Specific Process Knowledge/Characterization/SEM Supra 1 - Revision history

Pevo: /* SEM Supra 1 */

2025-08-04T13:54:53Z

SEM Supra 1

← Older revision		Revision as of 15:54, 4 August 2025
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	=SEM Supra 1=		=SEM Supra 1=

	The SEM Supra 1 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and ~~requires~~ minimal specimen preparation.		The SEM Supra 1 is a scanning electron microscope (SEM). It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field, and minimal specimen preparation is required.

	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the ~~Se2~~ and InLens detectors will no longer work.		This SEM is equipped two secondary electron (SE) detectors: An SE2 detector located on one side inside the chamber and an Inlens detector located inside the column. The SEM also has a backscatter electron detector: A BSD detector

			The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber and using a dedicated VPSE (Variable Pressure Secondary Electron) detector it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the SE2 and InLens detectors will no longer work.

	The SEM is the training for fabrication SEM at DTU Nanolab. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.		The SEM is the training for fabrication SEM at DTU Nanolab. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.
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	The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.		The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.

	The ~~Balzer~~ Sputter is located in the same room as the SEM Supra 1 and can be used to cover samples (for instance polymer samples ~~from the Polymer Injection Molding tool~~) with a thin gold layer before SEM inspection to avoid charging problems.		The Sputter Coater 03 is located in the same room as the SEM Supra 1 and can be used to cover non-conductive samples (for instance glass or polymer samples) with a thin gold layer before SEM inspection to avoid charging problems.

			Only users with samples that are somehow related to the work taking place in building 346 and 347 (the characterization part of DTU Nanolab). Other users will have to use the SEMs in building 314 (the characterization part of DTU Nanolab).

	~~Only users with samples that are somehow related to the cleanroom can use this SEM. Other users will have to contact DTU CEN.~~

Jmli at 09:48, 28 June 2023

2023-06-28T09:48:37Z

← Older revision		Revision as of 11:48, 28 June 2023
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	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

	[[image:LA_SEM_Supra_1.jpg\|400x400px\|right\|thumb\|The SEM Supra 1 located in basement 346-907]]		[[image:LA_SEM_Supra_1.jpg\|400x400px\|right\|thumb\|The SEM Supra 1 located in basement 346-907.{{photo1}} ]]

	=SEM Supra 1=		=SEM Supra 1=

Pevo at 11:54, 6 February 2023

2023-02-06T11:54:08Z

← Older revision		Revision as of 13:54, 6 February 2023
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_1 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_Supra_1 click here]'''
	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->

			''This page is written by DTU Nanolab internal''

	[[image:LA_SEM_Supra_1.jpg\|400x400px\|right\|thumb\|The SEM Supra 1 located in basement 346-907]]		[[image:LA_SEM_Supra_1.jpg\|400x400px\|right\|thumb\|The SEM Supra 1 located in basement 346-907]]

Reet: /* Quality control of length measurement */ corrected link

2020-05-19T12:51:25Z

Quality control of length measurement: corrected link

← Older revision		Revision as of 14:51, 19 May 2020
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	\|-		\|-
	\|		\|
	*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=~~304~~ QC procedure for SEM Supra 1]<br>		*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=275 QC procedure for SEM Supra 1]<br>
	*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>		*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>

Reet: /* Quality control of length measurement 70px */

2020-05-19T12:48:41Z

Quality control of length measurement 70px

← Older revision		Revision as of 14:48, 19 May 2020
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	\|}		\|}

	===Quality control of length measurement ~~[[Image:section under construction.jpg\|70px]]~~===		===Quality control of length measurement ===
	{\| border="1" cellspacing="2" cellpadding="2" colspan="3"		{\| border="1" cellspacing="2" cellpadding="2" colspan="3"
	\|bgcolor="#98FB98" \|'''Quality Control (QC) for SEM Supra 1'''		\|bgcolor="#98FB98" \|'''Quality Control (QC) for SEM Supra 1'''

Reet: /* Quality control of length measurement accuracy 70px */

2020-05-19T12:48:28Z

Quality control of length measurement accuracy 70px

← Older revision		Revision as of 14:48, 19 May 2020
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	\|}		\|}

	===Quality control of length measurement ~~accuracy~~ [[Image:section under construction.jpg\|70px]]===		===Quality control of length measurement [[Image:section under construction.jpg\|70px]]===
	{\| border="1" cellspacing="2" cellpadding="2" colspan="3"		{\| border="1" cellspacing="2" cellpadding="2" colspan="3"
	\|bgcolor="#98FB98" \|'''Quality Control (QC) for ~~DektakXTA~~'''		\|bgcolor="#98FB98" \|'''Quality Control (QC) for SEM Supra 1'''
	\|-		\|-
	\|		\|
	*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for SEM Supra 1]<br>		*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for SEM Supra 1]<br>
	*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>		*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=275 Newest QC data for SEM Supra 1]<br>

			'''QC limits:'''
	{\| {{table}}		{\| {{table}}
	\| align="center" valign="top"\|		\| align="center" valign="top"\|
	{\| border="2" cellspacing="1" cellpadding="2" align="center" style="width:~~300px~~"		{\| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"

	! Detector		! Detector
	! ~~Measurement settings~~		! Settings
	! Magnification		! Magnification
	! Measured dimensions		! Measured dimensions
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	\| EHT 10 kV, WD 10 mm		\| EHT 10 kV, WD 10 mm
	\| 2.500 k		\| 2.500 k
	\| 70x70 ~~microns~~		\| 70x70 μm
	\| ± 2 %		\| ± 2 %
	\| ± 3 %		\| ± 3 %
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	\| EHT 10 kV, WD 10 mm		\| EHT 10 kV, WD 10 mm
	\| 17.000 k		\| 17.000 k
	\| 10x10 ~~microns~~		\| 10x10 μm
	\| ± 2 %		\| ± 2 %
	\| ± 3 %		\| ± 3 %
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	\| EHT 5 kV, WD 5 mm		\| EHT 5 kV, WD 5 mm
	\| 17.000 k		\| 17.000 k
	\| 10x10 ~~microns~~		\| 10x10 μm
	\| ± 2 %		\| ± 2 %
	\| ± 3 %		\| ± 3 %
			\|-

			\| VPSE
			\| EHT 10 kV, WD 10 mm, 17 Pa
			\| 17.000 k
			\| 10x10 μm
			\| ± 2 %
			\| ± 3 %
			\|-

			\| InLens
			\| EHT 5 kV, WD 5 mm
			\| 200.000 k
			\| 1x1 μm
			\| ± 2 %
			\| ± 3 %
			\|-

			\| InLens
			\| EHT 10 kV, WD 3 mm
			\| 1.000.000 k
			\| (imaging only)
			\| NA
			\| NA
	\|-		\|-

Reet: /* Equipment performance */ added QC section

2020-05-19T11:53:10Z

Equipment performance: added QC section

@@ Line 92: / Line 92: @@
 *Any standard cleanroom material and samples from the Laser Micromachining tool and the Polymer Injection Molding tool
 |-
 |}

Reet: /* SEM Supra 1 */

2020-03-23T13:55:48Z

SEM Supra 1

← Older revision		Revision as of 15:55, 23 March 2020
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	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=~~327~~ SEM Supra 1 info page in LabManager],		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=275 SEM Supra 1 info page in LabManager],

Jmli: /* Equipment performance */

2019-11-25T18:40:27Z

Equipment performance

← Older revision		Revision as of 20:40, 25 November 2019
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	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Basement of ~~DTU Danchip~~		*Basement of building 346
	\|-		\|-
	!style="background:silver; color:black;" align="center" width="60"\|Performance		!style="background:silver; color:black;" align="center" width="60"\|Performance

Jmli: /* SEM Supra 1 */

2019-11-25T18:40:03Z

SEM Supra 1

← Older revision		Revision as of 20:40, 25 November 2019
Line 10:		Line 10:
	The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.		The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.

	The SEM is the training SEM at DTU ~~Danchip~~. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.		The SEM is the training for fabrication SEM at DTU Nanolab. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.

	The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.		The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.