Specific Process Knowledge/Characterization/SEM Supra 3 - Revision history

Pevo: /* Equipment performance */

2025-08-04T13:42:44Z

Equipment performance

← Older revision		Revision as of 15:42, 4 August 2025
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	\|style="background:LightGrey; color:black"\|Batch size		\|style="background:LightGrey; color:black"\|Batch size
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Up to 6" wafer with full view		*Up to 4" wafer with full view
			*Up to 6" wafer with full view, requires rotation of the wafer
	\|-		\|-
	\| style="background:LightGrey; color:black"\|Allowed materials		\| style="background:LightGrey; color:black"\|Allowed materials

Pevo: /* Equipment performance */

2025-08-04T13:39:33Z

Equipment performance

← Older revision		Revision as of 15:39, 4 August 2025
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	\|style="background:LightGrey; color:black"\|Detectors		\|style="background:LightGrey; color:black"\|Detectors
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Secondary electron (~~Se2~~)		*Secondary electron (SE2)
	*Inlens secondary electron (Inlens)		*Inlens secondary electron (Inlens)
	*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)		*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)

Pevo: /* SEM Supra 3 */

2025-08-04T13:37:57Z

SEM Supra 3

← Older revision		Revision as of 15:37, 4 August 2025
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	=SEM Supra 3=		=SEM Supra 3=

	The SEM Supra 3 is a scanning electron microscope (SEM). It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and ~~requires~~ minimal specimen preparation.		The SEM Supra 3 is a scanning electron microscope (SEM). It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field, and minimal specimen preparation is required.

	This SEM is equipped two secondary electron (SE) detectors: An SE2 detector located on one side inside the chamber and an Inlens detector located inside the column.		This SEM is equipped two secondary electron (SE) detectors: An SE2 detector located on one side inside the chamber and an Inlens detector located inside the column.
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	The SEM also has an a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.		The SEM also has an a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.

	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber and using a dedicated VPSE detector it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.		The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber and using a dedicated VPSE (Variable Pressure Secondary Electron) detector it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.

	The SEM Supra 3 is located in the cleanroom. It was installed in September 2015.		The SEM Supra 3 is located in the cleanroom. It was installed in September 2015.

Pevo: /* SEM Supra 3 */

2025-08-04T13:35:47Z

SEM Supra 3

← Older revision		Revision as of 15:35, 4 August 2025
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	=SEM Supra 3=		=SEM Supra 3=

	The SEM Supra 3 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.		The SEM Supra 3 is a scanning electron microscope (SEM). It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

	~~The~~ SEM is ~~a VP~~ (~~variable pressure~~) ~~instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in~~ the chamber ~~it is possible to image isolating samples. The higher density of gas molecules will eliminate~~ the ~~charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work~~.		This SEM is equipped two secondary electron (SE) detectors: An SE2 detector located on one side inside the chamber and an Inlens detector located inside the column.

	~~This~~ SEM ~~is equipped with~~ a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.		The SEM also has an a HDAsB (High Definition four quadrant Angular Selective Backscattered electron) detector. This detector is sitting at the end of the column where the final cap is placed in the other SEMs. To avoid collision between the HDAsB detector and samples/sample holders, a set of rules have been introduced on the SEM Supra 3 that most importantly implies that the sample holder and the sample dimensions have to be noted in the software.

			The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber and using a dedicated VPSE detector it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.

	The SEM Supra 3 is located in the cleanroom. It was installed in September 2015.		The SEM Supra 3 is located in the cleanroom. It was installed in September 2015.

Pevo at 11:55, 6 February 2023

2023-02-06T11:55:07Z

← Older revision		Revision as of 13:55, 6 February 2023
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_3 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_3 click here]'''

			''This page is written by DTU Nanolab internal''

	[[image:LA_SEM_Supra_3.jpg\|400x400px\|right\|thumb\|The SEM Supra 3 located in cleanroom C-1]]		[[image:LA_SEM_Supra_3.jpg\|400x400px\|right\|thumb\|The SEM Supra 3 located in cleanroom C-1]]

Reet: /* Quality control of length measurement */ corrected link

2020-05-19T13:03:13Z

Quality control of length measurement: corrected link

← Older revision		Revision as of 15:03, 19 May 2020
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	\|		\|
	*[http://labmanager.dtu.dk/d4Show.php?id=~~2493~~&mach=361 QC procedure for SEM Supra 3]<br>		*[http://labmanager.dtu.dk/d4Show.php?id=4745&mach=361 QC procedure for SEM Supra 3]<br>
	*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=361 Newest QC data for SEM Supra 3]<br>		*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=361 Newest QC data for SEM Supra 3]<br>

Reet: /* Equipment performance */ added QC section

2020-05-19T13:01:35Z

Equipment performance: added QC section

@@ Line 88: / Line 88: @@
 *Any standard cleanroom material
 |-
 |}

Jmli at 18:31, 25 November 2019

2019-11-25T18:31:10Z

← Older revision		Revision as of 20:31, 25 November 2019
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_3 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_3 click here]'''

Jmli: /* Equipment performance */

2019-11-25T18:30:39Z

Equipment performance

← Older revision		Revision as of 20:30, 25 November 2019
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	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Cleanroom of DTU ~~Danchip~~		*Cleanroom of DTU Nanolab
	\|-		\|-
	!style="background:silver; color:black;" align="center" width="60"\|Performance		!style="background:silver; color:black;" align="center" width="60"\|Performance

Pevo at 12:40, 31 July 2018

2018-07-31T12:40:14Z

← Older revision		Revision as of 14:40, 31 July 2018
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	=SEM Supra 3=		=SEM Supra 3=

	The SEM Supra 3 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.		The SEM Supra 3 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.		The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.