Specific Process Knowledge/Characterization/SEM Supra 2 - Revision history

Pevo: /* Quality control of length measurement */

2026-04-09T08:25:48Z

Quality control of length measurement

← Older revision		Revision as of 10:25, 9 April 2026
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	\|}		\|}

	==Quality control of length ~~measurement~~ ==		==Quality control of length measurements ==
	{\| border="1" cellspacing="2" cellpadding="2" colspan="3"		{\| border="1" cellspacing="2" cellpadding="2" colspan="3"
	\|bgcolor="#98FB98" \|'''Quality Control (QC) for SEM Supra 2'''		\|bgcolor="#98FB98" \|'''Quality Control (QC) for SEM Supra 2'''

Pevo at 08:21, 9 April 2026

2026-04-09T08:21:52Z

← Older revision		Revision as of 10:21, 9 April 2026
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	The SEM Supra 2 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.		The SEM Supra 2 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.		The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work, and a dedicated VPSE detector have to be used instead.

	This SEM has large chamber volume compared to the other SEM's in the cleanroom at DTU Nanolab. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.		This SEM has large chamber volume compared to the other SEM's in the cleanroom at DTU Nanolab. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.

Pevo: /* SEM Supra 2 */

2026-04-09T08:20:41Z

SEM Supra 2

← Older revision		Revision as of 10:20, 9 April 2026
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	All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.		All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.

	The SEM is equipped with an Oxford Instruments EDX detector and ~~AZtec~~ software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.		The SEM is equipped with an Oxford Instruments Aztec Advanced Ultim 65 mm2 SDD EDX detector and Aztec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.

	The SEM Supra 2 in located in the cleanroom. It was installed in December 2013.		The SEM Supra 2 in located in the cleanroom. It was installed in December 2013.

Pevo: /* Equipment performances */

2026-04-09T08:20:09Z

Equipment performances

← Older revision		Revision as of 10:20, 9 April 2026
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*1-2 nm (limited by vibrations)		*1-2 nm (limited by vibrations)
	The resolution is strongly dependent on the type ~~of sample~~ and the skills of the operator.		The resolution is strongly dependent on the SEM settings, the sample type and the skills of the operator
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="5"\|Instrument specifics		!style="background:silver; color:black" align="center" valign="center" rowspan="5"\|Instrument specifics
	\|style="background:LightGrey; color:black"\|Detectors		\|style="background:LightGrey; color:black"\|Detectors
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Secondary electron (~~Se2~~)		*Secondary electron (SE2)
	*Inlens secondary electron (Inlens)		*Inlens secondary electron (Inlens)
	*4 Quadrant Backscatter electron (QBSD)
	*Variable pressure secondary electron (VPSE)		*Variable pressure secondary electron (VPSE)
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Stage		\|style="background:LightGrey; color:black"\|Stage
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*X, Y: 150 × 150 mm		*X, Y: 150 mm × 150 mm
	*T: -10 to 70<sup>o</sup>		*T: -10 to 70<sup>o</sup>
	*R: 360<sup>o</sup>		*R: 360<sup>o</sup>
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	\|style="background:LightGrey; color:black"\|Operating pressures		\|style="background:LightGrey; color:black"\|Operating pressures
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Fixed at High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)		*Fixed at High vacuum (2 × 10<sup>-4</sup >mbar - 10<sup>-6</sup> mbar)
	*Variable at Low vacuum (0.1 mbar - 2 mbar)		*Variable at Low vacuum (0.1 mbar - 2 mbar)
	\|-		\|-
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	*Antivibration platform		*Antivibration platform
	*Fjeld M-200 airlock taking up to 8" wafers		*Fjeld M-200 airlock taking up to 8" wafers
	*Oxford Instruments ~~X-Max<sup>N</sup> 50~~ mm<sup>2</sup> SDD EDX detector and ~~AZtec~~ software package		*Oxford Instruments Aztec Advanced Ultim 65 mm<sup>2</sup> SDD EDX detector and Aztec software package
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Substrates		!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Substrates

Pevo at 08:11, 9 April 2026

2026-04-09T08:11:19Z

← Older revision		Revision as of 10:11, 9 April 2026
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	The SEM Supra 2 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.		The SEM Supra 2 is a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the ~~Se2~~ and InLens detectors will no longer work.		The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.

	This SEM has large chamber volume compared to the other SEM's in the cleanroom at DTU Nanolab. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.		This SEM has large chamber volume compared to the other SEM's in the cleanroom at DTU Nanolab. An 8" wafer can be loaded in the chamber, however the X and Y ranges only provide full view of a 6" wafer.
Line 16:		Line 16:
	All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.		All samples must be introduced into the chamber using an airlock. The airlock greatly reduces sample exchange times, and it accepts up to 8" wafer holders.

	The SEM is equipped with an Oxford Instruments ~~X-MaxN 50~~ EDX detector and AZtec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.		The SEM is equipped with an Oxford Instruments EDX detector and AZtec software. EDX (Energy dispersive X-ray) detection is used for element composition analysis in a small area. A specific training is needed for users that want to use the EDX detector.

	The SEM ~~Supra2~~ in located in the cleanroom. It was installed in December 2013.		The SEM Supra 2 in located in the cleanroom. It was installed in December 2013.

Pevo at 08:09, 9 April 2026

2026-04-09T08:09:39Z

← Older revision		Revision as of 10:09, 9 April 2026
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	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

	[[image:SEM_Supra_2.jpg\|~~450x450px~~\|right\|thumb\|The SEM Supra 2 is located in cleanroom C-1. {{photo1}} ]]		[[image:SEM_Supra_2.jpg\|500x500px\|right\|thumb\|The SEM Supra 2 is located in cleanroom C-1. {{photo1}} ]]

	=SEM Supra 2=		=SEM Supra 2=

Pevo at 08:09, 9 April 2026

2026-04-09T08:09:23Z

← Older revision		Revision as of 10:09, 9 April 2026
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	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

	[[image:~~IMAG0188~~.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 is located in cleanroom C-1. {{photo1}} ]]		[[image:SEM_Supra_2.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 is located in cleanroom C-1. {{photo1}} ]]

	=SEM Supra 2=		=SEM Supra 2=

Jmli at 09:49, 28 June 2023

2023-06-28T09:49:10Z

← Older revision		Revision as of 11:49, 28 June 2023
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	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

	[[image:IMAG0188.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 located in cleanroom C-1]]		[[image:IMAG0188.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 is located in cleanroom C-1. {{photo1}} ]]

	=SEM Supra 2=		=SEM Supra 2=

Pevo at 11:54, 6 February 2023

2023-02-06T11:54:46Z

← Older revision		Revision as of 13:54, 6 February 2023
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_2 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_2 click here]'''

			''This page is written by DTU Nanolab internal''

	[[image:IMAG0188.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 located in cleanroom C-1]]		[[image:IMAG0188.jpg\|450x450px\|right\|thumb\|The SEM Supra 2 located in cleanroom C-1]]

Reet: /* Quality control of length measurement */ corrected link

2020-05-19T13:04:10Z

Quality control of length measurement: corrected link

← Older revision		Revision as of 15:04, 19 May 2020
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	*[http://labmanager.dtu.dk/d4Show.php?id=~~2493~~&mach=327 QC procedure for SEM Supra 2]<br>		*[http://labmanager.dtu.dk/d4Show.php?id=3531&mach=327 QC procedure for SEM Supra 2]<br>
	*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=327 Newest QC data for SEM Supra 2]<br>		*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=327 Newest QC data for SEM Supra 2]<br>