Specific Process Knowledge/Characterization/Profiler/Optical Profiler (Sensofar) acceptance test - Revision history

Bghe at 08:27, 4 September 2025

2025-09-04T08:27:08Z

← Older revision		Revision as of 10:27, 4 September 2025
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''

	=<span style="color:#FF0000"> This optical profiler has been decommissioned and replaced by the S Neox system </span> =		=<span style="color:#FF0000"> This optical profiler has been decommissioned and replaced by the S Neox system, which is very similar </span> =

	=Results from the Optical Profiler (Sensofar) acceptance test=		=Results from the Optical Profiler (Sensofar) acceptance test=

Bghe: /* Results from the Optical Profiler (Sensofar) acceptance test */

2023-02-03T09:35:06Z

Results from the Optical Profiler (Sensofar) acceptance test

← Older revision		Revision as of 11:35, 3 February 2023
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	The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with		The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with
	Pernille V. Larsen@nanolab and Berit G. Herstrøm@nanolab.		Pernille V. Larsen@ DTU nanolab and Berit G. Herstrøm @ DTU nanolab.

	==This Table shows an overview of the acceptance tests==		==This Table shows an overview of the acceptance tests==

Bghe: /* Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned */

2021-03-24T14:41:04Z

Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned

← Older revision		Revision as of 16:41, 24 March 2021
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''

	=<span style="color:#FF0000"> ~~Both RIE's (RIE1 and RIE2) for silicon based etching~~ has been decommissioned </span> =		=<span style="color:#FF0000"> This optical profiler has been decommissioned and replaced by the S Neox system </span> =

	=Results from the Optical Profiler (Sensofar) acceptance test=		=Results from the Optical Profiler (Sensofar) acceptance test=

Bghe at 14:40, 24 March 2021

2021-03-24T14:40:14Z

← Older revision		Revision as of 16:40, 24 March 2021
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''

			=<span style="color:#FF0000"> Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned </span> =

	=Results from the Optical Profiler (Sensofar) acceptance test=		=Results from the Optical Profiler (Sensofar) acceptance test=

Jmli at 16:07, 25 November 2019

2019-11-25T16:07:32Z

← Older revision		Revision as of 18:07, 25 November 2019
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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler/Optical_Profiler_(Sensofar)_acceptance_test click here]'''


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	The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with		The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with
	Pernille V. Larsen@~~Danchip~~ and Berit G. Herstrøm@~~Danchip~~.		Pernille V. Larsen@nanolab and Berit G. Herstrøm@nanolab.

	==This Table shows an overview of the acceptance tests==		==This Table shows an overview of the acceptance tests==
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	*Objective: Interferometric 50x DI		*Objective: Interferometric 50x DI
	*Z scan: VSI		*Z scan: VSI
	*Light ~~souce~~: increased gain and contrast		*Light source: increased gain and contrast

	==Results of acceptance test no. 4==		==Results of acceptance test no. 4==
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	Measurement: Depth of pattern		Measurement: Depth of pattern

	Standard profiler measurement:~~335nm~~		Standard profiler measurement:335 nm

	Acceptance criteria:Depth within ±1% from a standard profiler measurement (331.65nm-338.35nm) and repeatability (3 successive measurements) within 0.1%		Acceptance criteria:Depth within ±1% from a standard profiler measurement (331.65nm-338.35nm) and repeatability (3 successive measurements) within 0.1%
Line 248:		Line 248:

	'''Settings:'''		'''Settings:'''
	Two different setting were tried out, the second was the most ~~succesful~~:		Two different setting were tried out, the second was the most successful:

	Setting no. 1:		Setting no. 1:
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	Acceptance criteria: Repeatability within 0.2%		Acceptance criteria: Repeatability within 0.2%

	Note: Because the surface roughness of the sample was very low and the noise/vibration level too high we could not obtain the specified ~~repeatibility~~.		Note: Because the surface roughness of the sample was very low and the noise/vibration level too high we could not obtain the specified repeatability.


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	'''Result'''		'''Result'''
	*The surface roughness (Ra) was 0.5nm		*The surface roughness (Ra) was 0.5nm
	*The ~~repeatebility~~ over 10 measurements was 34%		*The repeatability over 10 measurements was 34%
	*The maximum deviation in roughness was 0.2nm		*The maximum deviation in roughness was 0.2nm

Bghe: /* Results of acceptance test no. 4 */

2018-08-16T06:03:47Z

Results of acceptance test no. 4

← Older revision		Revision as of 08:03, 16 August 2018
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	\| align="center" style="background:#f0f0f0;"\|'''Repeated 20180816 after repair'''		\| align="center" style="background:#f0f0f0;"\|'''Repeated 20180816 after repair'''
	\|-		\|-
	\| 1\|\|337.5\|\|347.9\|\|		\| 1\|\|337.5\|\|347.9\|\|341.1
	\|-		\|-
	\| 2\|\|336.5\|\|333.9\|\|		\| 2\|\|336.5\|\|333.9\|\|340.4
	\|-		\|-
	\| 3\|\|334.7\|\|341.5\|\|		\| 3\|\|334.7\|\|341.5\|\|337.2
	\|-		\|-
	\| 4\|\|335.5\|\|343.2\|\|		\| 4\|\|335.5\|\|343.2\|\|330.8
	\|-		\|-
	\| 5\|\|339.2\|\|347.7\|\|		\| 5\|\|339.2\|\|347.7\|\|339.0
	\|-		\|-
	\| 6\|\|337.2\|\|345.4\|\|		\| 6\|\|337.2\|\|345.4\|\|340.0
	\|-		\|-
	\| 7\|\|334.2\|\|341.8\|\|		\| 7\|\|334.2\|\|341.8\|\|338.8
	\|-		\|-
	\| 8\|\|335.5\|\|337.9\|\|		\| 8\|\|335.5\|\|337.9\|\|339.8
	\|-		\|-
	\| 9\|\|341.1\|\|342.1\|\|		\| 9\|\|341.1\|\|342.1\|\|334.6
	\|-		\|-
	\| 10\|\|344.4\|\|335.9\|\|		\| 10\|\|344.4\|\|335.9\|\|336.4
	\|-		\|-
	\|Average depth\|\|337.58\|\|341.73\|\|337.82		\|Average depth\|\|337.58\|\|341.73\|\|337.82

Bghe: /* Results of acceptance test no. 4 */

2018-08-16T06:01:39Z

Results of acceptance test no. 4

← Older revision		Revision as of 08:01, 16 August 2018
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	\| align="center" style="background:#f0f0f0;"\|'''Measured depth [nm]'''		\| align="center" style="background:#f0f0f0;"\|'''Measured depth [nm]'''
	\| align="center" style="background:#f0f0f0;"\|'''Repeated 20170925 with cover off'''		\| align="center" style="background:#f0f0f0;"\|'''Repeated 20170925 with cover off'''
			\| align="center" style="background:#f0f0f0;"\|'''Repeated 20180816 after repair'''
	\|-		\|-
	\| 1\|\|337.5\|\|347.9		\| 1\|\|337.5\|\|347.9\|\|
	\|-		\|-
	\| 2\|\|336.5\|\|333.9		\| 2\|\|336.5\|\|333.9\|\|
	\|-		\|-
	\| 3\|\|334.7\|\|341.5		\| 3\|\|334.7\|\|341.5\|\|
	\|-		\|-
	\| 4\|\|335.5\|\|343.2		\| 4\|\|335.5\|\|343.2\|\|
	\|-		\|-
	\| 5\|\|339.2\|\|347.7		\| 5\|\|339.2\|\|347.7\|\|
	\|-		\|-
	\| 6\|\|337.2\|\|345.4		\| 6\|\|337.2\|\|345.4\|\|
	\|-		\|-
	\| 7\|\|334.2\|\|341.8		\| 7\|\|334.2\|\|341.8\|\|
	\|-		\|-
	\| 8\|\|335.5\|\|337.9		\| 8\|\|335.5\|\|337.9\|\|
	\|-		\|-
	\| 9\|\|341.1\|\|342.1		\| 9\|\|341.1\|\|342.1\|\|
	\|-		\|-
	\| 10\|\|344.4\|\|335.9		\| 10\|\|344.4\|\|335.9\|\|
	\|-		\|-
	\|Average depth\|\|337.58\|\|341.73		\|Average depth\|\|337.58\|\|341.73\|\|337.82
	\|-		\|-
	\|Repeatability\|\|3.0% (the bad repeatability was accepted due to the high noise level in the room)\|\|4.1%		\|Repeatability\|\|3.0% (the bad repeatability was accepted due to the high noise level in the room)\|\|4.1%\|\|3.0%
	\|}		\|}

Bghe: /* Results of acceptance test no. 4 */

2017-09-25T12:41:48Z

Results of acceptance test no. 4

← Older revision		Revision as of 14:41, 25 September 2017
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	\| align="center" style="background:#f0f0f0;"\|''''''		\| align="center" style="background:#f0f0f0;"\|''''''
	\| align="center" style="background:#f0f0f0;"\|'''Measured depth [nm]'''		\| align="center" style="background:#f0f0f0;"\|'''Measured depth [nm]'''
			\| align="center" style="background:#f0f0f0;"\|'''Repeated 20170925 with cover off'''
	\|-		\|-
	\| 1\|\|337.5		\| 1\|\|337.5\|\|347.9
	\|-		\|-
	\| 2\|\|336.5		\| 2\|\|336.5\|\|333.9
	\|-		\|-
	\| 3\|\|334.7		\| 3\|\|334.7\|\|341.5
	\|-		\|-
	\| 4\|\|335.5		\| 4\|\|335.5\|\|343.2
	\|-		\|-
	\| 5\|\|339.2		\| 5\|\|339.2\|\|347.7
	\|-		\|-
	\| 6\|\|337.2		\| 6\|\|337.2\|\|345.4
	\|-		\|-
	\| 7\|\|334.2		\| 7\|\|334.2\|\|341.8
	\|-		\|-
	\| 8\|\|335.5		\| 8\|\|335.5\|\|337.9
	\|-		\|-
	\| 9\|\|341.1		\| 9\|\|341.1\|\|342.1
	\|-		\|-
	\| 10\|\|344.4		\| 10\|\|344.4\|\|335.9
	\|-		\|-
	\|Average depth\|\|337.58		\|Average depth\|\|337.58\|\|341.73
	\|-		\|-
	\|Repeatability\|\|3% (the bad repeatability was accepted due to the high noise level in the room)		\|Repeatability\|\|3.0% (the bad repeatability was accepted due to the high noise level in the room)\|\|4.1%
	\|}		\|}

Bghe: /* Results of acceptance test no. 4 */

2016-12-02T12:15:56Z

Results of acceptance test no. 4

← Older revision		Revision as of 14:15, 2 December 2016
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	\| 10\|\|344.4		\| 10\|\|344.4
	\|-		\|-
	\|Average depth\|\|~~336~~.58		\|Average depth\|\|337.58
	\|-		\|-
	\|Repeatability\|\|3% (the bad repeatability was accepted due to the high noise level in the room)		\|Repeatability\|\|3% (the bad repeatability was accepted due to the high noise level in the room)

Bghe: /* Results from the Optical Profiler (Sensofar) acceptance test */

2016-01-11T07:33:57Z

Results from the Optical Profiler (Sensofar) acceptance test

← Older revision		Revision as of 09:33, 11 January 2016
Line 5:		Line 5:

	The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with		The acceptance test was performed in January 2012 by ST Instruments and Sensofar together with
	Pernille V. Larsen @ Danchip and Berit G. Herstrøm @ Danchip.		Pernille V. Larsen@Danchip and Berit G. Herstrøm@Danchip.

	==This Table shows an overview of the acceptance tests==		==This Table shows an overview of the acceptance tests==