Specific Process Knowledge/Characterization/SEM Gemini 1 - Revision history

Jmli at 12:41, 5 February 2026

2026-02-05T12:41:30Z

← Older revision		Revision as of 14:41, 5 February 2026
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM_Gemini_1 click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM_Gemini_1 click here]'''
			<!--Checked for updates on 5/2-2026 - ok/jmli -->


	''This page is written by DTU Nanolab internal''		''This page is written by DTU Nanolab internal''

Jmli: /* Using SEM Gemini 1 */

2023-12-19T15:48:13Z

Using SEM Gemini 1

← Older revision		Revision as of 17:48, 19 December 2023
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	== Using SEM Gemini 1 ==		== Using SEM Gemini 1 ==

	Click on the link below to access the pages with information on how to use the different modes and detectors.		Click on the link below to access the pages with information on how to use the different modes and detectors[[Specific Process Knowledge/Characterization/SEM Gemini 1/use\|.]]

	'''~~[[Specific Process Knowledge/Characterization/SEM Gemini 1/use\|~~Click here]]'''		'''Click here'''

	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=512 SEM Gemini 1 info page in LabManager],		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=512 SEM Gemini 1 info page in LabManager],


	== Performance information ==		== Performance information ==

Jmli: /* SEM Gemini 1 */

2023-12-19T13:46:28Z

SEM Gemini 1

← Older revision		Revision as of 15:46, 19 December 2023
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	* Inlens SE: In-column high resolution SE detector		* Inlens SE: In-column high resolution SE detector
	* In-lens EsB: In-column highly sensitive backscatter electron (BSE) detector for obtaining good material contrast		* In-lens EsB: In-column highly sensitive backscatter electron (BSE) detector for obtaining good material contrast
	* aBSD: Retractable ~~column mounted~~ solid state BSE detector with six sectors for detection of energy and angle selective backscattered electrons, i.e. for obtaining both material and topographical contrast		* aBSD: Retractable (and motorized) solid state BSE detector with six sectors for detection of energy and angle selective backscattered electrons, i.e. for obtaining both material and topographical contrast
	* VPSE: Variable pressure (VP) light detector for SE signal detecting		* VPSE: Variable pressure (VP) light detector for SE signal detecting
	* aSTEM: Retractable solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging		* aSTEM: Retractable (and motorized) solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging

	The SEM is a VP (variable pressure) instrument, indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. It has two different VP modes: A standard VP mode like the SEM Supra 1, 2 and 3 and a NanoVP mode. In the standard VP mode, the pressure in the chamber is increased as described above, and the dedicated VPSE detectors or the aBSED detector is used to image charging samples. In Nano VP mode, an retractable beam sleeve aperture is mounted on the column, which makes is possible to use the Inlens SE and the Inlens BSE detectors to obtains high resolution images of non-conducting samples. The SE2 and sSTEM detectors will not work in VP mode.		The SEM is a VP (variable pressure) instrument, indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. It has two different VP modes: A standard VP mode like the SEM Supra 1, 2 and 3 and a NanoVP mode. In the standard VP mode, the pressure in the chamber is increased as described above, and the dedicated VPSE detectors or the aBSED detector is used to image charging samples. In Nano VP mode, an retractable beam sleeve aperture is mounted on the column, which makes is possible to use the Inlens SE and the Inlens BSE detectors to obtains high resolution images of non-conducting samples. The SE2 and sSTEM detectors will not work in VP mode.

	The SEM Gemini 1 is located in ~~the~~ cleanroom~~. It is being installed and tested in August-September 2023~~.		The SEM Gemini 1 is located in cleanroom B1.

			== Using SEM Gemini 1 ==

			Click on the link below to access the pages with information on how to use the different modes and detectors.

			'''[[Specific Process Knowledge/Characterization/SEM Gemini 1/use\|Click here]]'''

	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

Jmli: /* SEM Gemini 1 */

2023-12-19T13:17:44Z

SEM Gemini 1

← Older revision		Revision as of 15:17, 19 December 2023
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	=SEM Gemini 1=		=SEM Gemini 1=

	The SEM Gemini 1 ~~is a scanning electron microscope (SEM). It~~ is a Zeiss GeminiSEM 560 .		The SEM Gemini 1 is a Zeiss GeminiSEM 560 with a Gemini 3 column.

	The SEM produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.		The SEM produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.

Jmli at 13:16, 19 December 2023

2023-12-19T13:16:27Z

@@ Line 5: / Line 5: @@
 [[image:SEM_Gemini_1.png|600x600px|right|thumb|The SEM Gemini 1 being installed in the cleanroom. {{photo1}} ]]
 =SEM Gemini 1=
@@ Line 144: / Line 105: @@
 |-
 |}

Pevo: /* DTU Nanolab news August 2023 */

2023-08-15T11:03:07Z

DTU Nanolab news August 2023

← Older revision		Revision as of 13:03, 15 August 2023
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	====DTU Nanolab news August 2023====		====<i>DTU Nanolab news August 2023</i>====

	===DTU Nanolab introduces next-generation SEM in the cleanroom===		===DTU Nanolab introduces next-generation SEM in the cleanroom===

Pevo: /* Equipment performance */

2023-08-15T08:54:09Z

Equipment performance

← Older revision		Revision as of 10:54, 15 August 2023
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Fixed at High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)		*Fixed at High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar)
	*Variable at Low vacuum (~~0.1 mbar~~ - ~~2 mbar)~~		*Variable at Low vacuum:
			**Standard VP (variable pressure): 5-60 Pa
			**Nano VP, 350 um beamsleeve aperture: 5-150 Pa
			**Nano VP, 800 um beamsleeve aperture: 5-40 Pa
	\|-		\|-
	\|style="background:LightGrey; color:black"\|Options		\|style="background:LightGrey; color:black"\|Options
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*~~High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB)~~		*Antivibration platform
			*Electron magnetic noise cancellations system
			*Plasma cleaner
			*Sample bias option
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Substrates		!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Substrates
	\|style="background:LightGrey; color:black"\|Batch size		\|style="background:LightGrey; color:black"\|Batch size
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Up to 6" wafer with full view		*Up to 6" wafer with full view (requires rotation)
	\|-		\|-
	\| style="background:LightGrey; color:black"\|Allowed materials		\| style="background:LightGrey; color:black"\|Allowed materials

Pevo: /* Quality control of length measurement */

2023-08-15T08:52:03Z

Quality control of length measurement

@@ Line 136: / Line 136: @@
 *Any standard cleanroom material
 |-
 |}

Pevo: /* Equipment performance */

2023-08-15T08:51:20Z

Equipment performance

← Older revision		Revision as of 10:51, 15 August 2023
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	!colspan="2" border="none" style="background:silver; color:black;" align="center"\|Equipment		!colspan="2" border="none" style="background:silver; color:black;" align="center"\|Equipment
	\|style="background:WhiteSmoke; color:black"\|<b>SEM ~~Supra 3~~ (~~Supra 40VP SEM~~)</b>		\|style="background:WhiteSmoke; color:black"\|<b>SEM Gemini 1 (Zeiss GeminiSEM 560)</b>
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="1"\|Purpose		!style="background:silver; color:black" align="center" valign="center" rowspan="1"\|Purpose
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	\|style="background:LightGrey; color:black"\|Resolution		\|style="background:LightGrey; color:black"\|Resolution
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*1-2 nm (limited by vibrations)		*1-2 nm (limited by vibrations and acoustic noise)
	The resolution is strongly dependent on the type of sample and the skills of the operator.		The resolution is strongly dependent on the type of sample and the skills of the operator
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="5"\|Instrument specifics		!style="background:silver; color:black" align="center" valign="center" rowspan="5"\|Instrument specifics

Pevo: /* SEM Gemini 1 */

2023-08-15T08:49:19Z

SEM Gemini 1

← Older revision		Revision as of 10:49, 15 August 2023
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	'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''		'''The user manual, control instruction, the user APV and contact information can be found in LabManager:'''

	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=~~361~~ SEM ~~Supra 3~~ info page in LabManager],		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=512 SEM Gemini 1 info page in LabManager],