.

	The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

Pevo at 07:49, 8 May 2025

2025-05-08T07:49:45Z

← Older revision		Revision as of 09:49, 8 May 2025
Line 10:		Line 10:
	The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.		The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.

	In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] to be authorized to use the tabletop SEM, but an an individual training to the SEM is of course required.		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use.

			Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] to be authorized to use the tabletop SEM, but an an individual training to the SEM is of course required.

	The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

Pevo at 07:49, 8 May 2025

2025-05-08T07:49:30Z

← Older revision		Revision as of 09:49, 8 May 2025
Line 10:		Line 10:
	The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.		The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.

	In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course]		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course] to be authorized to use the tabletop SEM, but an an individual training to the SEM is of course required.






	to be authorized to use the tabletop SEM.

	The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

Pevo at 07:47, 8 May 2025

2025-05-08T07:47:47Z

← Older revision		Revision as of 09:47, 8 May 2025
Line 10:		Line 10:
	The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.		The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.

	In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the SEM Tool Package Training course to be authorized to use the tabletop SEM.		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM Tool Package Training course]






			to be authorized to use the tabletop SEM.

	The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

Reet at 13:41, 4 March 2025

2025-03-04T13:41:38Z

← Older revision		Revision as of 15:41, 4 March 2025
Line 4:		Line 4:
	''All contents by DTU Nanolab staff unless otherwise attributed.''		''All contents by DTU Nanolab staff unless otherwise attributed.''

	[[image:Tabletop SEM.jpg\|400x400px\|right\|thumb\|The SEM Tabletop 1, currently located in building ~~451~~, room ~~913~~ (as of ~~2023~~).]]		[[image:Tabletop SEM.jpg\|400x400px\|right\|thumb\|The SEM Tabletop 1, currently located in building 346, room 151 (as of 2025).]]

	=SEM Tabletop 1=		=SEM Tabletop 1=
Line 10:		Line 10:
	The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.		The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.

	~~The~~ tabletop SEM ~~was installed~~ at ~~DTU~~ Nanolab ~~in January 2017~~. ~~It has a thermionic filament made~~ of ~~tungsten and is equipped~~ with ~~two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.. The chamber is relatively small, so sample loading~~ is fast and easy. ~~The stage is moved manually in~~ the ~~X and Y directions by turning two knobs on the door to the SEM chamber. It~~ is not ~~possible~~ to ~~adjust~~ the ~~height of the stage, and it is not possible~~ to ~~rotate and tilt samples. However, samples can~~ be ~~mounted on pinstubs with a fixed tilt angle~~.		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the SEM Tool Package Training course to be authorized to use the tabletop SEM.

	~~In this~~ SEM ~~little effort is required to obtain decent SEM images~~. ~~However, the tabletop SEM~~ has a ~~limited resolution~~ and a ~~limited number of settings you can optimize compared to the other SEMs at Nanolab~~. ~~For inspection of samples with structures in the micrometer range it~~ is ~~very~~ fast and easy to ~~use~~. ~~Unlike~~ the ~~other SEMs at Nanolab~~ it is not ~~necessary to take the SEM Tool Package Training course~~ to be ~~authorized to use the tabletop SEM~~.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

	The SEM can be operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible to inspect insulating samples, because the higher density of gas molecules will eliminate ~~the charges~~ at the cost of a slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including ~~isolating~~ samples without much sample preparation. If your sample charges a lot or you need higher resolution than what is possible in charge-up reduction mode, you also have the option to coat your sample with gold using [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater#Sputter_coater_03 Sputter Coater 03].		The SEM can be operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible to inspect insulating samples, because the higher density of gas molecules will eliminate charge at the cost of a slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including insulating samples without much sample preparation. If your sample charges a lot or you need higher resolution than what is possible in charge-up reduction mode, you also have the option to coat your sample with gold using [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater#Sputter_coater_03 Sputter Coater 03].

	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

Reet at 12:39, 13 June 2023

2023-06-13T12:39:16Z

← Older revision		Revision as of 14:39, 13 June 2023
Line 2:		Line 2:
	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Tabletop_1 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Tabletop_1 click here]'''

	''~~This page is written~~ by DTU Nanolab ~~internal~~''		''All contents by DTU Nanolab staff unless otherwise attributed.''

	[[image:Tabletop SEM.jpg\|400x400px\|right\|thumb\|SEM Tabletop 1 located in building ~~347 - Packlab~~]]		[[image:Tabletop SEM.jpg\|400x400px\|right\|thumb\|The SEM Tabletop 1, currently located in building 451, room 913 (as of 2023).]]

	=SEM Tabletop 1=		=SEM Tabletop 1=

Reet: /* SEM Tabletop 1 */

2023-06-13T12:37:50Z

SEM Tabletop 1

← Older revision		Revision as of 14:37, 13 June 2023
Line 8:		Line 8:
	=SEM Tabletop 1=		=SEM Tabletop 1=

	The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens~~. This important and widely used analytical tool provides images~~ with ~~very~~ good resolution ~~and~~ depth of field, and a minimal sample preparation ~~is required~~.		The SEM Tabletop 1 is a scanning electron microscope. It produces enlarged images of a variety of specimens with good resolution, large depth of field, and minimal sample preparation.

	The tabletop SEM has a thermionic filament made of tungsten.		The tabletop SEM was installed at DTU Nanolab in January 2017. It has a thermionic filament made of tungsten and is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.. The chamber is relatively small, so sample loading is fast and easy. The stage is moved manually in the X and Y directions by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

	~~The SEM chamber is relatively small, so sample loading can be done fast and easy.~~		In this SEM little effort is required to obtain decent SEM images. However, the tabletop SEM has a limited resolution and a limited number of settings you can optimize compared to the other SEMs at Nanolab. For inspection of samples with structures in the micrometer range it is very fast and easy to use. Unlike the other SEMs at Nanolab it is not necessary to take the SEM Tool Package Training course to be authorized to use the tabletop SEM.

	The stage is moved manually in the X and Y directions by turning two knobs on the door to the SEM chamber. It is not possible to adjust the height of the stage, and it is not possible to rotate and tilt samples. However, samples can be mounted on pinstubs with a fixed tilt angle.

	~~Many sample materials are allowed in the~~ this SEM, including all standard cleanroom materials and samples from the Laser Micromachining tool and the Polymer Injection Molding tool. Some other materials, including biological materials, are also allowed if they have been approved by Nanolab.

	It is ~~not needed to perform much optimization in order~~ to obtain ~~good~~ SEM images. However, the tabletop SEM has a limited resolution compared to the other SEMs at Nanolab~~, but for~~ inspection of samples with structures in the micrometer range it is very fast and easy to use. ~~It is not necessary to be an autorized user of~~ the other SEMs at Nanolab to ~~use~~ the ~~tabletop~~ SEM.

	~~The SEM can~~ be ~~operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible~~ to ~~inspect isolating samples, because~~ the higher density of gas molecules will eliminate the charges at the cost of a slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including isolating samples without much sample preparation.

	~~The~~ SEM ~~is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.~~

	~~The SEM Tabletop 1 was installed at DTU Nanolab in January 2017~~.

			The SEM can be operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible to inspect insulating samples, because the higher density of gas molecules will eliminate the charges at the cost of a slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including isolating samples without much sample preparation. If your sample charges a lot or you need higher resolution than what is possible in charge-up reduction mode, you also have the option to coat your sample with gold using [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Sputter_coater#Sputter_coater_03 Sputter Coater 03].

	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

Reet: /* Equipment performance */

2023-06-13T12:27:47Z

Equipment performance

← Older revision		Revision as of 14:27, 13 June 2023
Line 96:		Line 96:
	\| style="background:LightGrey; color:black"\|Allowed materials		\| style="background:LightGrey; color:black"\|Allowed materials
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	* Any standard cleanroom material ~~and~~ samples from the Laser Micromachining tool and the Polymer Injection Molding tool		* Any standard cleanroom material, samples from the Laser Micromachining tool and the Polymer Injection Molding tool
			* 3D printed polymers
			* Pyrolyzed graphite.
	* Some biological samples (ask for permission)		* Some biological samples (ask for permission)
	\|-		\|-
	\|}		\|}

Reet: /* Equipment performance */

2023-06-13T12:25:55Z

Equipment performance

← Older revision		Revision as of 14:25, 13 June 2023
Line 55:		Line 55:
	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	* Building ~~347~~ - ~~Packlab~~		* Building 451 - room 913
			(in the North-East corner of the building, in the basement.
			Note that if you enter the building from the East, you enter directly into the basement.)
	\|-		\|-
	!style="background:silver; color:black;" align="center" valign="center" width="60"\|Performance		!style="background:silver; color:black;" align="center" valign="center" width="60"\|Performance