Specific Process Knowledge/Characterization/SEM LEO - Revision history

Mmat: /* Performance */

2025-09-17T12:03:29Z

Performance

← Older revision		Revision as of 14:03, 17 September 2025
Line 12:		Line 12:

	In her later years the SEM LEO was equipped with a Raith e-beam lithography system and was exclusively dedicated to the users of the Raith E-beam lithography.		In her later years the SEM LEO was equipped with a Raith e-beam lithography system and was exclusively dedicated to the users of the Raith E-beam lithography.

	~~== Performance==~~

	*[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy\|SEM comparison page]]

	*[[Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy\|Raith Elphy e-beam lithography system]]

	===Typical current values for EBL===		===Typical current values for EBL===

Mmat at 14:09, 2 June 2025

2025-06-02T14:09:29Z

← Older revision		Revision as of 16:09, 2 June 2025
Line 4:		Line 4:
	<br>		<br>
	<br>		<br>
	'''<p style="color:red;">The SEM LEO has been decomissioned and relocated to DTU Mechanics.</p>'''		'''<p style="color:red;">The SEM LEO has been decomissioned and relocated to DTU Mechanics in 2020.</p>'''

	=SEM LEO=		=SEM LEO=

Mmat: /* SEM LEO */

2025-06-02T14:09:18Z

SEM LEO

← Older revision		Revision as of 16:09, 2 June 2025
Line 11:		Line 11:
	The SEM LEO was a very reliable and rugged instrument that provided high quality SEM images of most samples and it served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers were acquired by the thousands on the SEM.		The SEM LEO was a very reliable and rugged instrument that provided high quality SEM images of most samples and it served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers were acquired by the thousands on the SEM.

	In her later years the SEM LEO was equipped with a Raith e-beam lithography system and was exclusively dedicated to the users of the Raith E-beam lithography~~. Decommissioned in early summer 2020, she is at DTU Mechanics~~.		In her later years the SEM LEO was equipped with a Raith e-beam lithography system and was exclusively dedicated to the users of the Raith E-beam lithography.

	~~'''The user manual, control instruction and the user APV can still be found in LabManager:'''~~		== Performance==

	~~[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=37 SEM LEO info page in LabManager],~~



	== Performance ~~information~~ ==

	*[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy\|SEM comparison page]]		*[[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy\|SEM comparison page]]

Mmat at 14:08, 2 June 2025

2025-06-02T14:08:25Z

← Older revision		Revision as of 16:08, 2 June 2025
Line 1:		Line 1:
			{{cc-nanolab}}

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''
			<br>
	~~''This page is written by DTU Nanolab internal''~~		<br>

	'''<p style="color:red;">The SEM LEO has been decomissioned and relocated to DTU Mechanics.</p>'''		'''<p style="color:red;">The SEM LEO has been decomissioned and relocated to DTU Mechanics.</p>'''

			=SEM LEO=
	[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]		[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]

Mmat at 14:07, 2 June 2025

2025-06-02T14:07:51Z

← Older revision		Revision as of 16:07, 2 June 2025
Line 4:		Line 4:
	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

	=The SEM LEO has been ~~decommissioned~~ and relocated to DTU Mechanics=		'''<p style="color:red;">The SEM LEO has been decomissioned and relocated to DTU Mechanics.</p>'''

	[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]		[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]

Pevo at 11:53, 6 February 2023

2023-02-06T11:53:37Z

← Older revision		Revision as of 13:53, 6 February 2023
Line 2:		Line 2:
	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''

			''This page is written by DTU Nanolab internal''

	=The SEM LEO has been decommissioned and relocated to DTU Mechanics=		=The SEM LEO has been decommissioned and relocated to DTU Mechanics=

Jmli: /* The SEM LEO has been decommissioned and relocated to DTU Mechanics */

2020-11-16T14:44:36Z

The SEM LEO has been decommissioned and relocated to DTU Mechanics

← Older revision		Revision as of 16:44, 16 November 2020
Line 7:		Line 7:
	[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]		[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]

	The SEM LEO ~~is a scanning electron microscope. It is~~ a very reliable and rugged instrument that ~~provides~~ high quality SEM images of most samples, and it ~~has excellently~~ served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers ~~may be~~ acquired on the SEM.		The SEM LEO was a very reliable and rugged instrument that provided high quality SEM images of most samples and it served the users of the cleanroom for many years. Excellent images on a large variety of materials such as semiconductors, semiconductor oxides or nitrides, metals, thin films and some polymers were acquired by the thousands on the SEM.

	~~However,~~ the SEM LEO ~~has now been~~ equipped with a Raith e-beam lithography system, and ~~from the turn of the year 2015-2016 it is~~ exclusively dedicated to the users of the Raith E-beam lithography, ~~so general imaging of user samples~~ is ~~no longer allowed~~.		In her later years the SEM LEO was equipped with a Raith e-beam lithography system and was exclusively dedicated to the users of the Raith E-beam lithography. Decommissioned in early summer 2020, she is at DTU Mechanics.

	~~The SEM LEO is located in the cleanroom. It was installed in 1998, and the software was ungraded in 2012.~~		'''The user manual, control instruction and the user APV can still be found in LabManager:'''


	'''The user manual, control instruction, the user APV ~~and contact information~~ can be found in LabManager:'''

	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=37 SEM LEO info page in LabManager],		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=37 SEM LEO info page in LabManager],

Jmli: /* SEM LEO */

2020-11-16T14:24:30Z

SEM LEO

← Older revision		Revision as of 16:24, 16 November 2020
Line 3:		Line 3:


	=SEM LEO=		=The SEM LEO has been decommissioned and relocated to DTU Mechanics=

	[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]		[[image:IMG_3290.jpg\|400x400px\|right\|thumb\|The SEM LEO located in cleanroom F-2]]

Jmli: /* Equipment performance */

2019-11-25T20:33:18Z

Equipment performance

← Older revision		Revision as of 22:33, 25 November 2019
Line 93:		Line 93:
	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Cleanroom of DTU ~~Danchip~~		*Cleanroom of DTU Nanolab
	\|-		\|-
	!style="background:silver; color:black;" align="center" width="60"\|Performance		!style="background:silver; color:black;" align="center" width="60"\|Performance

Jmli at 20:32, 25 November 2019

2019-11-25T20:32:43Z

← Older revision		Revision as of 22:32, 25 November 2019
Line 1:		Line 1:

	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SEM_LEO0 click here]'''